Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

VCW

1 2 3 4 5 n LVA LVH LVD LVQ 21 LQ 16 H H P = J (Pitch) OUT port n-1/4 2 5.5 LVN n-1/8 : Thread type TI/ TIL L Dimension (mm) PA n (stations) Dimensions Model PAX 2 3 4 5 6 7 8 9 10 L1 69 103.5 138 172.5 207 241.5 276 310.5 345 L2 VV2CW2 PB 81 115.5 150 184.5 219 253.5 288 322.5 357 L3 93 127.5 162 196.5 231 265.5 300 334.5 369 L1 77 115.5 154 192.5 231 269.5 308 346.5 385 L2 VV2CW3 89 127.5

Micro-Mist Separator with Prefilter Series AMH

:l 3/86 female thread Maintenance l--I space ~ Drain H I I Dimensions with mounting bracket Model Port size A B C D E F G I J 1 K 1 L 1 MI N I 01 P I 01 RI s B AMH850 11 /2 , 2 460.5 42 348 220 57.5 220 10 463.51 180 I 30 I 15 I 24 I 13 1120 1184 1 220 1110 1 18 I 6 6 SeriesAMH Made to Order Specifications ICD With Differential Pressure Gauge (GD40-2-01) I@ With IN-OUT Flange For ease of

Table of Contents

ZSE1-01-15CN1 pc.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Refer to the table below for accessory/option combinations Thread Rc (PT) Table: Accessory/Option combinations Depending on model l Not available Available F G (PF) N NPT Accessories Options C C D -J -R D J T AMD150 R AMD250 AMD350 AMD450 Applicable models Accessories /Options Port size AMD550 AMD650 AMD850 01 B B 06 10 14 1 8 3 4 1B N.C. auto drain N.O. auto drain Drain guide 1/4B IN R

ML1C

Holding force 25 320 N 32 500 N 40 800 N CNG MNB CNA2 CNS Brake construction is designed not to allow loads on guide. CLS Spring force works directly on the brake-shoe and the brake plate is caught between brake shoes from top and bottom so that the slide table can stop without compromising guide performance.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

W K CY1RG50/63 HB HC N X MX H MTS CB HA 2-P (Piping port) 4-J x E (Depth) 4-Counterbore dia.

AR Series Modular Type Regulator

A : Max. 3.5 AR20-A to AR25-A : Max. 4 AR30-A to AR40-06-A : Max. 8 Model Standard specifications Optional specifications Round type pressure Round type pressure gauge gauge (with color zone) Bracket mount Panel mount P1 P2 A B C D F J H J H J M N Q R S T U V W Y Z AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 25 28 30 4.5 6.5 40 2 18 18.5 AR20-A 1/8, 1/4 1/8 40 67.4 23.5 22

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) 10 to 16 20 to 50 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M10 x 1 M14 x 1 Mounting 10, 20, 30, 40, 50 10, 20, 30, 50 Stroke (mm) 0 stroke 0 stroke Spring reactive 2.0 N 1.0 N Stroke end Stroke end force 5.0 N 3.0 N With no non-rotating (J), With non-rotating

MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

OMU0023

Instruction to perform the Return to Origin operation 4 01 05 001A FF00 01 05 001A FF00 sent. 5 01 02 004B 0001 01 02 01 Acquires the INP signal information.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Allowable Kinetic Energy 12 16 20 25 Bore size (mm) lbf-ft J J J lbf-ft J lbf-ft lbf-ft 0.066 0.090 0.055 0.022 0.028 0.038 0.016 Standard 0.041 0.133 0.180 0.110 0.043 0.055 0.075 0.032 With rubber bumper 0.081 Minimum Operating Pressure 20/25 12/16 Bore size (mm) MPa psi MPa psi Min. operating pressure 0.05 7.3 0.07 10.2 2 Compact Cylinder Series CQS OUT IN Double Acting Single or Double

5 Port Solenoid Valve Series SQ1000/2000

How to Order Manifolds SS5Q J 2 3 08 D0 N ( 00T) D For P, R port inch sizes Kit designation Plug-in Series VQ2000 1 2 4 3 Option 4 Nil Electrical entry/Cable length Stations 1 2 Note 2) 01 Kit designation Entry direction Standard stations Kit, Cable length 1 station None Specifies DIN rail length Note 2) 02 to 24 B K N R S With back pressure check valve on all stations Special wiring specifications

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

32 F J/K10-0-A14 (With Buffer) S S M14 x 1 M14 x 1 Width across flats 19 I 5 Width across flats 19 5 I 5 J 5 J Width across flats 12 Width across flats 12 Applicable tube O.D.

Series VCL

J L Bracket part no.

Series VCS

2 Port for Steam Dimensions (mm) 1in = 25.4mm T (Y) R Z 16 T 25 IN port 2-3/8 : Thread type S l = 280 l = 300 (X) 2.5 (N) E C D G Q SMC SMC C A B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 N-1/4 N-1/8 : Thread type H H P = J (pitch) 2 L dimensions (mm) n (stations) Model Dimensions 3 5 8 4 6 10 7 2 9 103.5 172.5 276 138 207 345 241.5 L1 69 310.5 VV2CS2 115.5 184.5 288 150 219

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

32 100 H7BW Number of auto switches Bearing type Nil S n 2 pcs. 1 pc. n pcs.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

J L Bracket part no.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

1.21 500 N 800 N Holding force 320 N 0.43 0.68 1.