AC

SAC4006, #13 B510L 50 24 12 B610L 4 Y60L 70 10 15 6 62.5 AC5020, AC5520, AC6020 Y60L SAC5000, #13 B610L 1.1-22 Accessories T Bracket/ Interface with T Bracket Interface with T bracket T bracket T bracket, Interface with T bracket Model T bracket Interface with T bracket T bracket Interface with T bracket File Applicable model A B C D E F G R H L SAC1000, #14 SAC2000, #14 SAC2503, #14 SAC4000

Electric Actuators

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order Clean Room Specification Series LJ1H10 High Rigidity Direct Acting Guide Type Motor Output: 50W/100W How to Order Motor output: 50W F P 2 B 1 X60 Stroke 1 LJ1H10 Horizontal

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

1/4 1/4 64 20 40 10 102 17 26 67 18 15 11 M10 x 1.25 80 Up to 750 20 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 100 Up to 750 20 to 750 40 37 116 41 140 1/4 1/4 92 30 52 14 124 21 31 76 25 19 16 M12 x 1.75 Bore size [mm] K KA LZ M MM N P PG PH PL PW S Without rod boot With rod boot H ZZ e f h l ZZ 40 6 14 71 11 M14 x 1.5 27 1/4 42 11 20 45 153 51 215 43

MXQ

3H9 depth 3 +0.025 0 3H9 depth 3 +0.025 0 HA GA 4 NN-M4 x 0.7 thread depth 8 B A 7 7 6.5 6.5 3.2 3.2 A 12.5 5.7 12.5 5.7 B H (NN 1) x H G Section AA Section BB (mm) Model F 25 25 26 32 46 50 N 4 4 6 6 6 6 G 7 14 8 8 31 H 25 28 31 29 30 NN 2 2 3 3 4 4 GA 13 14 29 39 37 61 HA 19 28 27 31 58 60 I 11 10 12 14 13 12 J 17 28 40 52 78 105 K 23.5 33.5 43.5 53.5 63.5 88.5 KA 82.5 112.5 NA 4 4

MNB

45.5 22 17 10 12 13 12 -X 40 14 8 14 27 4 Up to 500 14 63 1/8 35 104 38 91 52 10 16.5 52.5 30 22 10 16 13 12 50 15.5 11 18 32 5 Up to 600 75 1/4 20 40 120.5 46.5 104.5 65 12.5 19 58.5 35 27 14 20 14 15 2063 16.5 11 18 32 9 Up to 600 90 1/4 20 45 134.5 56.5 119.5 75 17.5 23 68 35 27 14 20 14 12 80 19 13 22 37 11.5 Up to 750 30 102 1/4 45 169 72 150 95 22 33 81 40 32 22 25 20 18 Data 100 19

MNB

750 Up to 750 88.5 10 14 18 18 22 26 83 97 96.5 91 104 111.2 104.5 120.5 123.5 119.5 134.5 157 150 169 177 170 189 J M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 Q 37 41.5 47.5 55 61 68 H 47 51 58 58 72 72 S 154 161 183 197 245 265 T 34 39.5 47 55.5 61.5 69.5 V 6.5 8 9 8.5 10.5 10.5 VA 13 16.5 20 23 33 37.5 W 6.5 9 10.5 12 14 15 X 22 24 27 27 30 32 Y 9 11 11 14 14 16 ZZ 248

MNB

B2 H S + Stroke ??

MB1

Width across flats MM W Cushion valve Dimensions D Effective thread H A K ZZ + Stroke H F Width across flats 14 18 22 22 26 31 Bore size (mm) Effective thread length ZZ + Stroke ZZ W MM K H D A 32 40 50 63 80 100 139 146 166 166 192 208 7.2 9.7 10.5 12 14 15 M14 x 1.5 M18 x 1.5 M22 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 6 7 10 10 10 16 51 58 68 68 74 90 16 20 25 25 30 36 30 35 40 40 40 50 27

10

G H H1 J K KA MA MB MM N P S TT TX TY V W ZZ 32 22 19.5 46 17 32.5 12 30 13 13 47 6 M6 x 1 6 10 16 4 M10 x 1.25 27 1/8 84 17 48 49 4 6.5 178 40 30 27 52 22 38 16 35 13 14 51 8 M6 x 1 6 14 16 4 M14 x 1.5 27 1/4 84 22 55 58 4 9 186 50 35 32 65 27 46.5 20 40 14 15.5 58 11 M8 x 1.25 7 18 16 5 M18 x 1.5 31.5 1/4 94 22 68 71 5 10.5 210 63 35 32 75 27 56.5 20 45 14 16.5 58 11 M8 x 1.25 7 18 16 5

Modular F.R.L. Unit

H M M AR50, 60 AR30, 40 J G J G A A IN OUT IN OUT H M M H Parts list Material Note No.

C85

10 6.0 8 8 9 9 12 14 7.5 7.5 6.5 6.5 13 13 4 4 6 6 8 10 6.0 6.75 6.75 9 10.5 Floating joint: Series JA In the case of dimension without C M M U U D F G B B E H C E P A (mm) M Max. operating tension and compression power (kN) Maximum screwed depth P Allowable eccentricity U A B C D E F G H Bore Model Nominal thread dia.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

: A6 Symbol: A7 WA C C0.5 file chamfer AL B RD B AL MM AL MM MM DC 30 30 H 30 30 L W H W1 T H H H Symbol: A10 Symbol: A11 Symbol: A12 Symbol: A13 Symbol: A14 DA DA C0.5 R sphere AL MM 30 30 DA C R sphere TP R sphere A A H C H T W1 H H H Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 DA AL MM 30 DA MM 30 MM 30 MM 30 C 30 A H H A H A A C H A H Symbol: A20 Symbol: A21 Symbol:

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Otherwise, unexpected malfunctions, such as knocking, may occur. 14.

C76

Piston rod (Rubber cushion only) Bore Stroke C With rod boot Wh NCA K KK DC e -X KA 20AM 9 9 Rod cross section f I Data h (mm) BE AM 20 24 C 12 14 D 37.5 46.5 FA 30 35 FB 14 16 K 10 12 KA KK KV 38 50 KW 7 8 TDH9 TW 34.5 42.5 WH 38 45 Eh8 EE G 9 12 H 58 69 HR N 17(19) 22(25) NB 34.5 42.5 S 68 89 XB 47 57 XC ZZ 140 174 SW 17 19 TC M8 x 1 Bore 30 0 0.033 +0.036 0 10 32 40 97 122 M30 x 1.5 G

C76

Rail mounting type (A) Band mounting type (B) or non-magnet CP95 ZZ + Stroke NCM C76KE Non-rotating, Piston rod (Rubber cushion only) Bore Stroke C With rod boot Wh NCA K KK DC e -X KA 20AM 9 9 Rod cross section f I Data h (mm) AM 20 24 BE C 12 14 FA 30 35 K 10 12 KK KV 38 50 TDH9 TW 34.5 42.5 D 37.5 46.5 FB 14 16 KA KW 7 8 WH 38 45 EE G 9 12 N 17(19) 22(25) XB 47 57 H 58 69 NB 34.5 42.5

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

NCA D-X Single/Double Knuckle Joint 20Data A, H Dimensions when Mounting a Single/Double Knuckle Joint together with a Rod End Nut Symbol H A Applicable knuckle joint part number Bore size (mm) 125 140 160 180 200 250 300 L1 H1 A H I type single knuckle Y type double knuckle 125 65 Bore size (mm) 125 140 160 180, 200 250 300 50 3.5 100 156.5 I-12 Y-12 110 125 65 50 3.5 105 161.5 I-14 Y-14

42

( ): Values for 3/8" VFR 2-position double: VQ425 -l 3-position closed center: VQ435 -l 3-position exhaust center: VQ445 -l 3-position pressure center: VQ455 -l 0 1 0 1 0 1 0 1 G H G H G H G H G H 3-position double check: VQ465 -l 0 1 VQ7 178.5 73 42.5 50 Indicator light 164.5 178.5 11(12.5) 4(A) port 11(12.5) 2(B) port Indicator light 59 73 42.5 50 11(12.5) 11(12.5) 2 4 4(A) port 2(B) port

HRX-OM-W002

COMP.T H No.9 Display in the range of 0 to 1,000,000 screen Accumulated operation time of fan FAN.T H No.10 Display in the range of 0 to 1,000,000 screen Used time of dust filter 1 FLTR.T H No.11 Display in the range of 0 to 1,000,000 screen Used time of DI filter 2 DI.T H No.12 Display in the range of 0 to 1,000,000 screen Instantaneous power failureoccurrence count POW.F No.13 Display

Integrated Controller

H A B C H A B C 16 25 32 16 25 Rod flange: EQY H -F Head flange: EQY H -G LL FV M FV M FZ FX FT FX FZ 4 x FD FT 4 x FD The head flange type is not available for the EQY32.

7ND9071en

L 13 NOTE 8 L+ L 14 16 L+ 14 Uo (Voc) Ui (Vmax) Io (Isc) Ii (Imax) Po Pi (Pmax) 15 L 15 16 L+ L+ 16 17 L L+ 18 Notes 1.