(4) Weight (kg) 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Port size Type of actuation C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv (B) (A) 4 2 (B) (A) 4 2 Plug-in Non plug-in 2 position 3 position 4.73 (4.56) VFR611 VFR610 40 0.12 9.1 41 0.15 9.6 2 Single 3 4 100 or less (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 2 100 or less 4.78 (4.61) 40 0.14 9.2 41 0.17 9.7 VFR621 VFR620 3 4 Double Double Exhaust
n = 2, 4, 6, 8 Same side 15 90 100 110 35 75 80 90 100 1 Different sides With 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30(n2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 100 + 100(n 2) n = 2, 3, 4 100 + 100 (n2), n = 2, 4, 6, 8 Different sides With n Same side 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides With 2 Same side 35
/Fixed Mounting Height Heavy Duty Stopper Cylinder Floating Joint /Standard Type /For Compact Cylinders /Stainless Steel Type Shock Absorber Rotary Table/Rack & Pinion Style P.33 P.34 Auto Switches D-M9BW(V)SDPC-900 D-M9BW(V)L-900 D-Y7BW(V)L-900 D-A90L-900 D-Z80L-900 P.62 P.63 P.64 P.65 P.65 P.66 Solid State Auto Switch Direct Mounting Style 90-JA 90-JB 90-JS 90-RB/RBC 92-MSQ P.35 P.35 P.35
MGP 5 4 3 10 MGQ 5 10 100 200 20 30 40 50 1 100 10 200 20 30 40 50 2 3 4 5 MGG Eccentric distance l (mm) Eccentric distance l (mm) MGC Over 75 stroke Over 125 stroke MGF 100 100 63 200 P=0.5MPa P=0.5MPa CY1 80 100 50 Load weight m (kg) Load weight m (kg) MY1 50 40 40 50 30 40 30 32 20 20 10 10 100 10 10 100 200 20 30 40 50 20 30 40 50 200 Eccentric distance l (mm) Eccentric distance l (mm
03 LEC-MR-RB-12 13 10 13 (3) 13.4 100 5m (a) LECSCP-DP-CG3G4 G3-G4 P-D P-D 1 P P C C G3 D (2) 1) G4 5m (1) 1.
N.O. + P. 4-4-37 SYJ300 Push-turn locking slotted type Note) For AC For AC 0.36 2 3 (A R) M5 x 0.8 With light/surge voltage suppressor 100 VAC Hz 110 VAC Hz 200 VAC Hz 220 VAC Hz 50 60 50 60 50 60 50 60 P. 4-4-4 SYJ500 Push-turn locking lever type DIN terminal 1.2 2 3 (A R) 1/8 (SYJ500, 700 only) P. 4-4-18 SYJ700 M8 connector 2.7 2 3 (A R) 1/8, 1/4 P. 4-4-37 Note) All AC voltage
, Description (Pressure Switch for Vacuum) p. 22 Pressure Switch for Vacuum with Energy Saving Function Specifications, Internal Circuit and Wiring Example p. 23 Port Layout Standard Products p. 24 Option -D p. 26 Option -L p. 29 Construction p. 31 Replacement Parts for Single Unit / How to Order p. 32 Exploded View of Manifold p. 33 Dimensions p. 35 Electrical Wiring Specifications
-3. 10 15, 30, 45, 60, 75, 100, 125, 150 Refer to p.0-39 to 0-46 before handling. 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 1.3-53 Series CJ2Q Mounting Accessories/Refer to p.1.3-12 for details.
180 190 270 280 90 100 180 190 270 280 90 100 180 190 270 280 90 100 180 190 270 280 90 100 90 100 90 100 90 100 90 100 90 100 90 100 90 100 90 100 10 1.2 1.5 15 2.9 3.7 20 6.1 7.9 30 15 20.2 21 25 40 31.5 41 30 32 49 51 66 68 70 73 94 97 118 121 88 93 138 143 188 193 186 197 281 292 376 387 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5 33 34 48 52 98 104 136 146 272 294 50 Single vane Double vane 63
Command pulse (maximum 225/kpps) P Class 3 ground Ground resistor 100 or less Incremental encoder P Deviation counter clear signal (active high) 2CN PG P Be sure to treat the shielding wire terminals. +12 to 24V Note) 4.7k 13 14 1Ry 5mA Servo ON 0V SV-ON 1Ry ON for servo ON 2Ry Proportional control (P actuation) Reverse drive suppression 15 P-CON 2Ry ON for proportional control N-LS N-OT
9 100 12 100 12 100 15 100 15 100 Note 1) Apparent power: The value at ambient temperature of 20C and when the rated voltage is applied.
a <> ABSINC ABS() / / INC()/ / b c 2mm d e f / P.41 7.2 / P.43 7.2 g INP ON INP INP ON / P.41 7.2 h / P.41 7.2 / P.42 7.2 i 100 % 150 % LEY16A 200 % LEY25A / P.42 7.2 j 12AREA ON 12 INC ABS() No.1 148 250 AREA k INP No.0 50+20 = 70 -24- 1 -IN INPAREA a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 100.00 3000 3000 0 0 0 100 80.00
V Grommet Reed switch Solid state switch Relay, PLC PLC 40 to 100 Yes Yes 100 V, 200 V 12 V 2-wire 24 V PLC 100 V 200 V Terminal conduit 40 to 160 40 to 100 Relay, PLC DIN terminal Diagnostic indication (2-color indication) 40 to 160 40 to 100 Grommet 3-wire (NPN) 3-wire (PNP) 24 V IC circuit 5 V, 12 V 40 to 160 40 to 100 Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (
Cyl.Dia Mass (kg) T 60" 45' 30' e u 0.01 po.2 p 0.01 It 0.2 p 0.01 p 0.2 tr 0,01 It 0.2 25 100 50 25 12.5 51.8 (87.2) 80 40 20 1 0 32 180 90 45 22.5 54.9 (s5.6) 47.8 53 78.4 39.2 4 2.2 '| .
Cyl.Dia Mass (kg) T 60" 45' 30' e u 0.01 po.2 p 0.01 It 0.2 p 0.01 p 0.2 tr 0,01 It 0.2 25 100 50 25 12.5 51.8 (87.2) 80 40 20 1 0 32 180 90 45 22.5 54.9 (s5.6) 47.8 53 78.4 39.2 4 2.2 '| .
(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine
2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.