VFR

400 300 200 100 0 VF B VFR VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VZS C VFS VS4 800 700 600 500 400 300 200 100 0 VQ7 D EVS VFN 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out

VQZ1000/2000/3000

B C D Dimensions Note) A B 29 33 41 C 40 52 63 D 67 81 93 VQZ1000 VQZ2000 VQZ3000 35 43 52 A Note) For grommet Port plug VVQZ1000-CP (VQZ1000) VVQZ2000-CP (VQZ2000) VVQZ3000-CP (VQZ3000) Used to block a cylinder port when changing 5 port valves into 3 port valves, etc. 2-7-53 Base Mounted 54 54 Series VQZ1000/2000/3000 Manifold Option Name plate [-N] (For VQZ2000 and 3000 only) VVQZ2000-N5Stations

Integrated Controller

mm) Model C side traveling parallelism to A side D side traveling parallelism to B side EQFS16 0.05 0.03 EQFS25 0.05 0.03 EQFS32 0.05 0.03 EQFS40 0.05 0.03 C side D side Traveling parallelism does not include the mounting surface accuracy.

TABLE OF CONTENTS

Listed and CSA Certified for Hazardous LocationsClass I, Div 1, Group C and D Class II, Div 1, Groups E, F, and G; Div 2 Groups A,B,C,D,E,F, AND G. Mtg.

Single Axis Electric Actuator Series LJ1H

Positioning Time Guide Positioning time A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4sec.)

MGP

MXW (d= outside dia. of screw) (d= outside dia. of screw) MXP 1.5d or more 2d or more MG MGP MGQ D By-pass port dia. D By-pass port dia. MGG C 0.2 C 0.2 Unless the cylinder operates to its stroke end, the air cushion's capability cannot be brought into full play.

CNG

Dd9 Dd9 d d D C l m l m m m L L t t t t B1 H1 Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Applicable bore size (mm) Part no.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

28.5 33 40.5 47.5 15 15 15 15 17 17 8.5 11 14.5 18.5 22 29 2 2 25 27.5 30.5 35.5 43.5 49.5 22 24 28 32 36 42 Up to 150 Up to 200 Up to 200 Up to 300 Up to 300 Up to 300 6-5-44 45 Series CG1R Air Cylinder: Direct Mount Type Double Acting, Single Rod Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-C7 D-G5, D-K5 = ~Hs = ~Hs CJ1 D-H7 D-C73C CJP = ~Hs

ISO Cylinder

Auto switch mounting Auto switch model C85 Series C75 Series Bore size [mm] 8 10 12 16 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V)*7 BJ6-008 (A set of a, b, c, d) BJ6-010 (A set of a, b, c, d) BJ6-012 (A set of a, b, c, d) BJ6-016 (A set of a, b, c, d) BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9lA(V) BJ6-008S (A

SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

MB

d Dd9 D C L l m H B Note 1) d (Through hole diameter) Bore size (mm) Clevis Knuckle Part no.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

300 K F C E Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts J G E G A B Plug JSXM 1G(Blow port: Bottom) Port size OUT (blow) port 2 x Port size IN port JSXM 1G-F(Blow port: Front) Port size OUT (blow) port JSXM 1G(Blow port: Bottom) CS: Conduit GS: Grommet with PCB D 500 K F D 300 K F NPT1/2 C E C E J G J G B B [mm] Size Port size A B C D

Proposals for Energy Saving

Stroke Refer to the catalog "Precision Cylinder Series MTS" CAT.ES20-127 C for details. 17 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO Free Mount Cylinder for Vacuum Air Blow Series ZCUK How to Order C 16 ZCUK D 20 Basic type C S D 16 D 20 ZC UK A90 With auto switch Built-in magnet Number of auto switches Nil 2 pcs.

CY1

to 63 A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 18 97 99 43 43 74 74 18 32 21.5 108.5 108.5 46.5 46.5 83.5 83.5 21.5 40 23.5 124.5 124.5 48.5 48.5 99.5 99.5 23.5 50 27.5 148.5 148.5 52.5 52.5 123.5 123.5 27.5 63 29.5 158.5 158.5 54.5 54.5 133.5 133.5 29.5 Note) 50mm is the minimum stroke

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

180 200 Bore size (mm) Auto switch model 12 125 140 160 63 80 100 50 16 20 25 32 40 D-A7(H)(C) D-A80(H)(C) D-A9(V) D-Z7 D-Z80 D-F7(V) D-J79(C) D-F7W(V) D-F7BA(V)L D-F7NTL D-F79F D-F9(V) D-F9W(V) D-F9BA(V)L D-Y59 D-Y69 D-Y7P(V) D-Y7W(V) D-Y7BAL D-P5DW 13 13 13 12 12 13 10 10 12 12 12 12 11 11.5 9 11.5 9.5 9.5 9.5 14 14 14 15 15.5 CUJ 6 9 9 8.5 6.5 6.5 7 6 5.5 6 5.5 5 6 CU CQS 5.5 6.5

Table of Contents

D J K Y A J K B Y C D Misc.

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

LX

detail (Scale: 2/1) 120 90 4-M6 x 1 Section C 30 D Refer to page 300 for mounting.

Compact

1 LEF LEJ A A LEL B D-D #3 LEM LEM LEY !6 @3 @3 @5 @4 @7 @2 @4 @5 @1 LES #1 #0 u #2 i y LEPY LEPS !3 C-C A-A LER !8 @6 @8 @9 B w !2 C !7 D LEH LEY -X5 D #4 #4 11LEFS C o !0 !5 11LEJS Motor option: With lock 25A!1 LEC !2 LEC S !3 LEC SS-T @0 LEC Y !9 Motorless LAT Component Parts Component Parts LZ No. Description Material Note 1 Body Aluminum alloy Anodized No.