Ozone Resistant

1200-M3 1400-M3 1000-M5 120-M3 (U10, 32) 120-M5-F 220-01 220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-,

Speed Controller with

Size (Nominal x Length) Quantity Metric size Inch size TMH-23J TMH-01J M3 x 15 TMH-04J TMH-03J TMH-06J TMH-07J M3 x 20 TMH-06 TMH-07 M4 x 25 TMH-08 TMH-09 TMH-10 M4 x 35 TMH-12 TMH-13 1 Series Holder mounting Select the applicable holder/TMH for each speed controller from the table below.

SQ1000/2000

P = 11.5 1 2 3 4 5 6 7 8 ... n: Stations 40.5 Silencer cover L Blanking plug (for One-touch fitting) Dimensions Applicable fitting size d 3.2 4 6 8 A 23 04 06 08 Model A L D KQ2PKQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 This is inserted into cylinder ports and SUP and EXH ports that are not used.

One-touch Fittings

3/16 R1/8 KQ2H05-01S1 Male connector Operating Environment Warning 4 M3 x 0.5 KQ2F04-M31 4 M5 x 0.8 KQ2F04-M51 6 M5 x 0.8 KQ2F06-M51 1/8 10-32UNF KQ2F01-321 5/32 10-32UNF KQ2F03-321 1/8 M3 x 0.5 KQ2F23-M31 1/8 M5 x 0.8 KQ2F23-M51 1.

IZN10_C

IZN10 IZN10 IZN10 IZN10 01 01 01 01 P P P P 06 06 06 06 Z Z Z Z B1 B1 B1 B1 IZN10 AC 01 02 11 Rc1/8 NPN P PNP 06 6 07 6.351/4) 16 6 ( 17 6.351/4() (3m) Z (10m) N IZN10-NT L DIN IZN10A002 IZN10B1 L B2 B3 DIN 01 06 ES 2 01 ES 17mm 2 2 02 3 3 11 Rc1/8 4 4 /IZS30 /IZS30 /IZS30 /IZS30-M2 M2 M2 M2 06 6: 07 6.351/4: 16 6 :( 17 6.35(1/4):() IZN10-CP(3m) IZN10-CPZ(10m) IZN10A003 NPN

Compact 5-Port Solenoid Valve

Loosen the 4 mounting screws (M3) to remove the terminal block cover. Terminal block cover Mounting screw (M3) Gasket 1A 2A 3A 4A 5A 6 Drip proof plug (SY30M-133-1) is mounted Push button Pitch 3.5 mm Tightening torque: 0.8 Nm 1B 2B 3 Spring type terminal block Conduit port 2 x M20 x 1.5 Step 3. Mount the terminal block cover.

Smooth Cylinder/Low Speed Cylinder

CQ-M3 x 30L x 35L x 40L x 45L x 50L x 55L CQ-M3 x 30L x 35L x 40L x 45L x 50L x 55L CQ-M5 x 30L x 35L x 40L x 45L Mounting bolt part no. CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L Mounting method: Mounting bolt for through-hole mounting style of CQSYB is available as an option.

1

M3 x 0.5 M3 7.5 15 34 3.3 10.5 10 6.5 23 3.4 5.5 3.5 9.5 5 7 26 M3 x 0.5 M3 7.5 15 38 3.3 13 12 6.5 30 3.4 7 3.5 11.5 5 7 33 -X M4 x 0.7 M4 8.5 17 53 4.4 14.5 14 8 35.5 4.5 7.5 4.5 18 4.5 6.5 38.5 M4 x 0.7 M3 14.5 29 62 6.5 3 26 14 34 4 4.5 16.5 6 45 7 20M5 x 0.8 M4 14.5 29 70 8 3 31 17 39 4 5.5 20.5 7 51 8 M6 x 1 M5 17 34 76 9.5 3 41 22 50 4.5 6.5 21 7.5 62.5 10

0.4

Mounting screw (M4) Terminal block cover M3 screw Gasket 6 mm Electrical entry 2 x G 3/4 Step 3. Mounting the terminal block cover Securely tighten the screws to the torque shown in the table below, after confirming that the gasket is installed correctly.

100

m3/year 15 s 150 L/min (ANR) ON/OFF operation can be set freely within the set value range.

SV

SV100 ANA1 -C08 T0604 SV200 ANA1 -C10 T0806 200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700

Compact Manifold Regulator

Panel cutout dimensions ITVX 28 SMC PVQ K P C U O S H L VY1 23 28 VBA VBAT Plate thickness: Max. 2.1 22 AP100 26 (Max. 28) 42 Through hole for M3 3.2 59.5 73.5 SMC 2 10.5 35 OUT IN 12 743 ARM10 Series Dimensions Panel cutout dimensions ARM10F1-06 08 28 4 x R1 or less 28 to 28.5 IN OUT 37 58 34 23 20 Plate thickness: Max. 2.1 22 5 15 34 14 31 SMC 62 Through hole for M3 3.2 SMC K P U C S O

Series VQ Base Mounted Metal Seal/Rubber Seal

How to Order Manifold VV5Q 1 06 C6 1 1 N L Option Symbol Option Remarks VQ1000 VQ2000 None Check valve for prevention of back press.

ZX

(VJA314) ZX1-VJ114K1, J1 q Misc. 1 2 M3 M5 M3 x 0.5 Pilot port/ External release port M5 x 0.8 ZX1-VJ3 4w K3, J2 1 2 e ZX1-VJA3 4 K8 Table (4) How to Order Ejector Assembly Air operated N.C. (ZX1A) ZX1AK6 r 05 ZX1 1 D W Table (2) How to Order Solenoid Valves Assembly no.

ARM10/11

ARM10 06 B Z 1 AV AU 1 2 3 4 1.

ARM10/11

ARM10 06 B Z 1 AV AU 1 2 3 4 1.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Put a hexagon socket head cap screw (M3 x 0.5 x 14 L) through the auto switch's through-hole (2 locations), and then push it down into the M3 tapped part on the auto switch mounting bracket while turning it lightly. 3.

5

Auto switch model Bore size (mm) 32 40 50 63 80 100 D-M9W/M9WV D-M9A/M9AV D-M9/M9V D-A9/A9V BMB5-032 BMB5-032 BA7-040 BA7-040 BA7-063 BA7-063 REA D-A3/A44 D-G39/K39 BMB2-032 BMB2-040 BMB1-050 BMB1-063 BMB1-080 BMB1-100 REB D-A5/A6/A59W D-F5/J59 D-F5W/J59W D-F59F/F5BA D-F5NT REC BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 Smooth Smooth D-P3DWA BA10-032S BA10-040S BA10-050S BA10-050S BA10-063S BA10

E-P HYREG ® Series VY1 1

Pressure gauge (Option) G27-10-01 Pilot EXH port AL Silencer (Option) AN120-M5 Rc 1/8 gauge port Foot (Option) VEX1-18-2 Hexagon socket head cap screw M3 =8 (2 pcs.) (With spring washer) ( ) Bracket (Option) VEX1-18-1A 2-4.5 mounting hole Hexagon socket head cap screw M3 =8 (2 pcs.)

Process Pump

Note 2) When compressor discharge oil mist concentration is 30 mg/m3 (ANR). 11 Related Products Series PB Filter Regulator + Mist Separator Air Combination Model Specifications Model AC20D AC30D AC40D AC40D-06 AC20D AC30D AC40D-06 AC40D Model 1.5 MPa 1.0 MPa Proof pressure Series AC20D/30D/40D Filter regulator Component devices AW20 AW30 AW40 AW40-06 Max. operating pressure 0.05 to 0.85 MPa