5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

83503 Flat cable connector Socket: 20 pin MIL type with strain relief Complies with MIL-C-83503 Flat cable connector Socket: 10 pin MIL type with strain relief Complies with MIL-C-83503 D-sub connector Complies with MIL-C-24308 JIS-X-5101 Applicable connector Internal wiring +COM, COM Weight W (g) Note 3) n1: Stations n2: Number of supply/exhaust blocks m : Weight of DIN rail W = 3.2n1 +

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra

XLAQ/XLDQ

Example) -M9NL Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

PF-OMM0004_C

P2dH n2dH P2dL n2dL P2AH n2AH P2AL n2AL P2L/n2L P2H/n2H H2 (38 ) tnL/tPL tnH/tPH Ht (40 ) P_2/n_2 H_2 (38 ) tn/tP H_t (40 ) (39 ) 4. [F 2] OUT2 -36No.PF-OMM0004-D 1. [F 2] [oUt2] OUT2 [-] 2. ON-OFF -37No.PF-OMM0004-D 3. a. ([n_2]) 4. [F 2] OUT2 b. ([n2L]) [P2H] or [n2H] ([n2H]) 4. [F 2] OUT2 -38No.PF-OMM0004-D c.

Flow Control Equipment

Speed exhaust controller Option None P The effective area is two times larger With spatter cover C Body size than that of speed controller. Hexagonal lock nut K M3 M5 1/8 1/4 3/8 1 2 3 4 5 Note) Option should be indicated in order of C and K. Only available for ASV310F,410F and 510F.

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D0I/$[E lln fiee|ficrilotr ltr tdts ltU ||UT & $lt tmwoil fi[hry 1200 psi (8.3 Mpa) Proof Pressur 450 psi (3.1 Mpa) -40.F 200'F G40'C 93'C) 7 Ncm3/min, or less ANSUASME 1.20, 1-1983 (NPT thread) Applicable Tubing hftEllf,] elcmenfi mobrlNl SIVIC CorDoration of America has a policy of continual product dsvlopment and resrws rhe dgm to change diflEnsions or specilications without prior notilication

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

6 Using a pair of internal C-clip pliers, remove snap ring A. By pulling out MGF Black zinc chromated M/O bolt M/O spring !7 the piston rod while covering the rod cover port with your finger, packing Zinc chromated Steel wire !8 retainer B and rod seal C will come out. CY1 Stopper ring Zinc chromated Carbon steel !

17

D A B Side support B MY-SB 2 x J MY1B MY1B MY1H E A B MY1B C D MY1M (mm) MY1C A 61 70 87 B C D E F G H J Part no.

PFxx-OMP0001CN

[P_2][n_2][] [H_2][] [F 2] OUT2 500 L/min OUT1 -37No.PF-OMP0001CN-F b. () [P2L][n2L][] () [P2H][n2H][] [ H2][] [F 2] OUT2 500 L/min OUT1 -38No.PF-OMP0001CN-F c. 0999,999,999 3 (3) [P2.1][n2.1][] (3) [P2.2][n2.2][] (3) [P2.3][n2.3][] [F 2] OUT2 /OUT1 OUT1 -39No.PF-OMP0001CN-F d.

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

Output 3 goes ON if "C" is turned ON, only when output 1 and output 2 are in an ON state. If either "A" or "B" is OFF , output 3 does not go ON even if "C" is turned ON.

Shuttle Valve/AND Valve with One-Touch Fittings

Output 3 goes ON if "C" is turned ON, only when output 1 and output 2 are in an ON state. If either "A" or "B" is OFF, output 3 does not go ON even if "C" is turned ON.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

0.2 0.1 0.2 C and b values are for controlled flow with the needle fully open and free flow with the needle fully closed.

Speed Controller with

Controlled flow 0.2 0.3 0.4 0.2 0.2 0.3 0.1 0.2 0.1 0.2 C and b values are for controlled flow with the needle fully open and free flow with the needle fully closed.

Stainless Steel One-touch Fittings Series KG

(mm) Weight (g) H2 (Hex.)

KR

Bulkhead Connector: KGE Effective area (1) (mm 2) H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available

High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available

High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available

The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available

Miniature Fittings M3, R(PT) 1/8, M5 Series M

H2 (Hex.) Weight (g) L1 L2 L3 M d Part No. O.D.