5

D-A7H D-A80H 5 10 15 + 15 (n 2) (n = 4, 6) Note 4) D-A79W 10 15 10 + 15 (n 2) (n = 4, 6) Note 4) D-F7 D-J79 5 5 15 + 15 (n 2) (n = 4, 6) Note 4) D-F7V D-J79C 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-F7W/J79W D-F7BA/F79F/F7NT 10 15 15 + 20 (n 2) (n = 4, 6) Note 4) D-F7WV D-F7BAV 10 15 10 + 15 (n 2) (n = 4, 6) Note 4) Note 3) When n is an odd number, an even number that is

Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

Table of Contents

u u Drain Drain Drain Component Parts Material No.

0.4

connectors, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

7

Low temperature operation 1) The valve can be used in an ambient temperature of between 10 to 20C.

0.4

Note 2) The ejector unit is mounted next to the U-side end plate. Note 3) The U-side end plate is used exclusively for ejector units. (Without P and R port) Note 4) The dimension of manifold with an ejector unit is different from the standard dimension.

15

70 10 75 Stroke [mm] 100 1000 70 10 75 LEY u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s LES 10 10 LEYG32M Load mass m [kg] Load mass m [kg] LEYG32M LEPY LEPS LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LER LEYG25M LEYG25M LEH 0.1 0.1 LEY -X5 Stroke [mm] 100 1000 70 10 75 Stroke [mm] 100 1000 70 10 75 11LEFS Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

2 to 20 stations D side: 2 to 10 stations U side: 2 to 10 stations M Mixed Nil Standard length (Specify a longer rail than the standard length.)

Aluminum High Vacuum Angle Valve

w, e w e Symbol External 1.3 x 10-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Modular F.R.L. Units

*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

Made to Order

It may vary substantially depending on an ambient environment. D-A7/A80 D-A7H/A80H D-A73C/A80C 15 + 10 (n2)Note) (n=4, 6...) 5 10 5 10 15 + 15 (n2)Note) (n=4, 6...) D-A7H D-A80H Note) When n is an odd number, an even number that is one larger than this odd number is used for the calculation. However, the minimum even number is 4. So, 4 is used for the calculation when n is 1 to 3.

SX

Symbol Stations Mounting position D U B 2 to 20 stations 2 to 10 stations 2 to 10 stations D side U side Both sides M Special specifications For special specifications, indicate separately by the manifold specification sheet.

A

R S T R O K E ( I N C H) S E A L K I T S 6 .CY2B6-PS 10 .CY2B10-PS 15 .CY2B15-PS 25 .CY2B25-PS 32 .CY2B32-PS 40 .CY2B40-PS Bore Size Standard Stroke (inch) Maximum Stroke (inch) 6 2, 3, 4, 5, 6, 8, 10 12 10 2, 3, 4, 5, 6, 8, 10 20 15 5, 10, 15, 20, 25, 30 40 N O N-G U I D E D M O U N T I N GN U T NSNJ-015 (6/10/15) NSN-03 (25/32) NSN-04 (40) 25 5, 10, 15, 20, 25, 30, 40 80 32 5, 10, 15,

Fieldbus System

Symbol Stations Note 02 2 stations P, E port entry Double wiring Note 1) U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) 16 02 16 stations 2 stations Note 2) Specified layout: Indicate the wiring specifications on the manifold specification sheet.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VVQ2000-3A-1<U-Side End Plate Assembly> u U-side end plate assembly no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VVQ2000-3A-1<U-Side End Plate Assembly> u U-side end plate assembly no.

Air Cylinder

Applicable bore size B C D d H TN-020B 20 26 28 25.5 M20 x 1.5 10 TN-032B 25, 32 32 34 31.5 M26 x 1.5 10 TN-040B 40 41 45 40.5 M32 x 2 10 Part no.

VQ5000

side U side U side D side U side D side 107.8 106 Station Nos.

Table of Contents

AS321FE AS331FE AS421FE AS431FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.

Rotary Actuator

A grease pack (10 g) is included. If an additional grease pack is needed, order with the following part number.