MY1 40 20 14 15.5 19 to 600 32 75 18 104.5 58.5 63 1/4 12 45 17.5 35 27 11 75 134.5 56.5 14 20 40 20 14 16.5 23 to 600 32 90 18 119.5 68 80 1/4 18 45 22 40 32 13 95 169 72 22 30 60 25 20 19 33 to 750 37 102 22 150 81 100 1/4 20 55 25 40 41 16 114 189 89 22 30 60 30 20 19 37.5 to 750 37 116 26 170 96 Bore size (mm) N S U V T P J MM GR GE GF K L Q RR H VA W Z ZZ 32 27 154 13 6.5 34 1/8 10.5 M6
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
M10, L = 20 Refer to part no.
Wiring Specs 20 20 Applicable up to 20 Solenoid M A N I F O L D O P T I O N S PORT PLUGS Applicable Fitting Size d A L D Model 16 32 6 KQP-04 4mm 16 32 6 KQP-03 5/32 18 35 8 KQP-06 6mm 18 35 8 KQP-07 1/4 20.5 39 10 KQP-08 8mm 20.5 39 10 KQP-09 5/16 Inserts easily into an unused cylinder port and/or SUP/EXH Ports.
m (kg) Load weight m (kg) 20 20 20 20 20 20 16 16 16 16 16 16 1 1 12 12 12 12 12 12 0.5 10 20 30 31 50 100 101 300 200 0.5 10 20 30 31 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100
to 50 M N Bracket (See table below.) 4-O T Q 2-P AH AG B S W K U L AA AL AB A I J AI AJ 4-AK hole V AP R Y + Stroke Z + Stroke X AG For 4-AO AN AI Cutout window AM Mounting dimensions For standard strokes (mm) Bore size (mm) Stroke range (mm) O N M L K J I B AP AO AN AM AH AG AB AA AL AK AJ AI A 20 25 32 40 50 75, 100, 125, 150, 200 M6 x 1 depth 9 45 25 80 60 55 30 108 25 M6 115 65 125 112
Do not use in an environment with oil or chemicals. Consult with SMC if an auto switch will be used in an environment laden with coolant, cleaning solvent, various oils or chemicals.
There may be the case it will vary substantially depending on an ambient environment. (n 2) 2 20 + 55 D-A59W 30 (n = 2, 4, 6, 8 ) Note 1) (n 2) 2 20 + 40 D-Z7/Z80 20 (n = 2, 4, 6, 8 ) Note 1) D-A5/A6/A59W cannot be mounted to 40, 50. Note 1) When n is an odd number, an even number that is one larger than this odd number is used for the calculation.
L N P 3 4 40 47 77 25 33.5 48.5 66 74 110 36 45 63 35.5 40 57 VXF2150 VXF2160 VXF2280 32.5 38 49 20 20 23 30 30 35 23 23 25 113 127 162 103 118 152 33 37 28 1 1 1 2 4.1-94 VXF Conduit: C VXF2150, 2160 VXF2280 Conduit K 39 N 96 39 41 Model VXF2150 110 144.5 VXF2160 VXF2280 DIN connector: D VXF2150, 2160 VXF2280 DIN connector K 59 N 96 59 60 Q 45 110 144.5 Model VXF2150 45 48 VXF2160 VXF2280
PB (Plug) PA + Stroke H MA U X S Q C + Stroke B + Stroke NCA MC (RA) E+ Stroke A+ Stroke x 2 PW DSlide DB Bore size (mm) Standard stroke (mm) B C DA FA FB G GA GB H J L MA MM MT K MB A MC E GC HA Ball bushing 12 16 20 25 18 22 24 30 34 40 46 58 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 11 11 10.5 11.5 12.5 14 12 16.5 26 30 36 42 48 54 64 78 8 10 12 16 20 20 25 25 6 8 10 12 16 16 20 20
J Bore size (mm) Stroke range (mm) A AL B B1 C CDH10 CX D F H1 E I J K L LL D50 63 80 100 +0.070 0 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 35 35 40 40 12 16 20 25 83 83 84 85 98 100 105 110 7 7 11 11 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 18 18 20 20 11 11 13 16 10 10 14 14 40 40 52 52 20 20 25 30 52 64 78 92 27 27 32 41 70 85 102 116 Up to 600 Up to 600 Up to 750 Up to 750 18 25 31.5 35.5
J Bore size (mm) Stroke range (mm) A AL B B1 C CDH10 CX D F H1 E I J K L LL D50 63 80 100 +0.070 0 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 35 35 40 40 12 16 20 25 83 83 84 85 98 100 105 110 7 7 11 11 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 18 18 20 20 11 11 13 16 10 10 14 14 40 40 52 52 20 20 25 30 52 64 78 92 27 27 32 41 70 85 102 116 Up to 600 Up to 600 Up to 750 Up to 750 18 25 31.5 35.5
K 11 9 6.5 J H H J 15 (mm) Conduit Faston type Dimensions Size Port size A B B1 C D E F P H J Q R Q R K N 1 1/8 1/8 1/4 3/8 1/8 1/4 3/8 14 14 19 22 14 19 22 30 30 40 48 30 40 48 15 15 20 24 15 20 24 62.5 73.5 72 75 78 76.5 79.5 30 35 35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9 14 15 15 22.2 19 15 22.2 19 18 18 22.2 20.6 18 22.2 20.6 6.4 6.4 7.6 6 6.4 7.6 6 47.5 50 50 50 52.5
ZZ (NN1) x H G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN-M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA
0 18 0.1 0.3 20 40 10 95 17 27 59 13 12 11 63 Up to 600 20 to 600 35 32 86 27 115 1/4 1/4 64 16 +0.070 0 25 0.1 0.3 20 40 10 102 17 26 67 18 15 11 80 Up to 750 20 to 750 40 37 102 32 129 1/4 1/4 78 20 +0.084 0 31.5 0.1 0.3 25 52 14 113 21 30 72 23 17 13 100 Up to 750 20 to 750 40 37 116 41 140 1/4 1/4 92 25 +0.084 0 35.5 0.1 0.3 30 52 14 124 21 31 76 25 19 16 Bore size [mm] J K KA L LZ MM
Standard Stroke Model Standard stroke (mm) 10, 20, 30, 40, 50 MXQ6 10, 20, 30, 40, 50, 75 MXQ8 10, 20, 30, 40, 50, 75, 100 MXQ12 10, 20, 30, 40, 50, 75, 100, 125 MXQ16 10, 20, 30, 40, 50, 75, 100, 125, 150 MXQ20 10, 20, 30, 40, 50, 75, 100, 125, 150 MXQ25 8-5-9 10 Series MXQ Theoretical Output IN OUT The dual rod ensures an output twice that of existing cylinders.
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
Lead 20: LEYG32A 30 30 20 20 0 0 0 200 600 1000 1400 1200 Speed [mm/s] 0 200 600 1000 1400 Speed [mm/s] 866 A Model Selection LEYG Series Motorless Type * These graphs show an example of when the standard motor is mounted.
25 REAH15, 20, 25 REAH15, 20, 25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25 High Precision Guide Type REAH 0.08 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.03 REAH25 0.02 0.06 0.02 0.04 0.01 0.01 0.02 Max.