F

Japanese N ...North American No Of Needle Revolutions 10 Turns / 8 Turns (AS1001F) Applicable Tube Material Nylon, Soft Nylon, Polyurethane A P P L I C A B L E T U B E OD B O D Y S I Z E mm 23 32 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 100 ...M5 (04, 06) 200 ...1/8 (04, 06) 205 ...1/4 (06, 08) 300 ...3/8 (06, 08, 10, 12) 400 ...1/2 (10, 12) W I

125

12 x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12 2 01 Pilot solenoid Operation type Option 1 External pilot solenoid 2 Internal pilot solenoid Nil None Thread type Nil Rc F G N NPT T NPTF Body size Port size B Bracket

Booster Regulator Series VBA1110 to 4200 1

K J H G F E D C B A 475 432 512 472 525 482 562 522 L Booster part no. Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

54.3 12 17.2 38.5 54.3 12 17 21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1

VCC

3 A-y A-u A-i A-y B-q B-w B-e B-r B-w B-t B-y B-t Orifice body PTFE seal O-ring Sleeve O-ring O-ring O-ring Name plate O-ring O-ring Orifice body Name plate O-ring O-ring O-ring O-ring Orifice O-ring O-ring Name plate O-ring O-ring O-ring O-ring PEEK resin Special PTFE Special FKM POM Special FKM Special FKM Special FKM Special FKM Special FKM PEEK resin Special FKM Special FKM HNBR Special

Table of Contents

resin Wear ring B !

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

3 Port Solenoid Valve/

254.2 AW30-03G-A Y300T-A E300-03-A VP744-5DZ1-04-X538 34.4 75.2 118.7 262.7 AW40-04G-A Y400T-A E400-04-A VP744-5DZ1-04-X555 34.4 75.2 160.2 304.2 AW40-04G-A Y400T-A E400-04-A 17 VP500/700-X536, X538, X555 Specific Product Precautions Be sure to read this before handling.

CA2

socket 17 BA-04 BA-05 BA-06 BA-08 BA-10 80, 100 20JIS B 1181 Class 3 Intermediate M12 x 1.75 19 JIS B4636 + Two-angle socket 19 2.

CV/MVGQ

B B B B B B RE A B 0 (0) 0 (0) 0 (2.5) 2 (6) 4 (7.5) 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 3.5 (6.5) 3.5 (6.5) 5.5 (9) 8.5 (12.5) 10.5 (14) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 1 (4) 1 (4) 3 (6.5) 6 (10) 8 (11.5) 8.5 (11.5) 8.5 (11.5) 10.5 (14) 13.5 (17.5) 15.5 (19) 0.5 (3.5) 0.5 (3.5) 2.5 (6) 5.5 (9.5) 7.5 (11) 1 (0) 1 (0) 5.5 (1.5) 8.5 (4) 10.5 (6.5) 1.5 (0) 1.5 (0) 6 (2) 9 (4.5) 11 (7)

CV/MVGQ

B B B B B B RE A B 0 (0) 0 (0) 0 (2.5) 2 (6) 4 (7.5) 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 3.5 (6.5) 3.5 (6.5) 5.5 (9) 8.5 (12.5) 10.5 (14) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 1 (4) 1 (4) 3 (6.5) 6 (10) 8 (11.5) 8.5 (11.5) 8.5 (11.5) 10.5 (14) 13.5 (17.5) 15.5 (19) 0.5 (3.5) 0.5 (3.5) 2.5 (6) 5.5 (9.5) 7.5 (11) 1 (0) 1 (0) 5.5 (1.5) 8.5 (4) 10.5 (6.5) 1.5 (0) 1.5 (0) 6 (2) 9 (4.5) 11 (7)

3 Port Air Operated Valve

VPA300/500/700 Series VPA700 Series/Base Mounted/Dimensions 3/8, 1/2 2(A) port Standard/VPA744-103 04 A B 40 16 64 24 3/8, 1/2 3(R) port 1/8 12(PA) port 18 67 2 x 6.2 (For mounting) NO 2A NC 53 66 12 12 3R NC 1P (1/8) 12(PA) port 11.5 16 115.1 107.1 24 96.5 95.5 32.5 M5 x 0.8 (Breathing hole) 16 X 40 3/8, 1/2 1(P) port 80 03 04 A B For vacuum/VPA744V-13/8, 1/2 2(A) port 40 16 64 3/8, 1/2

Compact and Lightweight

ZA A B t 2 x D ZX C ZM ZL ZH ZH ZH ZH -X267 ZH13 to 20DA 2 x D B ZHP A F E C ZU VQD-V Long clamping screw set for 1 station required for assembly needs to be ordered separately.

VSA4

C [dm3/(sbar)] 12 15 13 15 14 17 15 17 Note) Weight (kg) Valve model Body size Function Port size Rc A/B EA/EB Pilot port size VA C [dm3/(sbar)] 13 16 13 16 13 16 13 17 b 0.24 0.32 0.24 0.32 0.26 0.25 0.18 0.30 Cv 3.3 4.2 3.3 4.2 3.2 4.2 3.0 4.3 b 0.15 0.31 0.15 0.31 0.22 0.27 0.18 0.39 Cv 3.0 4.1 3.0 4.1 3.5 4.2 3.6 4.6 1 2 VSA4140-04 VSA4140-06 VSA4240-04 VSA4240-06 VSA4340-04 VSA4340-

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Made to Order How to Order 2 1 F 06 200 AS S Lubricant: Vaseline -X12 Example) AS2002FS-04-X12 Made to Order Body size Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Applicable tubing O.D.1 Example) AS2002FS-04-X21 * Not particle-free Metric size Inch size 23 3.22 04 4 06 6 08

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Note 2) This filter does not include any companion flange, companion flange bolt, and O-ring. 4 x K depth L DRAIN (): Internal dimensions for FH342 type (mm) Model Weight (kg) d A B C D E F G H J J' K L M N P Q Threaded Rc Flange SSA FH340-03 FH340-04 FH342-06 FH342-08 FH34 -10 FH34 -12 FH341-16 FH440-03 FH44 -04 FH44 -06 FH44 -08 FH44 -10 FH44 -12 FH441-16 FH441-20 FH441-24 FH540-03 FH54

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 41 and 42 Type Manifold Specifications for 41 and 42 Type SS5Y5-41 SS5Y5-42 SS5Y7-42 Port size Flow characteristics Model 52-SY740 52-SY540 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model Applicable valve 4,2 (A,B) (P ,EA,EB) b Cv c[dm3/(sbar)] c[dm3/(sbar)] Single base / B mounting Manifold style b Cv SS5Y5-41 1 (SUP) / 3/5 (EXH) Common SUP / Common EXH 1/4

SX

141.1 99.2 99.2 19 42.9 (Lead wire length) 19 42.9 Polarity indication 13.6 13.6 A B A B B A A COM B + A B A B A B A Manual override (Push and turn for locking type) 42 31.4 Manual override (Press and turn for the locking type) 42 31.4 84.9 B: Green A: Orange 2-4.2 84.9 B: Green A: Orange 2-4.2 2-One-touch fittings (Mounting holes for manifold) (A, B port) (A, B port) 2-One-touch fittings

Fluoropolymer Piping Equipment

" A A 1/4" B B 1/4" B B 3/8" The table of combination is the same as that for A side.

HRX-OM-W038

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.