70astamb1

75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 Standard Type: With Mounting Bracket Dimensions not shown are the same as basic style.

CLQ

Bore size (mm) T1 T2 M F E D B Part no.

JXCx-OMU0004

P.50 6 * 8 e PLC PLC 9.

Vacuum System Peripherals:

e Valve Model SX340 is for internal pilot.

VFR

Wiring Applicable valve model VFR40-F VFR41-D VFR41-E VFR44-G, VFR44-E VFR44-T, VFR44-D Collection rate of drainage and oil mist: 99.9% or more.

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

MQQ

(mm) 25, 28 Bore size (mm) Stroke range (mm) A L 4-FD 2-FD 75 8 10 10 to 40 88.5 10 16 10 to 60 97 10 20 10 to 60 FV FV M 104.5 12 25 10 to 50, 75, 100 124 12 28 10 to 50, 75, 100 B + Stroke L FT FX FZ FX (Dimensions other than A and L are the same as the front flange type.)

SMC Pneumatic Clean Series

MM Relief port FX 20, 25 Eh8 D FZ I 20 to 32 Standard port Relief port Width across flats NA 4-FD 45 1.5 AL 32, 40 A F N K N S + Stroke FT H FY Z + Stroke ZZ + Stroke 40 (mm) 4 7 FD E 20-0.033 0 52 40 40 34 B FX FZ FY G FT 13 8 AL D K MM NA NN B1 B2 Bore size ZZ Z H H2 H1 S P N I F C2 A 66 60 60 60 75 75 75 11 8 8 8 40 32 25 20 24 22 22 18 50 45 45 41 8 8 8 6 6 5 22 17 17 13 41 32 32 26

REA/REB

8 Hard anodized Aluminum alloy Port cover C J G5-S Stainless steel Shaft e !

REA/REB

8 Hard anodized Aluminum alloy Port cover C J G5-S Stainless steel Shaft e !

Electric Actuator with Integrated Guide

D C B A 33 37 Non-standard Motor Series LTF6 Motor Output Ground Ball Screw 100W 10mm/6mm lead Horizontal Mount How to Order Motor/switch entry direction Stroke E LTF6 X10 G PF 1 Left entry Motor specification Power supply voltage Switch specifications Right entry Matsushita Electric Industrial Co., Ltd.

CQS

Long stroke Standard stroke Without auto switch With auto switch A Long stroke (mm) Standard stroke (mm) Bore (mm) C D E OA OB Q RA RB T H I K M N With/Without auto switch A L F 7.5 7.5 9 11 B 32 32 41 44 A L 3.5 3.5 4.5 5 B 22 22 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 B 17 17 F 5 5 5.5 5.5 12 16 20 25 45.5 13.5 25.5 5 to 30 5 to 30 5 to 50 5 to 50 35 to 100 35 to 100 75 to 200 75 to 300 6 8 7 12

MXW

(mm) F G Model E J GG H HH NN K L N Z MXW8-75 106 64 71 92 19 30 1 31 45 5 228 MXW8-100 112 98 106 115 34 32 1 56 70 5 278 MXW8-125 144 121 129 138 25 32 32 2 81 95 6 328 MXW8-150 176 141 149 168 45 32 32 2 106 120 7 378 8-7-11 12 Series MXW Dimensions: MXW12 Stroke 50, 75 mm Operating port 2-M5 x 0.8 Width across hexagon socket hole 2.5 J 12 6.5 Width across flats 8 5H9 +0.030 depth 4.5

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Order the seal kit, based on each bore size. 8-15-75 75 Series CY1H Construction Double axes type: CY1HT !9 @0 !8 q !5 !4 !7 w Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com #3 !6 e #1 @9 #0 i !0 !3 !1 !

C95Series

Bore si~e ~ Standard stroke (mm) .

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

75 75 5 4 4 4 26-0.033 0 26-0.033 0 32-0.039 0 8 10 M32 x 2 82 36 The bracket is shipped together.

SMC Pneumatic Clean Series

With air cushion 4-FD E-0.05 0 FT F FX0.15 B (mm) Bore size 40 B 61 E 25 F 2 FX 46 FD 6.6 FT 8 50 63 76 92 30 32 2 2 58 70 9 11 9 9 Note) End boss is machined on the flange for E.

High Power Cylinder Series RHC

E Effective thread K FA JC JC FB A NF C H S + Stroke B ZZ + Stroke (mm) H GA 80 FB 16 FA 10 EA 23 D 62 C 20 B 53 A E 0 Bore size (mm) Stroke range (mm) Effective thread length 50 70 35 32 250 to 1000 50-0.042 0 80 16 10 23 58 20 60 80 35 32 250 to 1000 63 55-0.074 0 90 20 10 23 61 25 75 95 40 37 250 to 1000 80 65-0.074 0 95 20 10 25 63 30 90 116 40 37 250 to 1000 100 80-0.074 J ZZ P 6.8 to

MVGQ

CC MVGQM (Slide bearing) A, DB, E Dimensions MVGQL (Ball bushing bearing) A, DB, E Dimensions RB A A E E Symbol Symbol DB DB Bore size (mm) Bore size (mm) Stroke Stroke J Up to 50 st Over 50 st 30 st or less 30 st or less Over 30 st Over 30 st Up to 50 st Over 50 st 12 12 39 0 8 43 4 16 6 55 D16 16 43 0 10 49 6 22 8 65 20 20 0 14.5 12 10 57 47 61.5 27 10 74 -X 20Data 10-16-7 8 Valve Mounted

AC

Example) With L type bracket: E 0LWith T type bracket: E 0TOne with AC installed is special product. T Type Interface: (T) 1/8, 1/4, 3/8 T type interface makes it easier to diverge air output.