Table of Contents

(l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) 80 80 80 80 Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure Vacuum pressure 60 60 60 60 60 60 Air consumption Air consumption 40 40 40 40 40 40 Suction flow rate Suction flow rate 20 20 20 20 20 20 0 0 0.1 0.2 0.3

Air Slide Table

30 40 0.0 0 10 20 50 30 40 Allowable overhang L [mm] Allowable overhang L [mm] MXQ8( )-10, 20Z MXQ8( )-40Z A C A C 1.2 1.2 V = mm/s V = mm/s 1.0 1.0 Load mass m [kg] Load mass m [kg] 0.8 0.8 V = 50 V = 150 V = 150 V = 50 0.6 0.6 V = 100 V = 100 V = 200 V = 200 0.4 0.4 0.2 0.2 0.0 0.0 0 10 20 30 40 0 10 20 30 40 50 60 Allowable overhang L [mm] Allowable overhang L [mm] MXQ8( )-50Z A C 1.2

MY1

MY1B (Basic type) B A 10 16 20 Mounting position A 27 35 20 B 133 165 90 Operating range l Note) 6.5 8.5 6 MY1M (Slide bearing type) B A 16 20 Mounting position A 90 70 B 110 90 Operating range l Note) 7.5 11 MY1C (Cam follower guide type) B A 16 20 Mounting position A 70 90 B 90 110 Operating range l Note) 11 7.5 MY1H (High precision guide type) B A 10 16 20 Mounting position A 27 35

Table of Contents

20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50 55 55 65 85 , Misc.

Electric Actuators

Front mount type l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXS M6 x 1 7.4 13 LXS M6 x 1 7.4 20 Use bolts at least 0.5mm shorter than the maximum screw-in depth, so they do not touch the body. Caution 2. Through holes 2.

Air Cylinder

Double end lock: CBG1BN Bore size Stroke Wl (mm) Bore size (mm) S ZZ 20 92 129 25 92 134 32 91 133 40 101 153 50 119 179 63 119 179 80 146 220 100 146 220 ZZ + Stroke S + Stroke With rod boot 8 l 8 l 8 l IJ IJ e e JH f h + l f JW h + l ZZ + l + Stroke ZZ + l + Stroke 20 to 63 80, 100 (mm) (Reference) l Head end lock: -Hl Rod end lock: -Rl Double end lock: -Wl ZZ ZZ ZZ 20 30 18 55 27 15.5

Table of Contents

ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

+ l (179 + l) 56 63.5 14 6.6 40 49 22 30 4.5 58.4 30 71.4 18 10 40 Up to 500 CD-G04 (207 + l) 225 + l 173 (185) 205 (217) 193 + l (205 + l) 64 79 16 9 50 60 36 6 72.4 36 86 25 20 20 50 Up to 600 CD-G05 (237 + l) 235 + l 178 (190) 215 (227) 198 + l (210 + l) 74 96 18 11 60 8 90.4 46 46 105.4 74 30 22 20 63 Up to 600 CD-G06 (247 + l) 281.5 + l 214 (228) 272.5 (286.5) 223 + l (237 + l

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

flange style: CBQ2G/CDBQ2G With head end lock With rod end lock Standard stroke Bore size (mm) A B L L1 A B L L1 10, 15, 20, 25 73.5 61 4.5 18.5 67 54.5 4.5 18.5 FV 20 50, 75, 100 88.5 66 14.5 28.5 88.5 66 14.5 28.5 10, 15, 20, 25 77 64 5 22.5 70.5 57.5 5 22.5 25 50, 75, 100 92 69 15 32.5 92 69 15 32.5 2-FD A + Stroke B + Stroke L FX FZ FT Standard stroke Bore size (mm) FD FT FV FX FZ 20

Made to Order

F L K P Q S SS Z ZZ CXWL20-225 116.5 239 42 90 564 227 323 550 578 CXWL20-250 264 42 90 614 252 348 600 628 129 CXWL20-275 141.5 289 42 90 664 277 373 650 678 Model F L K P Q S SS Z ZZ CXWL32-225 41 277 30 255 584 227 337 564 604 CXSJ series: 10 M L CXSJ series: 15, 20, 25, 32 M L Stroke Stroke ZZ ZZ SS SS Z Z K CXSJ 10 M L CXSJ 15 M L CXSJ 20 M L CXSJ 25 M L CXSJ 32 M L Model Stroke SS

Electric Actuator/Slider Type

Table Displacement (Reference Value) W L 0.08 LEFS32 (L = 30 mm) 0.06 Displacement [mm] LEFS25 (L = 25 mm) 0.04 LEFS16 (L = 20 mm) LEFS40 (L = 37 mm) 0.02 0 0 22.5 [100] 44.9 [200] 67.4 [300] 89.9 [400] 112.4 [500] Load W lbf [N] Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

SY

41 Type 42 Type 43 Type 41P Type 42P Type 43P Type 45 3 port valve Air operated 3 4 5 3 4 5 M type plug connector (M): SY3 20-ML type plug connector (L): SY3 20-LC4 C6 C4 C6 Grommet .SS5Y31, #3 L type plug connector .

Battery-less

16: LEFS32(L/R)EA Lead 16: LEFS32(L/R)EA 20 10 Lead 24: LEFS32(L/R)EH Lead 24: LEFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEFS40(L/R)EB Lead 10: LEFS40(L/R)EB Work load: W [kg] Work load: W [kg] 50 40 20 Lead 20: LEFS40(L/R)EA 30 Lead 30: LEFS40(L/R)EH Lead 20

MY1

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

Table of Contents

10 20 20 20 20 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy Stainless steel Nil W

5

-6A 80 100 20 0.065 0.117 83 73 5 4 4 x 30 l Polished round 20 CDP-7A 100 25 0.065 0.117 88 78 5 4 4 x 36 l Polished round 24 Split pins and flat washers are included.

Hydraulic

x 1.0 25 76 60 41 32 +0.07 0 16 12.5 20 M16 x 1.5 16 M5 x 0.8 M6 x 1.0 25 76 60 41 32 +0.07 0 16 12.5 20 M20 x 1.5 16 l +0.084 0 M5 x 0.8 M6 x 1.0 31.5 90 70 50 40 20 16 20 M24 x 1.5 20 C B-series +0.1 0 M6 x 1.0 M8 x 1.25 40 145 115 75 60 E 30 20 24 M30 x 1.5 31.5 dH10 L L +0.1 0 M6 x 1.0 M8 x 1.25 40 145 115 75 60 30 20 24 M39 x 1.5 31.5 +0.1 0 M8 x 1.25 M10 x 1.5 50 185 145 95 80 40 25

CQS

CQSKB125D 10D 15D 20D 25D 30D M3 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l M3 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l M5 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l M5 X 35 l X 40 l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l M3 X 25 l X 30 l X 35 l X 40 l X 45 l X 50 l M3 X 25 l X 30 l X 35 l X 40 l X 45 l X 50 l M5 X 25 l X 30 l X 35 l X 40 l X 45

ISO Cylinder

b g (k) l3 j e (l) c d7 d6 h [mm] [mm] Bore size Part no. b c d f g j k e l 8 GKM4-8 4 8 16 4 8 8 11 M4 x 0.7 21 10 GKM4-8 4 8 16 4 8 8 11 M4 x 0.7 21 12 GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 16 GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 20 GKM8-16 8 16 32 8 16 14 23 M8 x 1.25 42 25 GKM10-20 10 20 40 10 20 18 27 M10 x 1.25 52 Bore size Part no. b1 b3 dH7 d6 d7 h l l3 d3 a 8 KJ4D 8 6.0 5 18 11 27

Table of Contents

K B1 B2 Hexagon width across flats 22 A B1 N B2 3-Rc P B1 Bracket H J K L M L M L M L M N N Grommet Conduit DIN terminal Conduit terminal Electrical entry Port size P Rc , , , B Mounting A C D E F Model 22.5 B1 B2 38.5 47 54 47 48 50 92 95 97 38.5 47 55 59 62 64 14.5 17 17 6 7.5 7.5 23 25.5 28 46.5 55 62 39 41.5 44.2 38.5 47 55 59 60 62 18 21 21 20 20 20 74.5 90 98 30 35 40 19 25 25 20 23