C95

sides) 35 + 30 (n 2) 35 + 30 (n 2) 60 + 30 (n 2) 65 + 30 (n 2) 65 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 85 + 30 (n 2) n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 1 10 10 70 75 75 80 80 85 2 (Same side) 55 55 70 75 75 80 80 85 2 (Different sides) 35 35 70 75 75 80 80 85 A44 55 + 50 (n 2) 55 +

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

N S LX X LY Y l ZZ h f e H ZZ ZZ 125 140 160 180 200 250 300 1/2 341 133 75 40 318 110 0.2 stroke 157.5 M30 x 1.5 35 98 100 45 20 364 Lube Non-lube Air-hydro 1/2 133 341 40 318 75 110 0.2 stroke 180.5 M30 x 1.5 35 98 112 45 30 364 3/4 367 40 141 75 346 120 0.2 stroke 197 M36 x 1.5 39 106 118 50 25 388 3/4 399 153 45 85 135 381 0.2 stroke 227 M40 x 1.5 39 132 111 60 30 417 3/4 1 399 153 90

High Power Cylinder Series RHC

JC 58 K 75 LD 7 H 11 GA 80 FA 16 EA 23 D 62 C 20 B 53 A 70 E 0 Effective thread length 32 250 to 1000 35 50 0.042 0 250 to 1000 11 72 75 7 11 80 16 23 58 20 60 80 35 32 63 55 0.074 0 250 to 1000 13 89 78 10 13 90 20 23 61 25 75 95 40 37 80 65 0.074 0 250 to 1000 16 110 80 10 13 95 20 25 63 30 90 116 40 37 100 80 0.074 Bore size (mm) ZZ Y 6.8 to 11.3 WH 335 X 10 P 30 S 1/2 NF 215 NE 24 ND

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Determination of pressure (P) when making intermediate stop P Ps P > Ps (Refer to page 8-31-1.) Note 2) (For intermediate stops, refer to page 8-15-74.)

Prevents Micro-Bubbles

Single type Suck back P P P VN A B A B Unit Single type Unit LVC Manifold (5 stations max.) LVA LVH A R P 3 port N.C. PA LVD N.C.

Vacuum System Peripherals:

Note 5) Please contact SMC regarding indication with other units of pressure. 0 25 50 75 100 Input signal (% F.S.) Hysteresis 1 Output deviation (% F.S.) 0.5 Out Out How to Order 0 Return Return ITV 209 0 0 1 2 5 S 0.5 Pressure display unit Pressure range 5 kPa 9 1.3 to 80 kPa 1 0 25 50 75 100 Cable connector type Input signal (% F.S.)

AC

(Refer to "Best Pneumatics 1" on p.1.17-21 for further information.)

CXS

CXS P 6 M 50 A90 J S Number of auto switches 2 pcs. 1 pc.

ITV

Rc(PT) 3/8 03 P P Connection Rc(PT) 1/2 04 P Bracket B p p Accessories 178 Bracket C p p Connection NPT1/4 N02 p p qAF3000 wAFM3000 eITV2000 Connection NPT3/8 N03 p p Connection NPT1/2 N04 p Connection G(PF) 1/4 F02 p p REGULATOR Connection G(PF) 3/8 F03 ITV3000 p p Connection G(PF) 1/2 F04 p Approx. 243 Modular Connection Part Numbers Approx. 172 ITV20ll ITV30ll Description AF3000 AF4000

SV

With External Pilot Specifications (Pitch) 24 P = 24 65.8 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 B 2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE Rc 3/8 [1(P), 3(E)

CLA

p>. .-~ --_1 124 (5000) ,/ /. / --/./-.P: 2 ;;; 900 (4000) !

High Vacuum Angle Valve

Bellows seal Dust free, P.3 cleaned Single acting (N.C.) XLAV-2 New New Bellows seal Dust free, Solenoid valve P.4 cleaned (With solenoid valve) XLC-2 Double acting Bellows seal Dust free, P.7 Air operated cleaned High-speed operation XLF-2 Single acting (N.C.) O-ring seal P.10 High operating cycles Solenoid valve High-speed operation Single acting (N.C.)

ISO Standard Hydraulic Cylinder

CHQ (n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 2 (Different surfaces and same surface), 1 20 65 95 85 80 75 CHK (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-M9V/M9WV 20 + 30 65 + 30 75 + 30 80 + 30 85 + 30 95 + 30 "n" pcs.

Vacuum Unit

, Description (Pressure Switch for Vacuum) p. 22 Pressure Switch for Vacuum with Energy Saving Function Specifications, Internal Circuit and Wiring Example p. 23 Port Layout Standard Products p. 24 Option -D p. 26 Option -L p. 29 Construction p. 31 Replacement Parts for Single Unit / How to Order p. 32 Exploded View of Manifold p. 33 Dimensions p. 35 Electrical Wiring Specifications

Modular Type Filter Regulator Series AW

75 75 B 108 160 201 239 242 E 28 40 57 73 73 P 30 44 46 54 56 K 0 5 3.5 1.5 1.2 M 25 30 41 50 50 N 28 34 40 54 54 Q 4.5 5.4 6.5 8.5 8.5 H 26 63 66 76 76 G 25 40 55 80 80 Y 14 19 21 21 U 2 2.3 2.3 2.3 2.3 T 40 55 53 70 70 Z 6 7 7 7 W 18.5 28.5 38.5 42.5 42.5 B 125 177 242 278 278 V 18 30 31 35.5 37 J 27 30.5 38.5 38.5 S 6.5 15.4 8 10.5 10.5 AW10 AW20 AW30 AW40 AW40-06 M5 x 0.8 1/8, 1/4

MB

100 125 136 161 186 50 119 41 23 12.5 25 37.5 81 94 106 75 100 125 144 169 194 50 127 51 25 12.5 25 37.5 89 102 114 75 100 125 152 177 202 150 227 50 127 51 25 12.5 25 37.5 89 102 114 75 100 125 152 177 202 150 227 50 139 56 29 12.5 25 37.5 101 114 126 75 100 125 164 189 214 150 239 175 200 264 289 50 139 61 29 12.5 25 37.5 101 114 126 75 100 125 164 189 214 150 239 175 200 264 289 125 10

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(MPa) Operating pressure P (MPa) Data Graph (5) up to 500 mm/s Graph (8) up to 450 mm/s 160 700 80 80 140 600 10 120 500 Load weight m (kg) Load weight m (kg) 100 63 63 400 80 300 50 50 60 200 40 40 40 32 25 20 32 100 20 0 0 0.3 0.2 0.1 0.4 0.5 0.6 0.7 0.8 0.9 1 0.3 0.2 0.1 0.4 0.5 0.6 0.7 0.8 0.9 1 1 100 50 1000 Operating pressure P (MPa) Operating pressure P (MPa) Operating pressure P (

3 Port Solenoid Valve/

. 3) 3 3 (106.6) 57.6 21 41.5 (69.5) 2 1 56 43.8 43.8 (11.4) 28 37.5 73 73 10 37.5 77 75 45.5 3/4" [1(P) port] 2 x 3/4" [3(R) port] 164.5 3/4" [2(A) port] Should be normally open.

Power Clamp Cylinder

Leave a space for wiring a proximity switch. 191 Power Clamp Cylinder 40, 50, 63, 80 Series CKZT How to Order CKZT Clamp Cylinder (Without Arm) 63 TN 120 T Power clamp cylinder European type Switch type T P TURCK P&F Bore size 40 50 63 80 40 50 63 80 Arm mounting position 30 45 60 75 90 105 120 135 30 45 60 75 90 105 120 135 Cylinder port Nil TN G NPT CKZT Clamp Arm 40 A015 C S Mounting hole

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension