CLS

180 200 l P S T V W ZZ f h ZZ1 S e ZZ1 ZZ 1/2 1/2 3/4 3/4 3/4 1 5 5 5 30 30 30 98 345 40 40 40 45 45 55 30 to 1000 75 133 368 Up to 1000 98 345 345 388.5 452 477 368 368 409.5 470 495 8 9 0.2 stroke 98 345 30 to 1000 75 133 368 98 Up to 1000 0.2 stroke 106 388.5 75 141 409.5 106 30 to 1200 Up to 1200 0.2 stroke 111 448 85 153 466 115 30 to 1200 Up to 1200 0.2 stroke 111 468 90 153 486 120

VFR

) (VFR310/410) DIN terminal (D) Non plug-in Plug-in type Conduit terminal (FZ) (B) (A) 4 2 1/4: 7.5 3/8: 8.7 100 VAC 50/60 Hz Locking type C (Lever) Plug-in type Non plug-in type Grommet terminal (E) 200 VAC 50/60 Hz 24 VDC Base Mounted Non plug-in type (VFR310/410) DIN terminal (DZ) Grommet terminal (EZ) Conduit terminal (TZ) (EA)(P)(EB) 5 1 3 3 position closed center (Option) 110 to 120

•

(n:: 4, 8, 12, 16 ) (n ::: 4.8, 12, 16) Wrlh2 pes jDifferenl sllriaces. 11 5 120 20 Samesuriace), Wrlh 1 pc D-M90AL ---.-~~-, 115 +40(n 2 4) '~O + 40(12 4; 20+40In ;2) Wllh n pes. (n = 2. 4. 6. S .. ) (n = 4 . 8, 12, 16...),_-+_ ~4. 8. 12.16.. -) D~ F5D1.J5 CJ Same surface) With 1 pc.

CNS

Symbol Bore size (mm) 125 140 160 H A L1 H1 3.5 Y type double knuckle I type single knuckle Y-12 110 50 100 156.5 I-12 Y-14 110 50 105 161.5 I-14 Y-16 120 56 110 170.5 I-16 L1 H1 A, H Dimensions When Mounting a Single/Double Knuckle Joint together with a Rod End Nut A H Bore size (mm) 125 140 160 65 125 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-

CS1

256.5 75 0.2 Stroke 277.5 106 277.5 256.5 to 1200 153 135 85 45 281 0.2 Stroke 299 115 303 285 Lube Non-lube to 998 153 135 281 90 45 0.2 Stroke 299 120 308 290 Lube Non-lube Other dimensions are the same as standard style.

CXS

CXS15 CXS20 CXS25 CXS32 Model 120 150 200 175 150 125 120 110 200 175 150 125 120 110 200 175 150 125 120 110 125 120 110 150 125 110 100 90 80 Stroke SS ZZ Z 175 210 282 257 232 207 202 192 272 247 222 197 192 182 270 245 220 195 190 180 185 180 170 205 180 165 155 145 135 Symbol Made to Order 192 229 312 287 262 237 232 222 296 271 246 221 216 206 294 269 244 219 214 204 204 199 189 222

MGP

Bearing type M Slide bearing L Ball bushing Bore Auto switch type Nil W/O auto switch (built-in magnet cylinder) 120 12mm 16 16mm 20 20mm 25 25mm 32 32mm 40 40mm 50 50mm 63 63mm 80 80mm 100 100mm Compact stroke (mm) Port PT N NPT Ports w/ bolt on tool plate Applicable auto switches Load voltage Lead wire length (m) Note 1) Auto switch model Electrical entry direction Special function Electrical

Proposals for Energy Saving

(Special order product) Series ZL112, 212 Proposal 9 Vacuum Air reduction for vacuum ejectors Suction transfer Vacuum ejector for water soluble coolant removal Vacuum ejector Linear vacuum ejector Negative pressure detection valve Digital pressure switch for general purpose fluid (Special order product) Series ZH Series ZU (Special order product) Series ZSE5B/ISE5B Page 150 140 142 137 120

CL

Stroke Refer to p.1.9-3 for maximum stroke of CA1 series 40 to 100 and p.1.10-3 for maximum stroke of CS1 series 120 to 160. Minimum Strokes for Auto Switch Mounting Refer to following pages for minimum strokes for auto switch mounting.

Cylinder with Lock Series CNS

PT) BQ Plug with breathing hole CL M GA BC element T G G FA GB Rc(PT) BP Unlocking port 2-Rc(PT) P GL GR Width across flats KA Cylinder port MM Q D EA E V AL A K F VA BN C B N N 4-J S + Stroke M H ZZ + Stroke With rod boot 75 15 40 l h + l ZZ1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) A AL B BN BP BQ C CL D E EA F FA G GA GB GL GR J 125 140 160 to 1000 50 47 145 205 1/2 3/8 115 120

Table of Contents

VAC. port Silencer dedicated for manifold (mm) L1 1 Stations L 28 1.5 40 1.5 72 1.5 10 3 60 1.5 72 1.5 104 1.5 4 76 1.5 88 1.5 120 1.5 5 92 1.5 104 1.5 136 1.5 6 108 2.0 120 2.0 152 2.0 7 124 2.0 136 2.0 168 2.0 8 140 2.0 152 2.0 184 2.0 9 156 2.0 168 2.0 200 2.0 2 44 1.5 56 1.5 88 1.5 172 2.0 184 2.0 216 2.0 L2 L3 13-4-31 1 Vacuum Ejector Box Type (Built-in

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 1021-VV5Q21 (Serial transmission kit: EX240) L2 (In case of 1 pc. input block: 8 number of inputs) L1 14.6 8.1 (143) 54 P = 16 34.5 6.5 16.5 1 Min. 0 to Max. 4 unit (0 to 216 mm) 4 x M5 mounting hole 0.9 Manual override Indicator light 120 8 120 4 80 10.5 If the input block is attached, it comes with a bracket n 8 Stations 7 6 5 4 3 2 1 Input

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

44 48 60 74 78 100 120 114 136 167 190 211 237 264 Double clevis style: (D) Clevis pins and cotter pins are included.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 1021-VV5Q21 (Serial transmission kit: EX240) L2 (In case of 1 pc. input block: 8 number of inputs) L1 14.6 8.1 (143) 54 P = 16 34.5 6.5 16.5 1 Min. 0 to Max. 4 unit (0 to 216 mm) 4 x M5 mounting hole 0.9 Manual override Indicator light 120 8 120 4 80 10.5 If the input block is attached, it comes with a bracket n 8 Stations 7 6 5 4 3 2 1 Input

NAAMS Standards Compliant

X2568 15 15 30 30 45 45 60 60 75 75 90 90 105 105 120 120 135 135 Clamp arm position L (Left side mounting) R (Right side mounting) R L D Right Left Both sides Switch cassette Switch cassette * Proximity switch mounting surface viewed from the front.

CNA

55 n = 4, 8, 12, 16 110 + 55 n = 4, 8, 12, 16 120 + 55 n = 4, 8, 12, 16 D-A59W n (Same side) CL 120 110 100 15 90 1 2 (Different sides, Same side), 1 CL1 D-F5W/J59W D-F5BAL D-F59F D-F5NTL 140 130 120 110 25 (n 4) 2 (n 4) 2 (n 2) 2 (n 4) 2 (n 4) 2 140 + 55 n = 4, 8, 12, 16 120 + 55 n = 4, 8, 12, 16 130 + 55 n = 4, 8, 12, 16 25 + 55 n = 2, 4, 6, 8 110 + 55 n = 4, 8, 12, 16 n (Same side

0.4

323 335.5 335.5 348 360.5 373 385.5 558 Base Mounted Plug-in Unit VQC Series S VQC2000 Series Kit (Serial transmission) For EX500 Gateway Decentralized System 2 (128 points) IP67 compliant VV5QC21 S kit (Serial transmission kit: EX500) SV 38.5 L2 L1 SYJ (Pitch) P = 16 (Double sided type) 38.5 SZ 0.9 1 4 x M5 Mounting hole Indicator light 1 (12) 74 (10.5) VF 1.3 90.9 VP4 (8) VQ 1/2 (35) 120

IDG

Standard dew point 60C: about 120 min. This time can be shortened as described below. 1) Provide a valve on the outlet side of the membrane air dryer. 2) Supply air with the valve closed. Only purge air flows into the membrane air dryer. 3) After 15 minutes or more, open the valve and let air flow to the outlet side equipment. Mounting Caution 1.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

LS + Stroke ZZ + Stroke CJ1 82.5 45 5 22 13 82 106 101 55 5 28.5 14 100 125 121 65 7 30 16 120 150 CJP Other dimensions are the same as basic style.

CNA

55 n = 4, 8, 12, 16 110 + 55 n = 4, 8, 12, 16 120 + 55 n = 4, 8, 12, 16 D-A59W n (Same side) CL 120 110 100 15 90 1 2 (Different sides, Same side), 1 CL1 D-F5W/J59W D-F5BAL D-F59F D-F5NTL 140 130 120 110 25 (n 4) 2 (n 4) 2 (n 2) 2 (n 4) 2 (n 4) 2 140 + 55 n = 4, 8, 12, 16 120 + 55 n = 4, 8, 12, 16 130 + 55 n = 4, 8, 12, 16 25 + 55 n = 2, 4, 6, 8 110 + 55 n = 4, 8, 12, 16 n (Same side