XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

SYJ3000/5000/7000

Port size For sub-plate, manifold type 40, 41, 42, 43 Nil: Without sub-plate R port P, E port 3: Common exhaust type for main and pilot valve D: Push-turn locking slotted type R port P, E port (With gasket and screws) Electrical entry 01: 1/8 With sub-plate 24, 12, 6, 5, 3 VDC M8 connector 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC 24,12 VDC 100,110, 200, 220 VAC Grommet L plug connector M

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

16.2 20.2 36.2 44.2 56.2 64.2 1.5 1.5 1.5 1.55 1.55 2.05 2.55 2.55 0.7 0.7 0.9 1.15 1.15 1.15 1.35 1.35 0.030 0.060 Type C 5 for axis 0.030 0.060 Type C 8 for axis 0.040 0.076 Type C 10 for axis 0.040 0.076 Type C 10 for axis 0.040 0.076 Type C 14 for axis 0.050 0.093 Type C 18 for axis 0.050 0.093 Type C 22 for axis 0.065 0.117 7-6-20 21 Accessory Bracket Series CQ2 Simple Joint: 32 to

Rotary Table/

Positioning pinhole Counter-clockwise 5 Adjustment bolt A 5 (For counter-clockwise rotation end adjustment) 9 22 e B port g .5 n Adjustment bolt B ra (For clockwise rotation end adjustment) nt e e m is st w u k dj c lo a 0 -c e d C 19 s n i er a w lo A port B port e k dj c c nt o l Clockwise C k n e u u w o st ng o is ti C m e ta ra ro e ro ta nt ti o on n ra e d n n ti g e ta 5 9 ro m u

Series IDG

= 0.7MPa 30 30 40 50 0 40 100 200 300 0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG50 IDG60 0 P1 = 0.3MPa P1= 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa 20 20 P1 = 0.7MPa P1 = 0.7MPa 30 30 40 40 50 50 0 200 400 600 800 0 200 400 600 800 Outlet air flow rate l/

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra

V

Recommendable Air Flow ln/min Model Port Size NZFA100-T01 18 50 NZFA200-T02 14 200 Cup D I M E N S I O N S A P P L I C AT I O N T O VA C U U M P U M P S Y S T E M H O W T O O R D E R (N)ZFA A I R S U C T I O N F I LT E R (N)ZFA A C C E S S O R I E S TYPE N None L With Bracket -Left R With Bracket -Right 100 500Nl/Min 200 200Nl/Min P O R T S I Z E P O R T T H R E A D 01 1/8 02 1/4 Nil PT*

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

ZP

A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U C ZPT16 U C 19.5 6.2 8 6 3.3 32 6.5 40 43 18.5 10 12 1.7 12 3 27 21 21 33 7.5 3.8 50 53 6.2 12 5 8 8 6 13 15 1.8 12.5 3.5 27.5 21.5 21.5 16 18 1.2 Deep Deep 1 8 B C D D E Y F: M6 x 1 F: M8 x 1.25 D F: Rc Model A 1 8 D G F: Rc Y B C E D G E D G F: M5 x 0.8 F: M6 x 1 E Model A ZPT40D 40 43 29 6 8 6.2 17 42.5 ZPT10D ZPT16D 10 16 12 18 15 16

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

R port P, E port D: Push-turn locking slotted type Port size Electrical entry Nil: Without sub-plate 24, 12, 6, 5, 3 VDC M8 connector 24, 12, 6, 5, 3 VDC 100, 110, 200, 220 VAC Grommet L plug connector M plug connector 24, 12 VDC 100, 110, 200, 220 VAC DIN terminal G: Lead wire length 300 mm L: With lead wire (Length 300 mm) D, Y: With connector WO: Without connector cable MN: Without lead

CNG

0 0.05 BZ D E BC I H1 4-TC TB TA AL A F K 0. 1 C0. 1 C 8-J BN BC NA S + Stroke H ZZ + Stroke F e f 8 l ZZ + l + Stroke h + l With rod boot (mm) Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 10 (12) 6 201 to 350 20 to 200 4 to 200 38 18 15.5 13 93 1/8 44.5 14

Modular F.R.L. Units

Port size Center of F.R.L. body E F F E E B C Cross spacer E D A F: Without thread Model 1 E (Port size) A B C D Applicable model Y14-M5-A M5 23 16 14 25 AC10l-A Y24-l01-A 1/8 40 40 22 40 AC20l-B Y24-l02-A 1/4 Y34-l01-A 1/8 49 43 28 48 AC25l-B, AC30l-B Y34-l02-A 1/4 Y44-l02-A 1/4 60 48 36 54 AC40l-B Y44-l03-A 3/8 Y54-l03-A 3/8 72 62 40 62 AC40l-06-B Y54-l04-A 1/2 Caution on Mounting 1.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Port size Sub-plate, 40, 41, 42, 43 manifold Nil: Without sub-plate D: Push-turn locking slotted type (With gasket and screws) 01: 1/8 with sub-plate Electrical entry 24, 12 VDC, 6, 5, 3 VDC 24, 12, 6, 5, 3 VDC / 100, 110, 200, 220 VAC 24, 12 VDC, 100, 110, 200, 220 VAC Grommet L plug connector M plug connector DIN terminal E: Push-turn locking lever type M8 connector MN: Without lead wire

Lightweight and Compact

Deionized water: Electric conductivity 1 mS/cm or higher (Electric resistivity 1 MWcm or lower) 3 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid temperature: 20C, r Circulating fluid flow rate: Rated flow, t Power supply: 200/400 VAC 4 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid flow rate: Rated flow, r Power supply: 200

Cylinder with Lock Series CNG

0 0.05 BZ D E BC I H1 4-TC TB TA AL A F K 0. 1 C0. 1 C 8-J BN BC NA S + Stroke H ZZ + Stroke F e f 8 l ZZ + l + Stroke h + l With rod boot (mm) Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 10 (12) 6 201 to 350 20 to 200 4 to 200 38 18 15.5 13 93 1/8 44.5 14

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

1 e !4 !3 w !0 !

Modular F.R.L. Unit

D E G P 2 1 6 8 C J R Z W N AWD30 to 40 Accessory/Optional specifications B C D E G P 1 2 6 8 C J N R W Z With bracket (with set nut) Float type auto drain (N.C.)