Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

size (mm) Stroke range (mm) N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA P O A 75, 100 125, 150 200, 250 300 63 100 66 180 135 117 65 228 60 M12 234 135 12 14 180 158 250 228 25 25 M12 x 1.75 depth 23 Rc 1/4 Rc 3/8 Rc 1/2 200 80 115 76 214 160 138 75 262 70 M12 268 155 16 14 200 178 284 262 27 30 M12 x 1.75 depth 28 230 100 125 80 245 190 153 85 304 80 M14 310 175 16 16 226 200 326 300

LX

Guide rod type P Actuator configuration Refer to the applicable motor list on the next page.

Air Slide Table

= 100 V = 100 3 3 V = 200 V = 200 2 2 V = 300 V = 300 V = 500 1 1 0 0 50 100 150 200 250 300 0 0 50 100 150 200 250 300 350 400 L3: Overhang Allowable range: 300 mm L3: Overhang Allowable range: 400 mm Allowable overhang L [mm] Allowable overhang L [mm] 167 Model Selection MXQ Series Determine the overhang.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Both Ends Tapped Style A B C D E H I J K L M O P S Q R Th9 U Z Bore size (mm) Stroke range (mm) M8 x 1.25 58.5 M6 x 1.0 12.5 10 31.5 14 0 0.052 (1) 125 to 200 250, 300 32 62.5 13 Rc 1/8 45.5 16 45 60 4.5 14 17 34 22 M8 x 1.25 66 M6 x 1.0 14 10 35 14 40 72 13 Rc 1/8 55 16 52 69 5 14 17 40 0 0.052 28 M10 x 1.5 80 M8 x 1.25 14 14 41 19 0 0.062 Note 1) For 125 to 200 stroke, strokes are by the

3 Port Solenoid Valve Metal Seal Series VZ200 1

Ported/Base Mounted Series VZ400 Dimensions: Common Exhaust Common exhaust: VV3Z4-50 (G) (L) (M) (D) With light/surge voltage suppressor Max.10 93 87.5 With light/surge voltage suppressor 300 (Lead wire length) 79.9 300 (Lead wire length) 300 (Lead wire length) 2-M5 x 0.8 (Pilot EXH) 2-M5 x 0.8 (Pilot EXH) P = 20 2-M5 x 0.8 (Pilot EXH) (Pilot EXH) 2-M5 x 0.8 Manual override (Non-locking)

Compressed Air Preparation Filter

10 Micro Mist Separator AMD Series Standard Specifications p. 11 Flow Rate Characteristics p. 12 Activated Carbon Filter AMK Series Standard Specifications p. 19 Flow Rate Characteristics p. 20 AFF AM AMD Construction p. 21 Dimensions p. 23 Modular Connection Example p. 25 Accessories Sold Separately p. 27 International Standard ISO 8573-1:2010 p. 28 Specific Product Precautions

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load mass kg Load mass kg MY2HT25 Horizontal impact: P = 0.5MPa MY2H25 Horizontal impact: P = 0.5MPa 2000 1500 2000 1500 H unit Impact speed mm/s Impact speed mm/s Impact speed mm/s 1000 1000 H unit L unit 500 400 300 500 400 300 L unit Air cushion Air cushion Caution 200 200 Do not use a shock absorber and air cushion together. 100 1 2 3 4 5 10 20 50 40 1001 2 3 4 5 10 20 30 4050 30 Air

MNB

P-76 (M)

3 Port Solenoid Valve Rubber Seal Series SY100 1

) + P P 36 300 (Lead wire length) 300 (Lead wire length) 39.1 (For DC) + 26.4 (For DC) 27.7 (For AC) 22.4 A A Other dimensions are same as grommet type.

MY1

(mm/s) Collision speed (mm/s) L unit L unit 1000 1000 Air cushion Air cushion 500 400 300 500 400 300 200 200 100 1 2 3 4 5 10 20 30 100 2 3 4 5 10 20 30 0.5 40 50 100 Load mass (kg) Load mass (kg) 40 Horizontal collision: P = 0.5 MPa 20 Horizontal collision: P = 0.5 MPa 2000 1500 2000 1500 Collision speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

P R P a DIN rail holding screw U side Replacement parts Part No.

0.4

3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5(R1) 1(P) 3(R2

Vacuum Unit

, Description (Pressure Switch for Vacuum) p. 22 Pressure Switch for Vacuum with Energy Saving Function Specifications, Internal Circuit and Wiring Example p. 23 Port Layout Standard Products p. 24 Option -D p. 26 Option -L p. 29 Construction p. 31 Replacement Parts for Single Unit / How to Order p. 32 Exploded View of Manifold p. 33 Dimensions p. 35 Electrical Wiring Specifications

125

Aluminum alloy 1728 3 Port 3 Position Valve VEX3 Series Working Principle Fig. (1) A R Fig. (2) Closed center Fig. (3) P A 3(R) 3(R) 3(R) 2(A) 2(A) 2(A) 1(P) 1(P) 1(P) This is a 3-port switch valve in which the shaft 7 extending from the driving piston 3 opens/closes a pair of poppet valves 6.

HRX-OM-X037

P.5-12 (16) CH2 Independent pump operation CH2 pump operates independently while the button is pressed. P.5-12 To select a operation mode from the touch panel ( mode), contact input ( mode) (17) Operation mode P.5-12 Common or serial communication ( mode). (18) Operating condition display It indicates the run and stop status of the product. P.5-12 (19) Run/Stop To run/stop the product.

0.5

distance [mm] wStatic Neutralization Range IZF10 IZF10-L 300 mm 300 mm 8 s 8 s 4 s 4 s 0 0 2 s 6 s 2 s 6 s 300 mm 300 mm 600 300 900 1200 600 300 900 1200 Installation distance [mm] Installation distance [mm] IZF10R (Air flow level: 4) IZF10R (Air flow level: 1) 300 mm 300 mm 6 s 2 s 8 s 6 s 4 s 2 s 8 s 0 0 4 s 300 mm 300 mm 600 300 900 1200 600 300 900 1200 Installation distance [mm] Installation

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

R ports) Applicable tube O.D.: 8 24 13.3 (Pitch) P = 10.5 13.3 24 16.2 17.8 Approx. 300 16.2 17 36.7 34 B 2 B 2 PE 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 A 4 A 4 X 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting (X, PE ports) Applicable tube O.D.: 6 2n-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 (L4) L3 (3.2) 113.7 U side D side 3.1 8 36.3 43.7

7

.) dimensions. 139 VXD Series For Air/Water/Oil 3 A Dimensions/VXD2 Body Material: Aluminum, C37, Stainless Steel Grommet 3 A VXD2 Port size 04 (1/2) (With bracket) 300 U E C 7.5 1.6 7.5 1.6 5.5 T A b a B 5.5 OUT IN OUT IN M b a OUT IN 18 2 x P Port size d e (D) L K f J F I f 2 x P Port size d e Grommet (with surge voltage suppressor) C 300 U E A B T OUT IN M I J F 2 x P Port size L K (

ZP

P. 29 Bellows Series ZP Common adapter With pad Single unit Attachment Sponge Pad For adsorption of work pieces with bumps P. 30 4, 6 8, 10 15 Single unit S Sponge P. 31 With adapter Heavy-duty Pad 32, 300 340 Heavy-duty (Flat with rib) For heavy or large work pieces P. 33 H Heavy-duty (Thin flat with rib) P. 33 HT 150, 250 32, 150 Heavy-duty (Bellows) P. 35 HB Heavy-duty (Oval) 30 x 50

Slider Type/Ball Bushing Bearing

Note 2) Determination of pressure (P) when making intermediate stop P Ps P > Ps (Refer to page 1529.) (For intermediate stops, refer to page 1527.)