CG1

179 (191) +l Up to 600 Up to 1200 C95 202 (216) +l Up to 750 Up to 1400 202 (219) +l Up to 750 Up to 1500 CA1 Note 1) ( ): Long stroke Note 2) End boss is machined on the flange for E.

Series IDG

Performance Charts IDG100H P1 = 0.3MPa 0 Outlet air atmospheric pressure dew point C P1 = 0.5MPa 10 P1 = 0.7MPa 20 30 40 50 0 400 800 1200 1600 Outlet air flow rate l/min (ANR) Note: F = (1.8 x C) + 32; 1MPa = 145psi; 1l/min = 0.0353SCFM 7 8 Series IDG Membrane Air Dryer Single Style/Standard Dew Point 40C (40F) Specifications How to Order 1l/min = 0.035SCFM IDG 50 L 03 Flow rate by size

Electric Actuator Triple Axis P&P Unit

Unit Configuration Examples XYZ axes YZ axes Xaxis Yaxis Zaxis 1 Triple Axis P&P Unit How to Order Combination LG 240Z A0 50 20 X L E G J ZB D C Y Axis type X X axis Stroke(mm) 100 10 Ball screw specifications Axis type Z axis Rolled ball screw(mm) 15, lead 20 900 1000 1100 1200 1300 1400 1500 Symbol C 90 A0 B0 C0 D0 E0 F0 Motor specifications Motor specifications Mitsubisi Electric Corporation

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 l l MY1CW25 MY1CW25 30 30 (1000) (1000) (1000) MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000) (900) (1000) (900) MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1MW16 MY1CW16 MY1CW16 (900) (900) (900) Caution 20 20 10 10 1.

Air Cylinder NCA1 Series

R O D B O R E S I Z E 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 1000 10 1200 12 1400 14 E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please consult P/A Customer Service for larger sizes.

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400 600 800 1000 1200 1400 1600 Stroke [mm] Stroke [mm] [Graph 7] Allowable load mass by stroke 40 100 y, z + A = 0 y, z + A = 50 Load mass [kg] y, z + A = 100 y, z + A = 200 10 y, z + A = 300 1 0 200 400 600 800 1000 1200 1400 1600 If load center of gravity exceeds the value of y, z + A on the graph, please consult SMC.

IDUS/IDFS

Area: (800) 258-9200-www.stevenengineering.com Series IDUS Series IDUS Inlet air temperature C Model IDUS3E IDUS4E IDUS6E 500 310 55 740 Air flow capacity l/mim(ANR) 295 (300) 475 (430) 703 (640) 60 160 275 225 55 Power consumption W 165 (189) 230 (275) 280 (295) 60 ( ): Previous model IDU3D/4D/6D Series IDFS Series IDFS HA Inlet air temperature C Model IDFS6E IDFS8E IDFS11E AT 740 35 1200

KT10

0.07 to 10.3 MPa) 15 to 2500 psig (0.1 to 17.2 MPa) 25 to 4000 psig (0.17 to 27.6 MPa) 50 to 6000 psig (0.34 to 41.4 MPa) 100 to 10 psig (0.7 to 69 MPa) Operating Parameters Delivery pressure Gas Source pressure Select compatible materials of construction for the gas SS body (Material code C or S): 69 MPa (10 psig) 2), Brass body (Material code B): 41.4 MPa (6000 psig) 750 psig (5.1 MPa) 1200

Bag Filter

Required flow rate Recommended flow rate = Number of elements FGE 400 L/min or less 800 L/min or less 1200 L/min or less FGG [Recommended flow rate per one element] 400 L/min (Pressure drop 7 kPa to 8 kPa) When viscosity rate is equivalent to water.

Table of Contents

Note 3) Meter-in type is black zinc chromate plated. 15-9-26 4 Speed Controller: Standard Type Elbow Type (Metal Body) Series AS Dimensions: AS-1200-M3, AS120-M5, AS220, 320, 420 Dimensions: AS1400-M3 AS1200-M3 AS120-M5 AS120-U10/32 (Hexagon width across flats) AS220, 320, 420 AS ASP (Hexagon width across flats) ASN AQ ASV AK ASS ASR ASF Dimensions Max. Min. Max. Min.

Stainless Steel Heat

CAT.EX30-1 A Stainless Steel Heat Exchanger Type Air Dryer Series IDUS Series IDUS Inlet air temperature C Model IDUS3E IDUS4E IDUS6E 500 310 55 740 Air flow capacity l/mim(ANR) 295 (300) 475 (430) 703 (640) 60 160 275 225 55 Power consumption W 165 (189) 230 (275) 280 (295) 60 ( ): Previous model IDU3D/4D/6D Series IDFS Series IDFS Inlet air temperature C Model IDFS6E IDFS8E IDFS11E 740 35 1200

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS Series IDUS Inlet air temperature C Model IDUS3E IDUS4E IDUS6E 500 310 55 740 Air flow capacity l/mim(ANR) 295 (300) 475 (430) 703 (640) 60 160 275 225 55 Power consumption W 165 (189) 230 (275) 280 (295) 60 ( ): Previous model IDU3D/4D/6D Series IDFS Series IDFS Inlet air temperature C Model IDFS6E IDFS8E IDFS11E 740 35 1200 1650

Single Axis Electric Actuator Series LJ1H

Positioning distance (mm) 1200 600 100 10 1 10 120.5 60.5 10.5 1.5 0.6 Speed (mm/s) 100 12.5 6.5 1.5 0.6 0.5 250 5.4 3.0 1.0 0.6 0.5 500 3.1 1.9 0.9 0.6 0.5 Values will vary slightly depending on the operating conditions.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Positioning distance (mm) 1200 600 100 10 1 10 120.5 60.5 10.5 1.5 0.6 Speed (mm/s) 100 12.5 6.5 1.5 0.6 0.5 150 8.5 4.5 1.2 0.6 0.5 300 4.6 2.6 0.9 0.6 0.5 Values will vary slightly depending on the operating conditions.

MY1

) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1CW25 MY1CW25 (1000) (1000) (1000) (1000) MY1MW20 MY1MW20 30 30 (1000) (900) (1000) (900) (1000) (1000) Caution MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1CW16 (900) (900) (900) (900) (900) (900) 20 20 1.

Air Cylinder

I J 20 Up to 350 18 15.5 13 14 8 12.5 12 2 12 12 35 5 25.3 37 26 M4 x 0.7 depth 7 25 Up to 400 22 19.5 17 16.5 10 12.5 14 2 12 12 40 6 28.3 40 31 M5 x 0.8 depth 7.5 32 Up to 450 22 19.5 17 20 12 12 18 2 12 12 40 6 31.3 43 38 M5 x 0.8 depth 8 40 Up to 800 30 27 19 26 16 15 25 2 13 13 50 8 38.3 52.5 47 M6 x 1 depth 12 50 Up to 1200 35 32 27 32 20 16.5 30 2 14 14 58 11 44.5 58.5 58 M8 x 1.25

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0 200 400 600 800 1000 1200 1400 VQ4l5l (Plug lead type) ARBQ4000-00-B-5 B ARBQ4000-00-P-5 P Flow rate [L/min(ANR)] ARBQ4000-00-P (P B) 0.7 Dimensions 0.6 Outlet pressure [MPa] 0.5 0.4 SMC 0.3 0.2 59 50 147 0.1 B 2 SMC 1400 0 0 200 400 600 800 1000 1200 12 1 P 5 3 R2 R1 Flow rate [L/min(ANR)] PE 4 A 55.5 Pressure Characteristics 25 218.5 Conditions Inlet pressure: 0.7 MPa Outlet pressure:

High Vacuum Angle Valve

Model XLm-100(-1)-X152 XLm-160(-1)-X152 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 2 3 100 V 800/220 1200/350 H4 100C Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 3200/220 4800/350 Heater assembly quantity 3 4 100 V 1200/300 1600/400 H5 120C 200 V 4800/300 6400/400 The inrush current of

RSH/RS1H

REC RSH20, 32 Graph (1) Graph (2) 1.0 CX RSH20 RSH32 0.9 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 Operating pressure P [MPa] CY 0.8 1300 1300 80 0.7 1200 1200 MQQ M 0.6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1100 1100 0.5 RHC 1000 1000 0.4 900

1

D-X Shock absorber 20Data ZZ + Stroke S MH ZZ Bore (mm) 20 25 32 40 50 63 Stroke range Shock absorber 10 to 350 RBAC0806 77 23.5 135.5 10 to 400 RBAC1007 77 31 148 15 to 450 RBAC1412 55 79 174 15 to 800 RBAC2015 62.5 87 199.5 15 to 1200 RBAC2015 102 55.5 215.5 25 to 1200 RBAC2725 92.5 102 252.5 6-17-97 78 Made to Order Common Specifications: -XC51: With Hose Nipple -XC52: Mounting Nut with