Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

, 15, 20 25, 30, 35, 40 45, 50 12, 16 20, 25 Dimensions ...10 &11 Series CQS How to Order . 1 12 16 20 25 5, 10 Construction . 12 Solid state switch D-M9N, F9NV D-M9P, F9PV D-M9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Dimensions ...13 to 16 Series CQSK How to Order . 1 12 16 5, 10, 15, 20, 25, 30 Construction . 17 20 25 5, 10, 15, 20, 25, 30 35, 40, 45, 50 Dimensions ...18 &19 Note

XM, XY

Valve side exhaust 493 XMH, XYH Series Dimensions XMH/Angle type C D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) H J B G A A (mm) Model A 100.5 114 162.5 179.5 B 38 48 66 79 C 1 1 2 2 D 30 40 55 75 Fn 34 70 Fc 17 26 41 52 G 35 40.5 57 70 H 18 21.5 30 35 J P.C.D L1 6 x 4.4 6 x 6.6 L2 XMH-16 XMH-25 XMH-40 XMH-50 40 50 65 70 P.C.D 27 P.C.D 58.7 XYH/In-line type D C G C H B J E A Fn (KF

REA/REB

Since there are other applicable auto switches than listed, refer to page 10-2-35 for details.

REA/REB

Since there are other applicable auto switches than listed, refer to page 10-2-35 for details.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

10 35 45 35.5 44.5 40.5 39.5 15 34.5 62.5 35 62 40 57 20 64 50 64.5 49.5 69.5 44.5 25 44 71 44.5 70.5 49.5 65.5 32 55 83 55.5 82.5 60.5 77.5 40 61 94 61.5 93.5 66.5 88.5 Note) 50 mm is the minimum stroke available with 2 auto switches mounted.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

(mm) (mm) Stroke (mm) 20 41 29 47 35 Stroke (mm) 20 45 25 51 31 Auto switch operating range Auto switch operating range 15 40.5 20.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 11-/22-MXP12 11-/22-MXP12 3 5 11-/22-MXP16 11-/22-MXP16 832 Air Slide Table MXP/MXPJ6 11221122Dimensions

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

3 11-/22-MXP 6 5 11-/22-MXP10, 12, 16 Electrical entry from outside Electrical entry from inside Parallel electrical entry B A B B A A Solid state switch D-M9B, D-M9N Reed switch D-A93 (mm) (mm) Stroke (mm) 20 41 29 47 35 Stroke (mm) 20 45 25 51 31 Auto switch operating range Auto switch operating range 15 40.5 20.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 25 46.5 34.5

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Lead wire length (m) Load voltage 5 (Z) Applicable load Auto switch model Electrical entry direction Wiring (Output) Special function Electrical entry Indicator light Type 0.5 (Nil) 1 (M) 3 (L) AC DC 12 V In-line A93 M9N M9B Reed auto switch 24 V 2-wire 100 V 12 V Relay, PLC Grommet Yes 3-wire (NPN) Solid state auto switch 24 V Relay, PLC Grommet Yes 12 V 2-wire Lead wire length symbols

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(n: Number of auto switches) Different surfaces Same surface Different surfaces Same surface D-M9m D-M9mW D-M9mA D-A9m 10 15 Note 1) 45 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 45 + 15 (n 2) (n = 2, 3, 4, 5) D-M9mV 5 15 Note 1) 35 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 25 (n 2) (n = 2, 3, 4, 5) D-M9mWV D-M9mAV 10 15 Note 1) 35 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 25 (n 2

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Replacement Parts: Seal Kit Theoretical Output OUT IN Unit: N Bore size (mm) Contents Kit n no.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Replacement Parts: Seal Kit Theoretical Output OUT IN Unit: N Bore size (mm) Contents Kit n no.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG The above values are the maximum allowable values for moment and load.

High Vacuum Angle Valve

(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

MK

41 47.5 9 depth 7 9 depth 7 11 depth 8 Rc / Rc / Rc / Rc / 30 30 37 48 14 14 17 17 20 24 30 35 7 7 8 9 4.5 5 7 7 6.5 6.5 7.5 7.5 14 14 19 19 16 16 20 20 3 3 3.5 3.5 M10 x 1.5 M10 x 1.5 M6 x 1.0 M6 x 1.0 17 17 22 28.5 101.5 76 70 81.5 85 37 29.5 34 35 7.5 8 10.5 10.5 0.15 0.15 Data 102.5 0.15 0.15 M12 x 1.75 M8 x 1.25 122 0.15 0.15 14 depth 10.5 M12 x 1.75 M10 x 1.5 125 0.15 0.15 Note 1)

CE

19 49 60 9 M10 x 1.5 Rc 1/4 64 89.5 35 19 For rod nut and accessory bracket, refer to page 10-12-20.

Stroke Reading Cylinder and Counter

19 76.5 1 4 Rc 49 60 9 M10 x 1.5 64 35 19 89.5 For rod end nut accessory bracket, refer to page 658.

CE

19 49 60 9 M10 x 1.5 Rc 1/4 64 89.5 35 19 For rod nut and accessory bracket, refer to page 10-12-20.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M9B 12 12 1 A S D MIW Double finger type 32 50 1 A S D M9B MIS Single finger type Scraper Cylinder bore 8 12 20 25 32 Nil S No Yes 8 mm 12 mm 10 mm 25 mm 32 mm Number of auto switches Nil S 2 pcs. 1 pc.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

MIW Double finger type 32 50 1 A S D M9B MIS Single finger type Scraper Cylinder bore 8 12 20 25 32 Nil S No Yes 8 mm 12 mm 10 mm 25 mm 32 mm Number of auto switches Nil S 2 pcs. 1 pc.