ARP30-02BGEx.) ARP30-02BG-1Ex.) ARP30-02BG-3Within 0.2% F.S.Within ?1% F.S. (or ?3 kPa)Ex.) ARP30-02BGEx.) ARP30-02BG-1Ex.) ARP30-02BG-31/8?5 to 60C (No freezing)Ex.) ARP30-02BE1Bleed type0.3

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zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Special Applications: 10- (Clean Room Compliant), Size: 30, Backflow Function: None, Thread: N (NPT), Port Size: 03 (3/8), Accessory: None, Specifications: 0.005 to 0.4MPa Setting, Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: Clean Room Compliant, Size: 30, Backflow Function: None, Thread: NPT, Port Size: 3/8, Accessory: None, Specifications: 0.005 to 0.4MPa Setting, Pressure Unit: Name plate & Pressure Gauge in Imperial Units: psi

Table of Contents

ZSE ISE PSE Z I SE3 PS Two independent flow rate settings are possible.

F

E 0.05MPa / 8PSI Minimum Operating Pressure 06 34 10 1 N North America A R E A C O D E 5 ~ 60C / 40~140F Ambient and Fluid Temperature T Y P E 10 Turns Number of Needle Rotations B O D Y S I Z E R(PT) N NPT 50 34 60 1 Port Size A B C D Model 3/4 74 115 42 50 (N)AS500 1 90 158 55 62 (N)AS600 Courtesy of Steven Engineering, Inc. !

Poweraire.com - Instant Fittings Catalog TUBE x THREAD FITTINGS

$6.90 5/16 NPT1/8 HVFS5/16-N01 $6.90 5/16 NPT1/4 HVSF5/16-N02 $6.90 5/16 NPT1/4 HVFS5/16-N02 $6.90 5/16 NPT3/8 HVSF5/16-N03 $6.90 5/16 NPT3/8 HVFS5/16-N03 $6.90

ITV

x, c: 4 Metric size For single unit z, x, c: 5/32" Inch size Connection size z, c: 6, x: 4 Metric size Manifold z, c: 1/4", x: 5/32" Inch size (1) Weight 100 g or less (without options) Note 1) Indicates the weight of a single unit.

Table of Contents

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9 90.2 91.9 90.2 91.9 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5

Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

Compact and Lightweight

Applicable model t ZH15DA-09-N03-11 ZH15DA-N02-N03-N03 2 Minimum C Factor of a Supply Valve Model C[dm3/(sbar)] ZH05A 0.12 ZH07A 0.23 ZH10A 0.47 ZH13A 0.80 ZH15A 1.06 ZH18A 1.53 ZH20A 1.88 ZH18DA-11-N03-13 ZH18DA-N03-N03-N03 1 ZH20DA-10-04-12 ZH20DA-03-04-04 ZH20DA-11-N04-13 ZH20DA-N03-N04-N04 t 2.

Tamper Proof and Flat Head Screw

AS331F-N03 NPT3/8 40, 50, 63 AS421F-N04 AS431F-N04 NPT1/2 63, 80, 100 Note 1) Elbow type only.

Pressure Relief 3 Port Valve with Locking Holes

VH*-OMX0068-A PRODUCT NAME Pressure Relief 3 Port Valve with Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~(F,N)02(-R,Z)-D VHS30-(F,N)02~(F,N)03(-R,Z)-D VHS40-(F,N)02~(F,N)04(-R,Z)-D Contents Page 1. Safety Instructions 1~5 2. Application 6 3. Specifications 6 4. How to Order 7~8 5. Construction / Parts List 9 6.

ISG

Bellows assembly for ISG 110-030 16-9-6 3 General Purpose Pressure Switch Series ISG Dimensions Open type ISG110 to 191-030 (Without hysteresis scale plate) ISG110 to 131-031 (With hysteresis scale plate) Hysteresis adjusting bolt Setting pressure adjusting bolt Hysteresis adjusting bolt ZSE ISE Setting pressure adjusting bolt PSE Z I SE3 75 18 8.5 110 54 173 8.5 93 110 54 173 PS Z I SE1

VH Series, 4 Way Hand Valve

(Exhaust center) 1/4" 17(0.9) Exhaust center VH302-N02, N03 VH312-N02, N03 2 (Position) 2 1 1.56 (0.71) (A) 2 (B) 4 VH3 1/4", 3/8" VH320-N02, N03 VH330-N02, N03 3 (Closed center) 3/8" 20(1.1) 1 (P) 3 (R) VH321-N02, N03 VH331-N02, N03 3 (Exhaust center) VH322-N02, N03 VH332-N02, N03 2 1 3 4 2 (Position) VH400-N02 to N06 VH410-N02 to N06 3 (Closed center) 1/4" 45(2.5) 4 3 VH401-N02 to N06 VH411

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

AS331F-N03 NPT 3/8 AS421F-N04 AS431F-N04 NPT 1/2 Note 1) Elbow type only Note 2) Meter-out and meter-in types can be visually differentiated by the flow direction symbol on the resin body.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

AS331F-N03 NPT 3/8 AS421F-N04 AS431F-N04 NPT 1/2 Note 1) Elbow type only Note 2) Meter-out and meter-in types can be visually differentiated by the flow direction symbol on the resin body.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

-07SD 8 15.2 41 18.5 29.5 1/4" 13.2 27.8 39.3 17 53.7 23 9.8 47.4 R 3/8 1.2 19 20.9 AS321F-03-10SD AS321F-N03-09SD 10 18.5 43.3 NPT 3/8 19 23 9.8 20.9 53.7 1.2 47.4 21 31.8 5/16" 15.2 29.5 41 18.5 AS321F-03-12SD AS321F-N03-11SD 12 20.9 44.3 22 32.8 17.9 31.8 43.3 21 3/8" AS421F-04-10SD AS421F-N04-11SD 10 18.5 47.9 21 33.6 3/8" 17.9 33.6 47.9 21 1/2" NPT 1/2 23.8 21.7 28.6 12.4 35.2 49.5 25.4

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

M5 Port size M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Type 01 02 03 04 U10/32 N01 N02 N03 N04 Elbow Universal 2 3 Universal type Applicable tubing O.D.