5

14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104 50 18 16 M10 x 1.5 120 63 18 16 M10 x 1.5 120 80 21 19 M14 x 1.5 144 100 25 22 M16 x 1.5 147 D* When female thread is used, use a washer etc

Air Cylinder

Applicable bore size A A1 E1 LB MM NDH10 NX R1 U1 I-020B 20 46 16 20 36 M8 x 1.25 9 +0.058 0 9 0.1 0.2 10 14 I-032B 25, 32 48 18 20 38 M10 x 1.25 9 +0.058 0 9 0.1 0.2 10 14 I-040B 40 69 22 24 55 M14 x 1.5 12 +0.070 0 16 0.1 0.3 15.5 20 Bore size A H MM NDH10 NX1 U1 R2 Y Z 20 18 41 M8 x 1.25 9 +0.058 0 9 0.1 0.2 14 10 11 66 25, 32 22 45 M10 x 1.25 9 +0.058 0 9 0.1 0.2 14 10 14 69 40 24 50

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

High Purity Fluoropolymer

Model L N E J M H W ( T ) LQ1F4A LQ1F4B LQ1F5A LQ1F5B LQ1F6A LQ1F6B 60 1/2" 3/8" 3/4" 1/2" 1" 3/4" 34 33.1 30 21 30 28 12 65.2 58 41 40 36 26 36 32 14 63.2 M 25 1 51 81.5 49 36 39.5 14 Class 6 16 High Purity Fluoropolymer Fittings HYPER FITTING Series LQ2 How to Order LQ2 H M 21 Threaded connection Thread type Symbol Nil N Type R, Rc NPT Fitting type Symbol H L B R Type Connector Elbow

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

SZ3B60 [N.C. valve x 2pcs.] 4 (A) 2 (B) SOL.b 5 (R) SOL.a 3 (R) 1 (P) SZ3B60K/With back pressure check valve 4 (A) 2 (B) 5 (R) SOL.a SOL.b 3 (R) 1 (P) 5 (R) 1 (P) 3 (R) SZ3C60 [N.C valve, N.O. valve 1pc. each] SZ3C60 [N.C. valve, N.O. valve 1pc. each] 4 (A) 2 (B) SOL.b 5 (R) SOL.a 3 (R) 1 (P) SZ3C60K/With back pressure check valve 4 (A) 2 (B) SOL.b 5 (R) SOL.a 3 (R) 1 (P) 5 (R) 1 (P) 3 (R

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

4 r t y u i !5 !6 No.

SZ3000

ports) Applicable tube O.D.: 8 13.3 (Pitch) P= 10.5 13.3 24 24 16.2 16.2 17 34 34 36.7 B 2 B 2 B 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 X A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting (X,PE ports) Applicable tube O.D.: 6 2n2-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 Applicable connector: 26 pin MIL type with strain relief (L4) L3

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Connection threads R/NPT Model Applicable tubing O.D.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

VT Manual override (Non-locking) VP VG 69.5 [76] 57.1 50.5 35 63.5 VP VQ VQZ [ ] for AC VZ L plug connector (L) M plug connector (M) VS 69.5 [76] 63.5 63.5 30.5 30.5 2-M5 X 0.8 (P/R port) 4-Rc (PT)1/4 14 21.5 14 21.5 (External pilot port) 2-M5 X 0.8 (External pilot port) 6 6 22.5 9.5 22.5 9.5 X R P X R P 43 43 71.5 [72.8] 67.5 81.1 35 35 4-Rc (PT)1/4 (Lead wire length) (P/R port) 300 80.6

MB

50 63 80 100 to 500 23 14 172.5 170 10.5 162 180.5 13 10 to 500 23 14 182 184 11 171 195 13 10 to 600 30 20 209 206 15 194 221 17 14 to 600 30 20 209 206 15 194 221 17 14 U to 800 42 30 269 264 23 246 287 26 22 CX L RR to 800 42 30 269 264 23 246 287 26 22 Z + Stroke ZZ + Stroke Double clevis(D)/Locking at head end (-H) -W -H/ -R (mm) Port Cushion valve Stroke range Bore size (mm) +0.3 +0.1

VQ7-6/7-8

-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R o o t r u t r u w y e q w y e q VQ7-6-FPG-Do t r u w y e q i Replacement Parts (For valve) FHG FJG FIG FHG FJG FIG Description VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7-6-FG-S-R VQ7-6-FG-D-R VQ7-6-D-R VQ7-6-DNo.

C85

1 y q r e i !2 o !

VM

insertion of R thread Connection thread R Model H 2(A) 1(P) Effective area (mm2) L1 L2 L3 L4 L5 L6 Q B Weight (g) 1(P) R 2(A) 2(A) R 3(R) VHK R-01S-01S 18 41 65.2 32.6 32.6 16.5 3.5 11 57 30 8.6 1.2 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 VHK R-02S-02S 18 41 78 39 39 16.5 3.5 11 66 47 9.7 1.2 VHK R-03S-03S 22 46 88.6 44.3 44.3 21.5 4 14 76 72 16.1 3.2 VHK R-04S-04S 22 46 97.4 48.7 48.7 21.5 4 14

CV/MVGQ

16 50 7 39 Up to 300 24 22 10 15 8 46.5 84.5 M14 x 1.5 21.5 42.5 32 0 0.039 20ZZ S U Z NN Q QY RR Bore size (mm) Data 20 25 32 40 133 142 19.8 14 9 62 14 M20 x 1.5 9 62 14 137 146 M26 x 1.5 22 14 14 139 148 16 9 64 M26 x 1.5 25.8 188 88 18 177 M32 x 2 29.8 16 11 10-15-23 24 Series CVM5 Double Clevis Style (D) Bore size Stroke CVM5D Manual override Width across flats B1 CD hole H10 Rod d9

CV/MVGQ

ZZ Z U S RR QY Q NN Bore size (mm) 20 25 32 40 142 133 14 62 9 14 19.8 M20 x 1.5 146 137 14 62 9 14 22 M26 x 1.5 148 139 14 64 9 16 25.8 M26 x 1.5 188 177 18 88 11 16 29.8 M32 x 2 Rod Side Trunnion Style (U) Bore size Stroke CVM5U Manual override Width across flats B2 Width across flats NA Width across flats B1 S + Stroke ZZ + Stroke Eh8 H1 NN H MM B1 F K AL I Q A B2 D HX Bore size (mm) 20

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

18 25 30 32 18 22 22 30 35 35 15.5 13 17 17 19 27 27 14 9.2 2 2 2 2 2 2 Up to 200 Up to 300 Up to 300 12 12 12 13 14 14 10 10 10 10(13) 12(14) 12(14) 35 40 40 50 58 58 8 10 10 14 18 18 1/8 1/8 1/8 1/8 1/4 1/4 11 11 11 12 13 13 M5 x 0.8 M6 x 0.75 M8 x 1.0 M10 x 1.25 M12 x 1.25 M14 x 1.5 106 111 113 130(139) 150(162) 150(162) 5 6 6 8 11 11 M4 x 0.7 depth 7 24 M8 x 1.25 M10 x 1.25 M10 x 1.25

Series KV2 Fittings

m R M R R m p p m m R R m p p p m m p M M m p p m p p m p M m m m p p M m p p p M m p p p M R p R R p M p p R m M m p m m p m M p m m m m m m p m R m R p m m m M m p m m p m M p m m m m m m p m R m R p m m p R M R m m m p M M m p m p m R m m p p p p p p m p p R p p m m m m M m m m m p R m m m m R p m m m p M R R R p 26 Series KV2 27 Series KV2 Return Policy KV2 Warranty: SMC Corporation

ARM10/11

Torque recommended: (R 1/8: 7 to 14 Nm).

ARM10/11

Torque recommended: (R 1/8: 7 to 14 Nm).

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

R P R port P Base mounted P port Type 32P Individual EXH spacer assembly R port A, B port R2 R1 -+ -+ R port R P A, B port Mixed mounting of 3 port valves and 4, 5 port valves P port 3 port valve 4, 5 port valve Interface regulator -+ -+ A B R port R P A, B port P port -+ -+ A B R P -+ -+ A B B R port R P For detailed specifications about SYJ3000, refer to page 14.