This is a legacy product, and replaced byCDG1BN32-50Z, CYL, AIR, SHORT STROKE, ACTUATOR, CG/CG3 ROUND BODY CYLINDER, LE, 32MM CG DBL-ACT AUTO-SW, 0.9055 lb

This is a legacy product, and replaced byCDG1BN40-50Z CG/CG3 ROUND BODY CYLINDER. CYL, AIR. ACTUATOR. 40MM CG DBL-ACT AUTO-SW. 1.41944 lb. ME.

This is a legacy product, and replaced byMDBD80-50Z MB TIE-ROD CYLINDER. CYL, TIE ROD, AUTO-SW. ACTUATOR. 80MM MB DBL-ACT AUTO-SW. 10.18370 lb. RE.

This is a legacy product, and replaced byCG1BN25-50Z-XC37 CG/CG3 ROUND BODY CYLINDER. CYL, AIR, DBL ACTING, HI SPEED. ACTUATOR. 25MM CG. .55115 lb. IZ.

This is a legacy product, and replaced byCM2C32-50Z CM2/CM3 ROUND BODY CYLINDER. CYL, ROUND BODY, DBL ACTING. ACTUATOR. 32MM CM2 DOUBLE-ACTING. .93345 lb. LD.

This is a legacy product, and replaced byCG1BN50-50Z-XC12 CG/CG3 ROUND BODY CYLINDER. CYL, AIR, SPL. ACTUATOR. 50MM CG OTHERS (COMBO). 4.59820 lb. NC.

This is a legacy product, and replaced byCA2D80-50Z CA1/CA2 TIE-ROD CYLINDER. CYL, TIE ROD, NON-LUBE. ACTUATOR. 80MM CA1 DOUBLE-ACTING. 11.43643 lb. RD.

This is a legacy product, and replaced byMGPL20TN-50Z MGP COMPACT GUIDE CYLINDER. CYL, COMPACT GUIDE, BALL BRG. ACTUATOR. 20MM MGP BALL BEARING. 2.06434 lb. HB.

This is a legacy product, and replaced byMBF100-50Z MB TIE-ROD CYLINDER. CYL, TIE ROD. ACTUATOR. 100MM MB DOUBLE-ACTING. 13.72055 lb. SD.

This is a legacy product, and replaced byCDA2D80-50Z CA1/CA2 TIE-ROD CYLINDER. CYL, TIE ROD, NON LUBE,AUTO-SW. ACTUATOR. 80MM CA1 DBL-ACT AUTO-SW. 11.42113 lb. RE.

15

Motor Mounting: In-line Motor Mounting Diagram Motor type: NZ, NY, NX, NW, NV, NU, NT, NM2 Motor type: NZ, NY, NW, NU, NT [Included parts] Hexagon socket head cap screw/MM (Tightening torque: TT [Nm]) Motor [Provided by user] Motor flange PD Motor side hub Motor flange Motor mounting screw Motor Mounting dimension: FP Motor mounting screw [Provided by user] [Included parts] Motor side hub

High Vacuum Angle Valve

Stainless steel 432 Made to Order XLF Series How to Order Valve 100 XLFR M9N A 1K X Flange type Symbol Nil KF(NW) K(DN) D Temperature specifications Symbol Nil 5 to 60C 5 to 150C H0 Seal material Symbol Nil FKM EPDM Barrel Perfluoro Type Seal material 1349-80 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Compound No.

Table of Contents

MY1B16/20 Stroke (LL) L PA 2 x 2-B counterbore depth C LD through-hole 4-MM depth M YW QW NW PB PG Q + Stroke Floating bracket mounting thread (2-JJ thread depth from bottom of counter bore KK) PC 1 LW M5 x 0.8 (Port) 2-T counterbore depth E M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800)

Modular F.R.L. Units

Example) AF30-03B-2R-A-X430 X430 Low temperature X440 High temperature Symbol Description Nq Body size 20 30 40 50 60 Symbol Description Nq Body size 30 40 50 60 Nil Rc N*1 NPT F*2 G + Nw Pipe thread type Nil Rc N*1 NPT F*2 G + Nw Pipe thread type 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Ne Port size Nr Option (Mounting) Nil Without mounting

XM, XY

), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Principle materials Body: SCS13 (Conforms to Stainless steel SUS304) Bellows: Stainless steel SUS316L Bellows holder: Stainless steel SUS304.

2

Example) AC30D-F03DM-SV-1NR-A r t y w Nq Body size 20 30 40 Symbol Description Nw Pipe thread type Nil Rc V V V N NPT V V V F G V V V + 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V + Ne Port size Nil Without auto drain V V V C Note 2) N.C. (Normally closed) Drain port is closed when pressure is not applied. V V V D Note 3) N.O.

Aluminum High Vacuum Angle Valve

Stainless steel 432 Made to Order XLF Series How to Order Valve 100 XLFR M9N A 1K X Flange type Symbol Nil KF(NW) K(DN) D Temperature specifications Symbol Nil 5 to 60C 5 to 150C H0 Seal material Symbol Nil FKM EPDM Barrel Perfluoro Type Seal material 1349-80 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Compound No.

MY1

MY1B16/20 Stroke (LL) L PA 2 x 2-B counterbore depth C LD through-hole 4-MM depth M YW QW NW PB PG Q + Stroke Floating bracket mounting thread (2-JJ thread depth from bottom of counter bore KK) PC 1 LW M5 x 0.8 (Port) 2-T counterbore depth E M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800)

High Vacuum Angle Valve, XL Series

Valve closed 40 50 63 80 Auto switch type Nil Without auto switch (without built-in magnet) F9N Solid state auto switches F9P D-F9N D-F9P Flange type F9B D-F9B Symbol Type Applicable flange size Nil D KF(NW) K(DN) 16, 25, 40, 50, 63, 80 63, 80 Note 1) The standard lead wire length is 0.5m. For 3m, "L" is added at the end of the part number.