Vacuum Unit

How to Order w q e r t y ZK2 A C K 5 K W 12 08 u i q Body/Exhaust type e Combination of supply valve and release valve w Nominal nozzle size Symbol Nominal nozzle size 07 0.7 10 1.0 12 1.2 15 1.5 Symbol Body Exhaust type Symbol Supply valve Release valve N.C. N.C.

LEC-OM07605CN

(1) 0+55() 0+40() -20+65() -15+70() 90%RH() 80%RH() 90%RH() () 1000m LECSS2-T5 LECSS2-T7 LECSS2-T8 LECSS2-T9 () 5.9m/s2 XY49m/s2 (2) (FR-BIF) (UVW), A 5 (UVW)(UVW) U U U U V V M V M V W W W W DC DC 24 V DC 24 V DOCOM DOCOM RA RA U,V,WCN2 (3) (4) A 6 () (5) DC24V ALM()MBR( ) RA B U DC 24 V (6) 10 (7) A 7 () 1.(:) (1) (2) 2.(:) (1) 1 (2) (3) (4) , [](:) EEP-ROM

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Applicable solenoid valves: Type 10-SYJ312M Type 10-SYJ322M (10-SYJ300 3 port valve) (10-SYJ300 3 port valve) w 10-SS5YJ3-31/-S31, 10-SS5YJ3-32/-S32, 10-SS5YJ3-46/-S46, 10-SS5YJ3-32P The 3 port valve can be used without modification. The A port of the valve will flow out of the B port of the manifold.

RSQ

ML2B I C J G5-S D T W E CV U 4-N through 8-O counterbore MVGQ 20 (22) 10 (11) V CC H + Stroke A + 2 stroke B + Stroke M 0.2 E RB Built-in One-touch fittings (20 to 50) Tubing O.D.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

2 w e !3 !4 r t y u i !5 !6 No.

%silltr

S Y M B O L S S H O W T H E F U N C T I O N O F A C O M P O N E N T B U T D O N O T I N D I C A T E T H E C O N S T R U C T I O N .

Fieldbus System

Symbol Stations Note 02 2 stations P, E port entry Double wiring Note 1) U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) 16 02 16 stations 2 stations Note 2) Specified layout: Indicate the wiring specifications on the manifold specification sheet.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Applicable solenoid valves: 10-SYJ312M, 10-SYJ322M w 10-SS5YJ3-31, -S31, 10-SS5YJ3-32, -S32, 10-SS5YJ3-32SA, 10-SS5YJ3-46, -S46, 10-SS5YJ3-32P The 3 port valve can be used without modification. The A port of the valve will flow out of the B port of the manifold.

SMC Basic Pneumatics

S Y M B O L S S H O W T H E F U N C T I O N O F A C O M P O N E N T B U T D O N O T I N D I C A T E T H E C O N S T R U C T I O N .

Air Slide Table

Air Slide Table Double-ported Type How to Order 6, 8, 12, 16, 20, 25 MXQmA Series RoHS 30 ZA MXQ 12 M9BW A q w e r t y u i t Functional options u Number of auto switches q Bore size Body option: w Double-ported type e Standard stroke [mm] A 6 10, 20, 30, 40, 50 Symbol Functional option Nil Without functional option 1 With buffer 2 With end lock 3 Axial piping 4 With buffer, end lock 5 With

Table of Contents

Function Coil voltage Light/Surge voltage suppressor AC Symbol Specifications DC (1.0 W) (1) Standard type Nil 1 3 5 6 100 VAC (50/60 Hz) 110 VAC (50/60 Hz) 24 VDC 12 VDC (1.5 W) (0.5 W) Yes None Nil High pressure type H (2) E Low wattage type Y (2) Note 1) For power consumption of AC type, refer to page 2-4-10.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

side U side U side D side U side D side 107.8 106 Station Nos.

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

ZP

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

SZ3000

One-touch fitting Refer to One-touch fitting part number information on page 38. 9 Clip SX3000-115-1 10 10 Cassette Type Manifold Series SZ3000 Manifold Exploded View 60P manifold (plug-in, flat cable type) q w U side t r u e D side y No. Parts list Part No.

SV

U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) 20 For 20 stations Note) Note) Able to specify the length for 3 stations up to 18 stations for SV1000, which is available with 18 stations at the maximum.

Air Cylinder

0 t u !4 q e o !3 r w i !2 y u 20 to 32 Component Parts Replacement Parts: Seal Kit Bore size (mm) Kit no. Contents 20 CG1KWN20Z-PS Set of the nos. !1, !2, !3, !4 No.

SZ3000

1 i w w u 6 e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3B60K/With back pressure check valve 4(A) 2(B) 5(R) SOL.a SOL.b 3(R) 1(P) o 5 (R) 1 (P) 3 (R) SZ3C60 [N.C. valve, N.O. valve 1 pc. each] SZ3C60 [N.C. valve, N.O. valve 1 pc. each] 4(A) 2(B) r u !0 !

Series VQ Base Mounted Metal Seal/Rubber Seal

S w e r U S U S VZ AXT100-1-F (4) U S AXT100-1-GU20 Note 1) Suffix XP for dust-proof SI unit.