C76

: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W F W (100) (100) 0.7 (100) (100) 0.3 G 92 86 0.5 77 71 0.7 6-10-4 5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32, 40 How to Order CJ1 C Double acting Single rod K R2 76 J D E C A 32 100 CJP CJ2 C Double acting Double rod W 76 D E 32 100 C JJ B CM2 Auto switch mounting type CG1 Rail mounting

C76

: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W F W (100) (100) 0.7 (100) (100) 0.3 G 92 86 0.5 77 71 0.7 6-10-4 5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32, 40 How to Order CJ1 C Double acting Single rod K R2 76 J D E C A 32 100 CJP CJ2 C Double acting Double rod W 76 D E 32 100 C JJ B CM2 Auto switch mounting type

CL

L E N 25 CL1 MLGC CDLG1 With auto switch H7BW 100 L E N 25 CNG Built-in magnet Number of auto switches MNB 2 pcs. 1 pc. n pcs.

ZP

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

Vacuum System Peripherals:

C1 Model (Stock item) Pressure range Note) Model Unit Connecting Note (kPa) GZ46-K-01 to 02 100 to 0 1 8 1 8 1 4 kPa R , kPa With covering assembly GZ46-K-01 to 02-C, C1 100 to 0 R ,1 4 1 8 1 4 kPa GZ46-K-01 to 02M 100 to 0 GZ46-K2K-01 to 02 100 to 200 R , M5 (Female thread) kPa GZ46E-K-01 to 02M 100 to 0 1 8 1 4 R , M5 (Female thread) R , 1 8 1 4 kPa Note) Do not apply pressure that exceeds

2/3 Port Valve

Ambient and Fluid Temperature Fluid temperature C Ambient temperature C (3) High temp. water (D, E, N, P) (3) High temp. oil (D, N) Temperature Power Water (Standard) Air (Standard) Oil (Standard) 99 (4) 100 (4) 80 60 10 60 40 40 60 60 40 1 AC DC AC/DC Max. Material No.

Series AP500

SS secondary remelt Electropolish + Passivation Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat 100 0.69 Hastelloy C-22 Hastelloy C-22 Hastelloy C-22 PCTFE 316L SS 316L SS 316L SS PCTFE (Option: Vespel) 90 0.62 80 0.55 Delivery pressure (MPa) Delivery pressure (psig) 70 0.48 60 0.41 50 0.34 Dimensions inch (mm) 40 0.28 AP1900 30 0.21 2.12 (53.8) 20 0.14 0 10 0.00 0.07 0 100

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Decimal display Hexadecimal display 10 A 11 b 12 c 13 d 14 E 15 F Note 4) Applicable to non-magnetizing lock. 576 Programless Controller LECP1 Series Controller Details e r No.

Secondary Batteries

Electric Actuators/Cylinders 6 Electric Actuator Series LJ1/LG1 Electric Actuator with Integrated Guide Series LTF Series LJ1 Short Stroke Electric Actuator Series LX Electric Cylinder Series LZB/LDZB/LZC/LDZC Electric Gripper Series LEHZ/LEHF Series LX Electric Slide Table Series LES e-Rodless Actuator Series E-MY2 Series LEHZ Series E-MY2 Front matter 17 a C O N T E N T S Product

Title not found

ro 40mm cn y q c k r l o B e .

IDU/IDF

dryer Applicable dryer Port size Rc E D D C A B Part No.

ZPT/ZPX

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

Cylinder with Lock

C DH7 E EN 0 0.1 ER (Max.)

REA/REB

8 Hard anodized Aluminum alloy Port cover C J G5-S Stainless steel Shaft e !

REA/REB

8 Hard anodized Aluminum alloy Port cover C J G5-S Stainless steel Shaft e !

•

Width across flats KA ~\, -t n I E ~ I='" "r\ f'iiI .J ... " UJ o o ) ~ L::: ~ ::;: "" ~E ~ ~ c Cl DC N f I-A _ K F _ L{ ~M [T D B " m :Jl Cl (mm) c.

Integrated Controller

Rightward mounting A B C D E 16 30 to 100 21.5 46.5 33.5 34.5 (2) 2.9 105 to 300 41.5 53.5 25 30 to 100 27 62.5 39 50.5 (2) 4.2 105 to 400 52 64 32 30 to 100 30.5 65.5 42.5 53.5 (2) 4.9 105 to 500 60.5 72.5 The values in the table above are to be used as a reference when mounting auto switches for stroke end detection.

CHKD/CHKG

Related Products F with effective thread depth G DC H 2 x K through 4 x L counter bore M 4 x CD LW D LH LT B + Stroke X1 X1 E LX BB Y1 SS Z + Stroke LA + Stroke 32 to 100 (mm) Bore size (mm) LA B BB C F L CD D E G H K LH LT LX 20 25 32 40 50 63 80 100 76 6.6 9.5 depth 5.4 43 12 70 10 18 10 M8 x 1.25 6 5.5 23 15 58 78 6.6 9.5 depth 5.4 45 76 14 12 18 M10 x 1.5 12 6 5.5 26 15 64 11 depth 6.5

IDG

5 to 50 Inlet air temperature (C) (1) IDG60L 5 to 50 Ambient temperature (C) Outlet air atmospheric pressure dew point (C) Inlet air flowrate (l/min(ANR))(2) Standard performance JIS Symbol 40 100 150 227 320 400 Outlet air flowrate (l/min(ANR)) Purge air flowrate (l/min(ANR))(3) 75 110 170 240 300 25 40 57 80 100 Inlet air pressure (MPa) 0.7 Inlet air temperature (C) 25 25 25 1 l/min (ANR