4/5 Port Air Operated Valve Series SYJA3000

(A) 4 (A) 4 (B) 2 (B) 2 (Example) SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

_ _ 1 A 346 _ _ 0 B 818 _ _ 1 B 333 _ _ 0 C 750 _ _ 1 C 321 _ _ 0 D 692 _ _ 1 D 310 _ _ 0 E 642 _ _ 1 E 300 _ _ 0 F 600 _ _ 1 F 290 7 8 7.

E-P HYREG ® Series VY1 1

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 12 V Body size Port size Rc Option Symbol P/A port R port B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) 00 M5 00 M5 01 00 01 02 00 02 03 04 Symbol Mounting Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Base mounted 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol

Ejector Valve Unit Series ZYY/ZYX 1

-14 ZSE1-00-15 ZSE1-00-16 ZSE1-00-17 ZSE1-00-18 ZSE1-00-19 ZSE1-00-55 Model -X129 (-X130) -X129 (-X130) -X129 (-X130) -X129 (-X130) -X129 (-X130) -X129 (-X130) -X129 (-X130) Sensor type Diffusion type semiconductor pressure sensor Set pressure range 0 to 101 kPa Hysteresis 1 to 10% of set pressure (Adjustable) 3% full span or less (Fixed) 1 to 10% of set pressure (Adjustable) 1% full span

Ejector Valve Unit Series ZYY/ZYX

14 X129 (X130) ZSE1 00 15 X129 (X130) ZSE1 00 16 X129 (X130) ZSE1 00 17 X129 (X130) ZSE1 00 18 X129 (X130) ZSE1 00 19 X129 (X130) ZSE1 00 55 X129 (X130) Model Sensor type Diffusion type semiconductor pressure sensor Set pressure range 0 to 101 kPa Hysteresis 1 to 10% of set pressure (Adjustable) 1 to 10% of set pressure (Adjustable) 3% full span or less (Fixed) 1% full span or less Repeatability

Series AP3500

face seal (Female) 1/2 inch face seal (Male) 1/2 inch tube weld 3/4 inch face seal (Female) 3/4 inch face seal (Male) 3/4 inch tube weld Code Purge port 1) TW6 FV8 MV8 TW8 FV12 MV12 TW12 q Inlete None Available None Available Outletr None None Available Available Code 00 M0 0B MB w e r 1) 1/4 inch face seal (Male) as standard.

IIIIIII

, 0.17 in. (4.4 mm) TJ 0.08 in. i2 0 mm) 0.25 in (6.4 mm) '75 PSIG (5 Kgt/cm2) '75 PSIG (5 Kgf/cm2) @ll -=hl'o Panel Mounting A B c E F u H J K M N o 6 1 9 1 5 7 r ) 532 135 1 1 5 7 t40) o87 t22l 0 0 6 {t 5I o 1 2 {31 0 8 0 20 4\ 1 5 7 (40) 0 9 6 1 2 6 (32) 1 4 2 (36) 1 2 0 (6) A B o E F H J K M N o 6 0 1 152 6l 5,32 1 3 5 ' t 1 5 7 a40l 0 6 9 1 7 5 006 {1 5l o 1 2 f3l 0 8 0 20 1l 1 5 7 440

Mechanical Valves Series NVM, NVFM, NVZNI

, 0.17 in. (4.4 mm) TJ 0.08 in. i2 0 mm) 0.25 in (6.4 mm) '75 PSIG (5 Kgt/cm2) '75 PSIG (5 Kgf/cm2) @ll -=hl'o Panel Mounting A B c E F u H J K M N o 6 1 9 1 5 7 r ) 532 135 1 1 5 7 t40) o87 t22l 0 0 6 {t 5I o 1 2 {31 0 8 0 20 4\ 1 5 7 (40) 0 9 6 1 2 6 (32) 1 4 2 (36) 1 2 0 (6) A B o E F H J K M N o 6 0 1 152 6l 5,32 1 3 5 ' t 1 5 7 a40l 0 6 9 1 7 5 006 {1 5l o 1 2 f3l 0 8 0 20 1l 1 5 7 440

JXCx-OMU0024

Refer to section "4.1 (1-1-2) View (V)" for how to display the Step Data window. b) Change to Remote mode Change the mode to Remote mode in the main window. Confirm that SVRE is ON.

Ejector Valve Unit, Series ZYY/ZYX

A A A B A B P1 B B Section A-A (ejector) Section B-B (solenoid valve) Replacement parts list Parts list No. 1 2 3 4 5 6 7 8 Description Material No. Description Part No.

AKH/AKB Series

Model D L M M M AKH03-00 AKH07-00 AKH09-00 AKH11-00 AKH13-00 3 6 10 17 24 2.8 6.5 14 24 34 5/32 1/4 5/16 3/8 1/2 9.3 12 15.2 18.5 21.7 33.5 39 53.3 63.6 70.2 12.7 13.6 18.5 21 22 L Male Connector Type: AKH Millimeter Size Connection thread R Applicable tube O.D.

2/3 Port Valve

7 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15(11) 2 9 Others 20(14) 3 Option 25(16) 4 1 1 Valve size 2 to 9 1 4 32(22) 5 1 B 1 4 32F Flange 40A 1 1 2 40(28) 6 1 B 1 2 40F Flange Electrical entry/Indicator light and surge voltage suppressor 2 50A Nil 50(33) 7 50F G Grommet Air operated 2B Flange E GS Grommet with surge voltage suppressor Grommet terminal 2 B 1 2 65F 65(45) 8 Flange Grommet terminal

NCG/CG1

04 L 25 N NCG 00 N 25 M9NW L 04 NCDG With auto switch Number of auto switches Built-in magnet Nil S n 2 pcs. 1 pc. n pcs.

H/DL/L/LL

(mm) M Effective area (mm 2) Weight (g) A L2 L1 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 DL04-01 15 3.5 23 DL04-02 17 19 4 10 23.5 19.6 10 30 DL06-01 25 17 Applicable tubing 19.6 10 23.5 DL06-02 16 19 31 14 6 9 12 DL06-03 22 53 26.5 24.5 21.6 22.6 24.5 25.8 24.5 29.4 29.6 30.3 29.4 91 Reference dimensions after R thread installation.

SI unit ( device)

Value 7 6 5 4 3 2 1 0 Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 1 0-7 All clear output Setting value 00 0 0 0 0 0 0 0 0 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 15 14 13 12 11 10 9 8 2 8-15 All hold last state Setting value FF 1 1 1 1 1 1 1 1 00 0 0 0 0 0 0 0 0 Output No. 23 22 21 20 19 18 17 16 23 22 21 20 19 18 17 16 3 16-23 All force output Setting value

Interface Regulator for VQ4000 5 Port Solenoid Valve

Interface regulator SMC 1 P 5 3 R2 R1 PE How to Order Applicable interface regulator model Reduced pressure port Solenoid valve model ARBQ4000-00-A-1 A VQ40 (plug-in type) ARBQ4000-00-B-1 B ARBQ4000-00-P-1 P ARBQ4000-00-A-5 A VQ45 (plug lead type) ARBQ4000-00-B-5 B ARBQ4000-00-P-5 P Circuit Diagrams Reduced pressure port: A Reduced pressure port: B Reduced pressure port: P SMC Pneumatics,

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

IZ-OMK0015

Doc.No.IZ-OMK0015D PRODUCT NAME IONIZER MODEL/Series IZS31 series 1 Doc.No.IZ-OMK0015D Contents Safety Instructions . 3 1. Installation Method . 9 1-1. Installation of Ionizer Body . 9 1-2. Installation of Feedback Sensor/Auto Balance Sensor [High-precision type] .11 1-3. Installation of Auto balance sensor [Body-mounting type] . 12 1-4. Cable Connection . 13 2.

AC Servo Motor Driver

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

VFR3000-OMJ0001

1.25Y-3L1.25-3.5S1.25-4M 1.25-3,1.25-3S,1.25Y-3N,1.25Y-3S ( ( ( ( ) ) ) ) A-B+B-+COM-COM 1.25-31.25-3S1.25Y-3N1.25Y-3S G DC ++(-) DIN 2 1 SOLA 1 A B B + SOLB 2 3 COM B (COM) A DC AC A B + + + + A B 70 8 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 2 2 2 2 3 3 3 3 (A,B) ( ( ( (VFR3 VFR3 VFR3 VFR3 00 00 00 00) ) ) ) ( ( ( (VFR3 VFR3 VFR3 VFR3