Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) Size Q1 = M Size Q1 = M 15 20 30 40 15 20 30 40 Thread Shaft type K T K T K T K T Thread M3 x 0.5 2.5 2.5 2.5 2.5 L1 = L1 = M3 x 0.5 2.5 2.5 2.5 2.5 M4 x 0.7 3.3 3.3 3.3 L1 L1 M4 x 0.7 3.3 3.3 3.3 M5 x 0.8 4.2 4.2 Q1 M5 x 0.8 Q1 4.2 4.2 11-3-29 64 Series CRBU2 (Size: 10, 15, 20, 30, 40) Made to Order Specifications: -XC1, 2, 3, 4, 5, 6, 7, 30 Shaft type W Standard J K Refer to

XL

Indicator: 6 High Vacuum Angle Valve Series XLA, XLAV Dimensions (mm) 1in = 25.4mm (b) XLA/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) Heater (optional) H B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 E Note 1) B 103 113 158 170 196 235 A 40 50 65 70 88 90 Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 12 11 11

Aluminum High Vacuum Angle Valve

D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 41 113 40 38 30 35 17 23 96 60 48 129 95 62 128.5 28 43 121.5 138.5 50 48 40 40 26 25.5 63 51 120.5 97 66 121.5 154.5 40 96 113 87 66.5 38 30 35 17 23 50 121.5 138.5 89.5 69 48 40 40 26 25.5 458 XL Series Common Option 1 Heater Valve heaters are common for

Air Cylinder

size A AL B1 B2 D G H H1 I K KA MM N NA NN P Q QY S TD TT TX TY TZ Z ZZ 20 18 15.5 13 26 8 41 5 28 5 6 M8 x 1.25 15 24 M20 x 1.5 1/8 19.8 14 62 8 10 32 32 52 36 103 25 22 19.5 17 32 10 45 6 33.5 5.5 8 M10 x 1.25 15 30 M26 x 1.5 1/8 22 14 62 9 10 40 40 60 40 107 32 22 19.5 17 32 12 9 45 6 37.5 5.5 10 M10 x 1.25 15 34.5 M26 x 1.5 1/8 25.8 16 64 9 10 40 40 60 40 109 40 24 21 22 41 14 10.5

AC

Model Port size M B B A B C D P E F G H J K L 8, 1 4 1 40 53 70 75 97.5 129 165 169 11 14 18 20 40 53 70 70 40 56 73 73 17 16 17 14 30 41 50 50 27 40 54 54 22 23 26 25 5.4 6.5 8.5 8.5 8.4 8 10.5 10.5 40 53 70 70 2.3 2.3 2.3 2.3 120.5 AFD2000 AFD3000 AFD4000 AFD4000-06 4, 1 8 3 170 206 210 4 3 2 1 4, 1 8, 3 AFD2000 AFD3000 SAC2000, #1 SAC2503, #1 AFD4000 AFD4000-06 SAC4000, #1 SAC4006,

CQ2

Spring return Spring extend C C D 35 40 40 45 40 45 40 45 40 45 45 50 55 60 D 40 45 40 45 40 45 40 45 40 45 45 50 55 65 Mounting bolt M3 X 35 l X 40 l M3 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 45 l X 50 l M6 X 55 l X 60 l Mounting bolt M3 X 40 l X 45 l M3 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 45 l X 50 l M6 X 55 l X 65 l Model

Modular F.R.L. Unit

Nil Rc N Note 1) NPT Optional specifications F Note 2) G Applicable model AW20(K) to 40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K), 40(K) AW20(K) AW30(K), 40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K), 40(K) Description 0.02 to 0.2MPa setting Metal bowl Nylon bowl Metal bowl with level gauge With bowl guard Drain guide 1/4 Non-relieving type Flow direction: Right to left Drain cock with

High Vacuum Angle Valve, XL Series

Indicator: 6 High Vacuum Angle Valve Series XLA, XLAV Dimensions (mm) 1in = 25.4mm (b) XLA/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) Heater (optional) H B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 E Note 1) B 103 113 158 170 196 235 A 40 50 65 70 88 90 Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 12 11 11

Battery-less

As the connector cover dimensions are different, take the dimensions below into consideration during the design process. 40 40 65 24 40 40 40 24 An air cylinder with an auto switch cannot be installed in the shaded area. Battery-less absolute encoder connector cover dimensions 181 CE/UL-compliance List For CE/UL-compliant products, refer to the tables below and the following pages.

CA2

size (mm) 40 50 63 80 100 Stroke range up to 500 up to 600 up to 600 up to 750 up to 750 B B1 C A AL D E F G H H1 J K KA M MM N S S ZZ 156 169 180 214 225 ZZ 146 159 170 204 215 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 6 7 7 10 10 14 18 18 22 26 11 11 14

Best Pneumatics Vol. 14

Note 2) Drain guide is G 1/4 (applicable to AW30 to 40). 1 (4) AW20(K) to 40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K)/40(K) AW20(K) AW30(K)/40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K)/40(K) PPA 2 6 8 C J (5) AL N R W Port size Z (6) AW20(K) to 40(K) Body size Symbol Port size When more than one specification is required, indicate in ascending alphanumeric order.

SMC Pneumatic Clean Series

MM Relief port FX 20, 25 Eh8 D FZ I 20 to 32 Standard port Relief port Width across flats NA 4-FD 45 1.5 AL 32, 40 A F N K N S + Stroke FT H FY Z + Stroke ZZ + Stroke 40 (mm) 4 7 FD E 20-0.033 0 52 40 40 34 B FX FZ FY G FT 13 8 AL D K MM NA NN B1 B2 Bore size ZZ Z H H2 H1 S P N I F C2 A 66 60 60 60 75 75 75 11 8 8 8 40 32 25 20 24 22 22 18 50 45 45 41 8 8 8 6 6 5 22 17 17 13 41 32 32 26

A

Adjustable Air Cushion B O R E S I Z E 20 3/4 25 1 32 1 1/4 40 1 1/2 50 2 63 2 1/2 Stroke/inch S T R O K E Stroke/Hundredths of an inch S T R O K E STOCK STROKE LIST FOR ALL STYLES SERIES NCG S Y M B O L S R U B B E R C U S H I O N E D B O R E S I Z E S TA N D A R D S T O C K E D S T R O K E M A X I M U M S TA N D A R D S T R O K E 20 1, 2, 3, 4, 5, 6, 8 20 25 1, 2, 3, 4, 5, 6, 8, 10, 12

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CRQ2 Angle adjusting screw Angle adjusting screw Angle adjusting screw MSQ MRQ 0 A R R 9 n Dot ot gl e A e n at at v n io a o gl io io ct dj o e re u n n gr a st di dj ra ra in y g u g 20in n n e st di st g k g in re u e e g of dj ct a di of of io e re e n gl ct n g k A k io n e e n ra y y gr n gr io o o at o o ot v v R e e 9 9 0 0 The rotation range under the adjustment of an angle at 60

7

K 200 VAC 7 32A N.C. Q CAC408 35 32A Flange L 230 VAC E N.O. Conduit terminal M 24 VDC With surge voltage suppressor 8 40A N.C. R CAC408 40 40A Flange N 100 VAC F N.O. P 110 VAC 9 50A N.C. S CAC408 50 50A Flange Q 200 VAC G N.O.

ZP

N A B C D E M Y E N Y A B C D M Model Model ZPY20B--A10 ZPY40B-6-A14 51.5 12.4 25 23.5 33.5 20 22 16 62 24.4 48 40 43 34 44 10.5 ZPY25B--A10 ZPY50B-6-A14 50 53 38 48 66 32.4 57 19 52 15.6 28 24 34 25 27 ZPY32B--A10 32 34 29 39 57 18.9 37 14 Dimensions by Stroke Dimensions by Stroke 40 50 H Model F G F G Model 20 25 32 H 4 tube 6 tube ZPYB10-6-A14 74 142 78 146 F G F G F G J K L J K L ZPYB20

CL

92 115 128 144 16 20 20 25 30 36 36 40 42 50 59 76 92 100 112 118 27 32 32 37 37 47 47 53 40 50 55 65 80 90 90 90 60 70 86 102 116 145 161 182 32 40 40 52 52 59 59 59 43 43 43 9.0 9.0 11.5 13.5 13.5 19 19 19 112.5 121 133 141.5 150 167 Bore (mm) W/o rod boot W/ rod boot KA N H1 K MM GA FV J W M S M1 P GC GB e 36 45 45 60 60 75 75 75 f 16.5 16.0 16.0 18.0 18.0 40 40 40 h 59 66 66 80 81 133

Modular F.R.L. Unit

Min. clearance for maintenance 25 A AFD30, 40, 40-06 L Bracket (accessory) D A G F K M J C 40 B E IN OUT H OUT Port size P Drain Min. clearance for maintenance With compact auto drain (N.C.)

JIS Standard Hydraulic Cylinder

x 0.8 K B +0.1 0 40 31.5 145 115 45 60 M24 x 1.5 40 30 M6 x 1.0 C-series A CHS +0.1 0 40 31.5 145 115 45 60 M30 x 1.5 50 30 M6 x 1.0 +0.1 0 50 40 185 145 57 79 M39 x 1.5 63 40 M8 x 1.25 CH2 CH2 Double knuckle joint CHA Material: Cast iron Bore size (mm) Rod series 2 x P keeper plate mounting screw J P H A B C D d K L L1 E Part no.

Electric Actuator/Slider Type

16 6 40 46 25 9.5 48 57.5 32 16 63 79 40 0 68 68 Step motor, Stroke: 300 mm Step motor Top surface of table and motor are level.