Table of Contents

Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 59 F 5H9 +0.030 0 depth 5 29.5 D 4 4 6 6 E 60 90 90 90 F 30 60 60 60 G (50) (50) 100 100 Model LXFH5BD-25 LXFH5BD-50 LXFH5BD-75 LXFH5BD-100 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 6 Refer to page 299 for mounting. (11.5) 38 E Positioning Time Guide (for Horizontal Mount) For transfer load of 2kg

ISO Cylinder

40)1 (40)1 (40)1 (100)1 0.5 89 W W W Rod (side) 10.0 (40)1 (40)1 (40)1 0.7 36 74 93 (40)1 0.3 33 37 26 54 69 Head ( side ) 0.5 39 25 27 19 41 52 C8525 C8520 0.7 32 20 22 15 33 43 1.0 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (40)1 (40)1 (40)1 (100)1

Aluminum High Vacuum Angle Valve

(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65

VFS

EZ VFS1320-E/EZ VFS1420-E/EZ VFS1520-E/EZ Lead wire O.D.

CRB2/CRBU2/CRB1

Single vane type Double vane type 90 180 270 90 r a n n o n a g r e g ti n 2 e a o n r a o n 7 ti t g ti 1 a o 0 e a t 8 o r 9 t +4 0 r 0 o 0 y y r e +4 0 +4 0 e Key y K K e K Key Key +4 0 (45) 0 Standard Optional Key 9 e g n ra n o ti a t o r (90) y e K (45) (45) A port A port A port A port B port B port B port B port 100 190 280 100 a r n n g a r n n o g e io e ti at r n a 1 o a n 1

CQ2

mounting height. 20.5 23.5 M14 X 1.5 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 28.5 20.5 23.5 28.5 26 28.5 33.5 26 28.5 33.5 32.5 35.5 43.5 32.5 35.5 43.5 Standard (mm) Bore (mm) 32 40 50 63 80 100 Stroke range (mm) 5 to 100 5 to 100 10 to 100 10 to 100 10 to 100 10 to 100 O N M I E L A H D F J K P Q S U W Z B C M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 M16 X 2.0 M20 X 2.5 10.5 10 13

SMC Basic Pneumatics

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

%silltr

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

Table of Contents

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

Refrigerated Air Dryers

(D) Refrigerant R407C (HFC) IDF E F E G C (101) B 4 x 13 [mm] Dimensions Part no.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Vertical Mounting, Ball Bushing Bearing r Over 40 mm stroke e 35 mm stroke or less 100 100 LEYG32L LEYG32L Load mass m [kg] Load mass m [kg] 10 10 LEYG25L LEYG25L 1 1 0.1 0.1 1000 1000 10 100 10 100 Eccentric distance L [mm] Eccentric distance L [mm] * The limit of vertical load mass varies depending on lead and speed.

LEC-OM02704CN

60 70 1000 1 5 1000 2000 80 80 0 0 6 2000 1000 80 80 0 0 7 1000 1000 80 80 0 0 8 1000 1000 100 100 0 0 LEC-MR-J3BAT 1000 1000 100 100 0 0 C N 4 ( 3 ) 255 2000 2000 80 80 0 0 RS-422 USB CN 6 CN 1 CN3 CN5 DI/O ON USB CC-Link RS-422 1.

1

st E HT Bore size (mm) 20 25 Over 100 st to 200 st 30 st or less Over 200 st Over 30 st to 100 st 10 16 27 32 51 51 69 68.5 80 93 Over 100 st to 200 st 73 79.5 90 95.5 114 114.5 132 132 50 st or less Over 200 st Over 50 st to 100 st E HT A Bore size (mm) 32 40 50 63 Over 100 st to 200 st 128 128 144 144 50 st or less Over 200 st Over 50 st to 100 st 21.5 15 21 16 Over 100 st to 200 st 91

7

9 100 12 100 12 100 15 100 15 100 Note 1) Apparent power: The value at ambient temperature of 20C and when the rated voltage is applied.

MY1

100) Backup plate Special resin Guide roller B Special resin Guide roller A Stainless steel (80, 100) MX #6 Special resin (63 to 100) #7 #8 #9 MTS End cover Nickel plated (80, 100) y Carbon steel (80, 100) (80, 100) Wear ring Special resin u i o !

Air Slide Table

100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type MXQ 10 10 10 10 10 10 20 20 20 20 20 20 30 30 30 30 30

NCQ8

The load voltage is 100 VAC.

C85

1 w e !3 !

5 Port Solenoid Valve Series SY3000/5000/7000/9000

rate: 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

80 303 M24 x 1.5 35 32 28 11 24 70 293 0.030 0.076 80 80 65 55 M39 x 1.5 60 57 45 15 41 95 349 M30 x 1.5 45 42 35.5 13 30 80 334 0.030 0.076 0.036 0.090 0.18 0.25 100 100 80 65 M48 x 1.5 75 72 56 16 50 115 385 M39 x 1.5 60 57 45 15 41 100 370 8 Series CH2E/CH2F/CH2G/CH2H Dimensions Front rectangular flange type/CH2EFA, CH2FFA GA GB H + Q + l 2-RcP 4-FD R J MM FY BB D E e Air release K F