OMU0023

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

ISO Cylinder

88.5 113.5 138.5 12.5 D-A72/A7lH/A80H D-A73C/A80C D-F7l/F7lW D-J79/J79W D-F7lWV D-J79C D-F7BAL, D-F79F 32 9 (34) 59 84 109 8 40 14 (39) 64 89 114 139 13 D-A79WL 32 6 (31) 56 81 106 5 40 11 (36) 61 86 111 136 10 32 7 (32) 57 82 107 6 D-H7l/H7C/H7lW D-H7BAL, D-H7NF 40 12 (37) 62 87 112 137 11 * The value in ( ) is for air cushion. * The above-mentioned value is a guide for auto switch

F

I F F E R E N T D I A.

ZP

N 10 D Model A B C D E Y q Pad dia.

Integrated Controller

Auto Switch Specifications Grommet PLC: Programmable Logic Controller D-M9E, D-M9EV (With indicator light) Auto switch model D-M9NE D-M9NEV D-M9PE D-M9PEV D-M9BE D-M9BEV Output signal turns on when no magnetic force is detected.

15

D-M9PA(V) D-M9BA(V) 7 13 38 63 D-M9NA(V) 8 14 41 68 Auto switch model 0.5 m (Nil) 1 m (M) 3 m (L) 5 m (Z) Lead wire length Dimensions (mm) D-M9A Indicator light Slotted set screw (flat point) Mounting screw M2.5 x 4 L Stainless steel 2 24 2.8 500(1000)(3000)(5000) 0.2 3 4 6 Most sensitive position 2.6 D-M9NAV/D-M9PAV D-M9BAV 500(1000)(3000)(5000) Mounting screw M2.5 x 4 L Stainless steel

SMC Pneumatic Clean Series

/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9 D-M9V D-F9W D-F9WV D-F9BAL D-Y59A/Y7P/Y59B

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

D LEC-CSNA-1 11.1 Product no.

CQS

, D-F9WV D-M9, D-F9W D-M9V D-A9V D-F9BAL CQ2 No. of auto switches mounted 1.

CQS

D-A9l, D-F9lWV D-F9 , D-F9lW D-F9N B P D-A9lV D-F9lV D-F9BA No. of auto switches 15 20 25 10 10 5 2 10 15 20 25 5 5 1 Consult SMC for shorter strokes than indicated in the table.

2/3 Port Valve

DIN connector: D Conduit terminal: T Model Grommet Electrical entry Conduit Conduit terminal DIN connector R Q 59 59 60 Port size Rc(PT) VXD2140 Energized open Bracket Q R a b c d e f M L K J A H F E D C B N 69 (76) 77 (84) 87 (97) N 61 69 79 Q 39 39 N 61 (68) 69 (76) 79 (89) N 61 (68) 69 (76) 79 (89) Q 23 23 Energized closed VXD2142 47 47 48 65 78 86 42 46 56 52 56 66 104 (116) 44 59 66

KR

M H Branch Union Elbow: KGLU D Applicable tubing O.D.

MY2

Auto Switch Weights Unit: g Auto Switch Internal Circuits D-F9N(V) D-F9P(V) D-F9B(V) Model 0.5 7 7 6 D-F9N, F9NV Lead wire length (m) 3 37 37 31 DC (+) Brown 5 61 61 51 Main switch circuit Main switch circuit Main switch circuit OUT Black Auto Switch Dimensions D-F9 Mounting screw M2.5 x 4l Slotted set screw DC () Blue 2 Indicator light D-F9P, F9PV 2.7 2.8 22 DC (+) Brown 2.6 4 OUT Black

IIIIIII

P T 0 216 in (5 5mm) O T 0 039 in (1mm) T T 0 256 in (6 5mm) 0 216 in. (5 5mm) 0 039 in (1mm) .75 PSIG (5 Kg7cm2) A B c D E F G H J K A B c D E F G H J 2.81 171 5) 1.95 i4e.5) 0.96 '24.5\o.87 t22l 0.06 (1.5) 0.12 (3) 1 . 5 7 (40) 0.96 (24.5) 1.20 :30.5) 0.24 (61 f3(t 5l o.24 /61 Millimeters in Parentheses f4q 5l 1.20 fi5) 0.12 /3) 1.54 lAt\ 1.28 '"2 5l 0.96 'tL 6l 0.06 /eol 1.95 3.23 Millimeters

Mechanical Valves Series NVM, NVFM, NVZNI

) P T 0 216 in (5 5mm) O T 0 039 in (1mm) T T 0 256 in (6 5mm) 0 216 in. (5 5mm) 0 039 in (1mm) .75 PSIG (5 Kg7cm2) A B c D E F G H J K A B c D E F G H J 2.81 171 5) 1.95 i4e.5) 0.96 '24.5\o.87 t22l 0.06 (1.5) 0.12 (3) 1 . 5 7 (40) 0.96 (24.5) 1.20 :30.5) 0.24 (61 f3(t 5l o.24 /61 Millimeters in Parentheses f4q 5l 1.20 fi5) 0.12 /3) 1.54 lAt\ 1.28 '"2 5l 0.96 'tL 6l 0.06 /eol 1.95 3.23 Millimeters

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(same side) 70 Bore size (mm) D-F9BAL Auto switch model 1 or 2 pcs. (different sides) 25 40 50 63 80 D-Z7/Z80 10 10 11 13 40 32 50 Bore size (mm) 63 80 Auto switch type No. of auto switches Model D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV 6 5 6 8 2 pcs. (same side) 70 60 D-Z7/Z80 Reed switch D-Y7BAL 5.5 5.5 6 7 1 or 2 pcs.

SYJ300-OMU0003

-05 N N DC12V 12V SY100-61-3-06 AC100V 100V SY100-61-2-01 D DIN Assy V115-D V115-Y AC200V 200V SY100-61-2-02 AC110V 110V SY100-61-2-03 V111(G,H,L,M,W)V115-Y(DIN) AC220V 220V SY100-61-2-04 Y DIN SY100-82-1 DC24V 24VN SY100-82-3-05 DC12V 12VN SY100-82-3-06 AC100V 100VN SY100-82-2-01 () AC200V 200VN SY100-82-2-02 AC110V(AC115V) 110VN SY100-82-2-03 AC220V(AC230V) 220VN SY100-82

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

side traveling parallelism to B side C side w LEKFS25 0.04 0.02 LEKFS32 0.04 0.02 LEKFS40 0.04 0.02 D side * Traveling parallelism does not include the mounting surface accuracy.

Thermo-chiller/Rack Mount Type

/64 61/64 Accessories18 Power supply connector, Particle filter element and maintenance handle19, Operation manual Weight10 [kg] 40 46 1 No condensation should be present.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Solid state auto switch: D-M9B, D-M9N B E Model Auto switch operating range Stroke Stroke A 40 50 150 100 75 100 10 20 30 125 75 20 30 125 150 10 40 50 13-/22-MXS6 0.4 0.4 0.4 11.6 17.5 9.6 9.6 9.6 21.6 27.6 1.5 10 13-/22-MXS8 4.9 0.1 0.9 8.9 16.9 41.9 14.9 9.9 10.9 18.9 26.9 51.9 1.5 11.6 13-/22-MXS12 74.4 32.4 22.4 12.4 14.4 24.4 22.4 12.4 2.4 4.4 14.4 35.4 64.4 2.5 45.4 15.6 13-/22