0.4

Note 2) The ejector unit is mounted next to the U-side end plate. Note 3) The U-side end plate is used exclusively for ejector units. (Without P and R port) Note 4) The dimension of manifold with an ejector unit is different from the standard dimension.

15

70 10 75 Stroke [mm] 100 1000 70 10 75 LEY u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s LES 10 10 LEYG32M Load mass m [kg] Load mass m [kg] LEYG32M LEPY LEPS LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LER LEYG25M LEYG25M LEH 0.1 0.1 LEY -X5 Stroke [mm] 100 1000 70 10 75 Stroke [mm] 100 1000 70 10 75 11LEFS Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

2 to 20 stations D side: 2 to 10 stations U side: 2 to 10 stations M Mixed Nil Standard length (Specify a longer rail than the standard length.)

Aluminum High Vacuum Angle Valve

w, e w e Symbol External 1.3 x 10-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Modular F.R.L. Units

*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

Made to Order

It may vary substantially depending on an ambient environment. D-A7/A80 D-A7H/A80H D-A73C/A80C 15 + 10 (n2)Note) (n=4, 6...) 5 10 5 10 15 + 15 (n2)Note) (n=4, 6...) D-A7H D-A80H Note) When n is an odd number, an even number that is one larger than this odd number is used for the calculation. However, the minimum even number is 4. So, 4 is used for the calculation when n is 1 to 3.

SX

Symbol Stations Mounting position D U B 2 to 20 stations 2 to 10 stations 2 to 10 stations D side U side Both sides M Special specifications For special specifications, indicate separately by the manifold specification sheet.

A

R S T R O K E ( I N C H) S E A L K I T S 6 .CY2B6-PS 10 .CY2B10-PS 15 .CY2B15-PS 25 .CY2B25-PS 32 .CY2B32-PS 40 .CY2B40-PS Bore Size Standard Stroke (inch) Maximum Stroke (inch) 6 2, 3, 4, 5, 6, 8, 10 12 10 2, 3, 4, 5, 6, 8, 10 20 15 5, 10, 15, 20, 25, 30 40 N O N-G U I D E D M O U N T I N GN U T NSNJ-015 (6/10/15) NSN-03 (25/32) NSN-04 (40) 25 5, 10, 15, 20, 25, 30, 40 80 32 5, 10, 15,

Fieldbus System

Symbol Stations Note 02 2 stations P, E port entry Double wiring Note 1) U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) 16 02 16 stations 2 stations Note 2) Specified layout: Indicate the wiring specifications on the manifold specification sheet.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VVQ2000-3A-1<U-Side End Plate Assembly> u U-side end plate assembly no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VVQ2000-3A-1<U-Side End Plate Assembly> u U-side end plate assembly no.

Air Cylinder

Applicable bore size B C D d H TN-020B 20 26 28 25.5 M20 x 1.5 10 TN-032B 25, 32 32 34 31.5 M26 x 1.5 10 TN-040B 40 41 45 40.5 M32 x 2 10 Part no.

VQ5000

side U side U side D side U side D side 107.8 106 Station Nos.

Table of Contents

AS321FE AS331FE AS421FE AS431FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.

Rotary Actuator

A grease pack (10 g) is included. If an additional grease pack is needed, order with the following part number.

V

2~8 24VDC 12V 12 VDC * Mixed Porting Available by Special Order SUP/EXH B L O C K A S S E M B LY M O U N T I N G P O S I T I O N S U U Side 2 ~ 10 Stations D D Side 2 ~ 10 Stations B Both Sides 2 ~ 20 Stations *M Special Specifications (by Special Order) C O N N E C T O R M O U N T I N G P O S I T I O N U U Side D D Side V A LV E S TAT I O N S (BLANKING PLATE ASSEMBLY ARE INCLUDED) 20 Pole

SZ3000

One-touch fitting Refer to One-touch fitting part number information on page 38. 9 Clip SX3000-115-1 10 10 Cassette Type Manifold Series SZ3000 Manifold Exploded View 60P manifold (plug-in, flat cable type) q w U side t r u e D side y No. Parts list Part No.

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.

42

Series Manifold mounted exhaust cleaner VV5Q4 -lll-CD (D side mounting) VV5Q4 -lll-CU (U side mounting) 1 5 1 5 Applicable exhaust cleaner AMC610-10 (Port size Rc 1) An adapter plate for exhaust cleaner mounting is provided on the top of the manifold end plate.

Title not found

3 Cable color Circuit U V W Red White Black Connector D terminal no. 12 13 7 6 9 8 11 10 3 Connector A2 terminal no.