Cooling Capacity: 024 [2000/2400, (50/60 Hz)], Cooling Method: Water-cooled, Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)], Option 1: None, Option 2: -

Cooling Capacity: 050 [5000/5900, (50/60 Hz)], Cooling Method: Water-cooled, Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)], Option 1: None, Option 2: -

Cooling Capacity: 018 [1600/1800, (50/60 Hz)], Cooling Method: Water-cooled, Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)], Option 1: None, Option 2: -

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

U U U U U U U A B A B A B A B A B A B U 4.5 5.5 (10) 5 6 (10.5) 2 3 (7.5) 12 22 26 23 26.5 20.5 19.5 5 (7) 8 (6) 5.5 (7.5) 5 (3) 2.5 (4.5) 7.5 (5.5) 16 25 29 26 29.5 23.5 22.5 20 25 32 40 50 27 31 28 31.5 25.5 24.5 5 7 8 6.5 7.5 4 30 34 31 34.5 28.5 27.5 5 7.5 8 7 7.5 4.5 34 27 29 26.5 38 35 38.5 32.5 31.5 6.5 6.5 9.5 6 9 3.5 8 5 12 9 11 8 37.5 30.5 32.5 30 41.5 38.5 42 36 35 10.5 9 13.5

Compact 5-Port Solenoid Valve

-10m U D B Stations CM U side D side L1 (L5) A A A A Plug-in Common Dimensions B B B B 4 A 4 A 4 A 4 A B 2 B 2 B 2 B 2 (Fitting for the type with P/E ports on the U and/or D sides) L2 (L4) (DIN rail mounting hole pitch: 12.5) (L3) One-touch fitting [4(A), 2(B) port] (Station n) (Station 1) One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 6 (SMC) Applicable tubing O.D.

ZP

B C F G C F G Flat Flat with ribs D E Model A ZPT10 U C ZPT13 U C ZPT16 U C U C U C 10 12 1.7 ZPT40 6.5 15 4.5 40.5 40 43 18.5 24.5 50.5 3.3 17 38 43 3 12 3.8 25 3 41.5 25 13 15 20 1.8 ZPT50 7.5 50 53 19.5 25.5 51.5 16 18 12.5 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5 x 0.8 H: M6 x 1 Y Model A B E F E F C D ZPT40D 40 43 29 35.5 3 25 61 4.5 15 51

CQ2

B A B A B A B A B A B A B U U U U U U U U U 4.5 5.5 (10) 5 6 (10.5) 2 3 (7.5) 9 10 (4.5) 12 19.5 20.5 26.5 23 26 22 7.5 (5.5) 5 (7) 8 (6) 5.5 (7.5) 5 (3) 2.5 (4.5) 12 (10) 9.5 16 22.5 23.5 29.5 26 29 25 (11.5) 20 25 32 40 50 24.5 25.5 31.5 28 31 27 4 7.5 8 7 11 12 6.5 5 27.5 28.5 34.5 31 34 30 11.5 4.5 7.5 8 7.5 12 7 5 31.5 32.5 38.5 35 38 34 27 29 26.5 8 13.5 12 11 10.5 3.5 9 9.5 6.5 8 9

V

LV E S TAT I O N S 1 Compact Type 2 External Pilot Capable Type 02 2 Stations to 20 20 Stations H O W T O O R D E R B A S E M O U N T E D V A LV E W/ I N D I V I D U A L L E A D W I R E SY3/5/7000 SY 40 S E R I E S I N D I V I D U A L L I G H T & S U R G E V O LTA G E S U P P R E S S O R 3 SY3000 5 SY5000 7 SY7000 Without S With Surge Suppressor Z With Indicator Light and Surge Voltage Suppressor

Table of Contents

7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

MGP

(mm) Bore size (mm) MGPS MGPM 25 50 75 100 125 150 175 200 50 30 25 50 80 U U U U U U U U U U U U U U U U MGPS Slide bearing 80 45 30 Water resistant (20 to 100) KVariations Long stroke Copper free Standard Cushion Bearing style Page Bore size (mm) KApplicable Auto Switch 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 Slide U U U U Reed switch Solid state switch Rubber bumper 3.17-4 D-Z7/Z8 Ball

SQ1000/2000

5 1 3 (R1) (P)(R2) u u SQ1531 SQ1530 (A) (B) 2 4 (A) (B) 2 4 5 1 3 (R1)(P)(R2) 5 1 3 (R1) (P)(R2) Dual 3 port valve: SQ1 31 A B C SQ1A31 Parts list 4 2 y e e q w w No.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

fitting [X: External pilot port] Applicable tubing O.D.: 4 5/32" One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.: 4 5/32" L3 (L4) U side D side (C6: 3.2) (N7: 7) (4.9) 37.3 8 58.4 36.9 5.5 42.3 16.6 B B B B B 35 4 5 1 2 3 6 7 8 9 10 92.2 A A A A A 18 19 20 21 22 18 16 17 83.7 28.8 26 24 25 A B A B 13 14 15 23 11 12 Air Preparation Equipment Pressure Control Equipment Flow Control

F

E A D: M-5E B U L K H E A D R E D U C E R: M-5ER R E D U C I N G B U S H I N G: M-5B M5 female to 18 female taper M5 female to 18 male taper P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R T E C H N I C A L SPECIFICATIONS S T R A I G H T B A R B C O N N E C T O R: M-01AU-4 M-01AU-6 S T R A I G H T A D A P T O R: M-01H-4 M-01H-6 Applicable Tube Material Nylon Soft Nylon Polyurethane

Series SV

Mounting 20 Tie-rod base 20 stations Direct mount DIN rail mount (with DIN rail) DIN rail mount (without DIN rail) Nil D D0 D3 SS5V W 1 05 U 10CD Note) When a DIN rail longer than the specified stations is required. (Specify a rail longer than the standard length.) Cassette base For 3 stations SS5V W 05 16CD 1 U ... ...

ZP

5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A

Table of Contents

(VX31, 32, 33) 20 Model Minimum AC/DC Ambient temperature (C ) 40 10 Operating fluid temperature (C ) Temperature conditions Power source Sketch Air Vacuum 60 10 40 AC/DC Maximum AC/DC 20 Minimum Position ON X X P A P A X OFF X X A R (VP) A R X ON X X A R (VP) X A R OFF X X P A X P A ON Pq A A Pq Pq A Pq A A Pq OFF Pw A A Pw Pw A A Pw Pw A Note 1) An exclusive type set with

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

U U U U U U U A B A B A B A B A B A B U 4.5 5.5 (10) 5 6 (10.5) 2 3 (7.5) 12 22 26 23 26.5 20.5 19.5 5 (7) 8 (6) 5.5 (7.5) 5 (3) 2.5 (4.5) 7.5 (5.5) 16 25 29 26 29.5 23.5 22.5 20 25 32 40 50 27 31 28 31.5 25.5 24.5 5 7 8 6.5 7.5 4 30 34 31 34.5 28.5 27.5 5 7.5 8 7 7.5 4.5 34 27 38 29 26.5 35 38.5 32.5 31.5 6.5 6.5 9.5 6 9 3.5 5 12 9 11 8 8 37.5 30.5 41.5 32.5 30 38.5 42 36 35 10.5 9 13.5

SX

. (20 stations maximum) When a longer DIN rail is desired than the specified stations, specify the station number to be required. (20 stations maximum) Terminal block mounting position Symbol Mounting position Symbol Mounting position U U side U U side A, B port size (Metric size) A, B port size (Metric size) D D side D D side Valve stations Valve stations Symbol Port size Applicable series

ZP

5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

U D 5 3 U D 5 3 Individual EXH block assembly Individual SUP block assembly X U side D side U side D side X X 1(P) 1(P) 3/5(R) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 1(P) 3/5(R) 3/5(R) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) [When a different supply pressure is required for only a middle valve.]