Magnet: Built-in, Type: Pneumatic, Mounting: Integral Clevis, 90°, Bore: 25mm, Port Thread: NPT, Stroke: 125mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: Pivot Bracket not assembled, Rod End Bracket: Single Knuckle Joint, Auto Switch: -, Leadwire or Prewired Connector: -, Number: -

Magnet: Built-in, Type: Pneumatic, Mounting: Integral Clevis, 90°, Bore: 25mm, Port Thread: NPT, Stroke: 100mm, Cushion: Air Cushion, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Leadwire or Prewired Connector: 3m, Number: -

Magnet: Built-in, Type: Pneumatic, Mounting: Integral Clevis, 90°, Bore: 25mm, Port Thread: NPT, Stroke: 25mm, Cushion: Air Cushion, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Leadwire or Prewired Connector: -, Number: -

Cylinder with Lock

100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Ordering Example of Cylinder Assembly Cylinder model: CP96NDD50-100C-NW-M9BW

XLAQ/XLDQ

Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature (C) 5 to 60 (High-temperature type: 5 to 150) Atmospheric pressure to 1 x 10-6 Operating pressure (Pa) (abs) Conductance (L/s) Note 1) 5 14 45 80 Internal 1.3 x 10-10 at normal temperatures (in case of standard material, FKM), excluding gas permeation Leakage (Pam3/s) External Flange type KF (NW

High Vacuum L Type Valve

) KF (NW), K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2) for 0.5MPa 31 61 220 390 680 1420 Port size M5 Rc 1/8 Weight kg 0.28 0.47 1.1 1.7 3.1 5.1 9 XL-OMS0001-B 4-2.

XL-OMV0002

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002

LEC-OM07605CN

(1) LECSS2-TAC200V240V (4) (4) RA1 ON OFF RA1 MC MC SK MCCB CNP1 MC (7) MC (6) (11) (10) L1 CNP3 (6) AC 200 V 240 V U U L2 AC200240V V V L3 M W NW P3 (1) (10) (1) (9) PE P4 CNP2 P+ (2) C (2) (11) (3) (10) (3) D CN2 L11 L21 (7) (8) CN3 CN3 DC 24 V ( 12) DC24V (11) (5) 2 EM2 DOCOM (5)2 (5) (5) (4) RA1 ALM (4) DICOM DC 24 V ( 12) DC24V (11) (8) CN8 (9) () () 1. P3P4() 2.

17

O-ring MY1B25-PS MY1B32-PS MY1B40-PS Note) For the replacement procedure of replacement parts/seals, refer to the Operation Manual. 1192 MY1B Series Mechanically Jointed Rodless Cylinder Basic Type Standard/Centralized Piping Type 25, 32, 40 MY1B25 /32 /40 Z Stroke (LL) L 2 x 2 x B counterbore depth C LD through-hole 4 x MM depth M P(MY1BG) (Hexagon socket head taper plug) PA YW PP QQ RR QW NW

Series SV

SV1000 SV2000 SV3000 0 NW QW 1 2 3 P, E port position Input block Supply/Exhaust block assembly specification Input block type Without input block M12: 2 inputs M12: 4 inputs M8: 4 inputs (3 pins) A, B port size For mixed mounting, indicate the port size, such as C3 or C4, instead of a "" in the a section of the station table.

Magnet: D (Built-in), Type: Pneumatic, Mounting: V (Integral Clevis, 90°), Bore: 25mm, Port Thread: TN (NPT), Stroke: 300mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: N (Pivot Bracket not assembled), Rod End Bracket: V (Single Knuckle Joint), Auto Switch: M9PWV--Solid State, 2-color Indication, 3 Wire PNP, Vertical, Leadwire or Prewired Connector

Magnet: Built-in, Type: Pneumatic, Mounting: Integral Clevis, 90°, Bore: 25mm, Port Thread: NPT, Stroke: 300mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: Pivot Bracket not assembled, Rod End Bracket: Single Knuckle Joint, Auto Switch: M9PWV--Solid State, 2-color Indication, 3 Wire PNP, Vertical, Leadwire or Prewired Connector: 3m, Number: -

Precision: B (Basic), Size: 10mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M, Lead Wire or Prewired Connector: SBPC (0.5m Cord Length, M8-4 Pin Connector)

Model: MSQ, Precision: B (Basic), Size: 100, Suffix: R (Shock Absorbers), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SBPC (0.5m Cord Length, M8-4 Pin Connector)

Band Mount: None, Rail Mount: None, Tie-rod Mount: None, Direct Mount: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SBPC (0.5m Cord Length, M8-4 Pin Connector)

Model: MSQ, Type: B (Basic Type), Size: 3, Port Location: E (Front Port), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SBPC (0.5m Cord Length, M8-4 Pin Connector)

Oscillation Angle A: [Arbitrary Setting Type] Free setting type, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Table 3-Points or More, Main Body Shape: Block Shape, Operation Method: Double Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.005 to Less than 0.01, Valves: Not Provided, Allowable Kinetic Energy(J): 0.007, Torque

Sensor Type: Non-Contact, Output Format: PNP Format, Wiring Method: 3-Wire, Type: Main Body, Wiring type: 2-wire, Output Type: None, Electrical entry direction: In-line, Lead wire length(m): 0.5, Connector Type: M8 4-pin

Oscillation Angle A: [Arbitrary Setting Type] Free setting type, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Double Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.005 to Less than 0.01, Valves: Not Provided, Allowable Kinetic Energy(J): 0.007, Format: Includes adjusting bolt, Size: 10, Switch

Model: MSQ, Type: Basic Type, Size: 3, Port Location: Front Port, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-4 Pin Connector, Number: -