AC Note 2) Without valve mechanism. q 00 10 20 30 40 e w w q w q q w e q w (1) Numbers in K indicate the constructing order from the left hand side (upper stream) with a view from front. Ex.) Symbol 00 AF+AR+AL 10 AW+AL (Available only for AC1010 to 4010.) 20 AF+AR 30 AF+AFM+AR (Available only for AC2030 to 4030.)
N 1.5 N F A 1.5 F H S + Stroke 20 Non-lock manual release type K (This drawing shows the cases of 20 and 25.)
Also, when wiring is not required for a station that is to be mounted with an option such as an individual SUP spacer, enter an "X".
Nil K Without back flow mechanism With back flow mechanism Thread type Nil N F Rc NPT G Optional specifications Port size Applicable model AR20(K) to 60(K) AR20(K) to 60(K) AR20(K) to 60(K) AR20(K) to 60(K) AR20(K) to 60(K) Symbol 1 Note 2) N R Y Z Note 3) Description 0.02 to 0.2MPa setting Non-relieving type Flow direction: Right to left Upward handle Body size Symbol Port size 20 25 30
Adjustable Air Cushion B O R E S I Z E 20 3/4 25 1 32 1 1/4 40 1 1/2 50 2 63 2 1/2 Stroke/inch S T R O K E Stroke/Hundredths of an inch S T R O K E STOCK STROKE LIST FOR ALL STYLES SERIES NCG S Y M B O L S R U B B E R C U S H I O N E D B O R E S I Z E S TA N D A R D S T O C K E D S T R O K E M A X I M U M S TA N D A R D S T R O K E 20 1, 2, 3, 4, 5, 6, 8 20 25 1, 2, 3, 4, 5, 6, 8, 10, 12
(The SI unit type is provided for use in Japan.) 20 30 40 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 Option (3) Applicable model AW20(K) to 40(K) AW20(K) to 40(K) AW30(K)/40(K) AW20(K) to 40(K) Description With bracket Float type auto-drain (N.C.) Float type auto-drain (N.O.)
round shaft) K (Double round shaft) Shaft type MSQ MRQ DConfiguration 20M 20 22 25 30 UU 118 139 167 202 D (g6) 15 17 20 25 D (g6) 15 17 20 25 H 36 41 50 60 H 36 41 50 60 H 36 41 50 60 UU 134 158 192 232 N 15 17 20 25 D (g6) 15 17 20 25 Size 50 63 80 100 Refer to pages 11-7-11 to 11-7-12 for other specifications. 11-7-5 6 Series CRA1 Shaft Variations (Size 30) Shaft Type: S, X, Y, Z Mounting
Flat pad P. 11 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37 Heavy-duty ball joint pad HB P. 43 Cyclone pad (Non-contact pad) Made
WB 32 20 to 110 97.5 13 115 to 190 116.5 195 to 300 134 32 20 to 55 74 16 60 to 185 107 190 to 300 144 Z WA WC + Stroke [mm] LEYG M, LEYG L Common Size Stroke range (mm) B C DA EB EH EV FA FB FC G GA H J K NA NC 15 to 35 136.5 50 20 85 103 52.3 11 14.5 12.5 5.4 40.3 53.3 30.8 29 M5 x 0.8 6.5 40 to 100 67.5 105 to 120 161.5 125 to 200 84.5 205 to 300 102 25 20 to 35 156 55 25 101 123 63.8
32 37 37 16 20 20 25 30 to 500 to 600 to 600 to 750 to 750 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 CXS +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 CXT +0.3 +0.1 MX Bore (mm) W/o rod boot W/ rod boot KA L LZ MM PG S N PH U P PL W H 51 58 58 71 72 PW RR J K Z 244 273 296 347 381 Z 252 281 304 356 390 ZZ 43 52 52 65 65 e 11.2 11.2 11.2 12.5 14.0 f 59 66 66 80 81 ZZ 14 18 18 22 26 h l 40 50 63 80
depth 16 63 Up to 1200 35 32 27 38 20 16.5 32 2 14 14 58 11 45 59 72 M10 x 1.5 depth 16 80 Up to 1400 40 37 32 50 25 19 40 3 20 20 71 13 53.5 68 89 M10 x 1.5 depth 22 100 Up to 1500 40 37 41 60 30 20 50 3 20 20 71 16 64.5 79 110 M12 x 1.75 depth 22 Bore size (mm) K KA MM MO NA P RF S TA TC TD TE TF TG WL ZZ 20 5 6 M8 x 1.25 15 24 1/8 11 81 11 M5 x 0.8 8+0.08 0 4 0.5 5.5 15 118 25 5.5 8 M10
(mm) A Weight (g) D1 M D2 L1 L2 Model Nylon Urethane 9 1 8 KQ2Y04-U01 1 4 KQ2Y04-U02 22 34 34.5 15 11 20 14 10 10.4 4 10 18 6.4 6.4 16 2-applicable tubing 1 8 KQ2Y06-U01 3 8 KQ2Y06-U03 24 23 21.5 37 37.5 10 6 1 4 KQ2Y06-U02 20 10 14 12.8 13.4 13.4 17 17 38 26 17 12 1 8 1 4 KQ2Y08-U01 KQ2Y08-U02 22.5 24.5 15 19 41.5 K 14 15.2 12 8 23 18.5 25.6 17.7 3 8 KQ2Y08-U03 17 25.5 42.5 28 1 8 KQ2Y10
25 to 1500 80 M16 x 1.5 110 118 80 17 40 22 16 44 44 3/4 65 184 18 18 72 12 87 50 50 20 269 284 65 17 20 80 25 to 1800 1/4 stroke 100 M18 x 1.5 135 150 102 19 42 22 18 44 44 3/4 75 192 20 22 85 12 109 55 55 23 287 302 80 19 15 100 25 to 1800 Tolerance B-series rod Rod series (mm) Bore size (mm) C-series rod Bore size (mm) LH LX E E MM A MA D K G H ZZ MM A MA D K G H ZZ 32 32 34
Spacer with Bracket: (Z) G F.R.L. body center C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE X B 2 E X A G Seal Y200T Y400T F J H K D Applicable models F 6.8 12 14 18 18 20 G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 J 2.8 3.2 4 4 4.6 6.4 K 25 30 41 50 50 70 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86 112 E 20 24 35 40 40 50 EE 27 33 G 4.5
An EXH block base assembly is used in the blocking position when ordering an EXH spacer incorporated with a manifold no. However, do not order an EXH block base assembly because it is attached to the spacer. When separately ordering an individual EXH spacer, separately order an EXH block base assembly because it is not attached to the spacer.
40 20 14 15.5 19 to 600 32 75 18 104.5 58.5 63 1/4 12 45 17.5 35 27 11 75 134.5 56.5 14 20 40 20 14 16.5 23 to 600 32 90 18 119.5 68 80 1/4 18 45 22 40 32 13 95 169 72 22 30 60 25 20 19 33 to 750 37 102 22 150 81 100 1/4 20 55 25 40 41 16 114 189 89 22 30 60 30 20 19 37.5 to 750 37 116 26 170 96 Bore size (mm) N S U V T P J MM GR GE GF K L Q RR H VA W Z ZZ 32 27 154 13 6.5 34 1/8 10.5 M6
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
M10, L = 20 Refer to part no.