SY

D side D B M C8 8 One-touch fitting 2 to 16 stations FU1 Fuji Electric Co., Ltd.

Table of Contents

D-A72/D-A73/D-A80 Band Mounting Style . D-A7xH/D-A80H Rail Mounting Style. D-A73C/D-A80C Rail Mounting Style . D-A5x/D-A6x Tie-rod Mounting Style. D-90/D-97 Direct Mounting Style . D-A90(V)/D-A93(V)/D-A96(V) Direct Mounting Style . D-90A/D-93A Direct Mounting Style . D-R73/D-R80 Direct Mounting Style. D-R73xC/D-R80xC Direct Mounting Style . 2-color Indication Type Reed Switch .

Series SV

D D D D D D 3 2 1 Stations D side How to Order Solenoid Valves SV 1 1 0 0 F 5 Note) Available with manifold block for station additions. Refer to pages 77 and 81.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

, D-R80, D-T79.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

, D-R80, D-T79.

SV

side D D D D D D SS5V1-16S3AD-06B-C61 set (manifold part no.)

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Auto Switch Mounting Height (mm) Auto switch model Band mounting D-C7m/C80 D-H7m/H7mW D-H7NF D-H7BA D-M9mV D-M9mWV D-M9mAV D-A9mV D-M9m D-M9mW D-M9mA D-A9m D-C73C D-C80C D-H7C D-A7m D-A80 Hs Hs Hs Hs Hs Hs Bore size 10 17 18 17 19.5 20 16.5 16 20.5 21 20.5 23 23.5 19.5 (mm) Auto switch model Rail mounting D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-A9m D-A9mV D-A7mH/A80H D-F7m/J79 D-F7mW

High Vacuum Angle Valve

D-G

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D-B5/B6, D-B59W, D-A3/A44 Band mounting Reed switch Tie rod mounting D-A5/A6, D-A59W, D-A3C/A44C D-G5/K59, D-G5NTL, D-G5W/K59W D-G5BAL, D-G59F, D-G39/K39 D-F5/J5, D-F5NTL, D-F5W/J59W D-F5BAL, D-F59F, D-G39C/K39C D-H7, D-H7W, D-H7F, D-H7BAL, D-H7C, D-G5NTL, D-G39A/K39A Band mounting Solid state switch Tie rod mounting 3.4-1 Series CB Prior to Use Precautions Be sure to read before handling

SX

M Special specifications Mixed M D D side In the case of mixed specifications (M), indicate separately on the manifold specification sheet.

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Rotary Table/

D. (mm) I. D.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

points (type SJ1) 16 output points 8 output points (type SJ2) b) Crossover wiring (sensor link system) a) T type multidrop wiring (S-LINK system) DG DG 24V 0V 24V 0V Power supply{ 24V 0V D G D G 24V 0V Power supply{ 24V 0V D G D G 24V 0V 24V 0V Power supply{ 24V 0V Power supply{ G D 0V 24V G D 0V 24V G D 0V 24V G D 0V 24V Transmission line Transmission line Black White Brown Blue Crimped

PF-OMM0004_C

[F 1] OUT1 -28No.PF-OMM0004-D 1. [F 1] [oUt1] 2. ON-OFF -29No.PF-OMM0004-D 3. a. ([n_1]) (33 ) b. ([n1L]) [P1H] or [n1H] ([n1H]) (33 ) -30No.PF-OMM0004-D c. / -31No.PF-OMM0004-D ( [n1AH]) ( [n1dH]) 3 1 3 6 6 1 6 3 1 1 -32No.PF-OMM0004-D 4. OUT1 5. [F 1] OUT1 -33No.PF-OMM0004-D -34No.PF-OMM0004-D -35No.PF-OMM0004-D [F 2] OUT2 OUT2 OUT1 1.

SZ3000

line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V The above is the example of using dedicated S-LINK flat ribbon cable SL-RCM00. 24 V 0 V Power supply { 24 V 0 V Power supply { DG DG 1-3-35 36 Series

Shock Absorbers and Rate Controls

(l|odel) D!nping Dire(tion ADA'05 I , ( o r I o n d C .9S ,l 2,500 1,500 1.100,0!0 9.35 7.10 ADATI (l l ( o r T o n d ( .98 4 2,500 2,500 1,400,000 4.4 13.35 9.10 ADATI5 l ( o r l o n d ( .9S 6 2.500 2,500 1,800,000 5.1 17.35 .l0 ADA72O l ( o r l u n d ( .98 I ?,500 2,500 2.100,000 ?

KR

M H Branch Union Elbow: KGLU D Applicable tubing O.D.

C95Series

I' SU tl}El absorber : Sign : Red Green: Red: D-A56 .,,'""pan" \ . position D-F59 D-F5PW D-F59F Solid State Type Internal Circuit D-J59W D-F5P D-F5LF ~~ e Black D-F58A D-J59 D-F5NT AIIID SWitches Series C95 Suppon b racketexceptcenter tll.llYioo Center trunnion , Minimum Allowable Stroke When Mounting Auto Switches .. .

17

Confirm the Coordinates and Moments in Model Selection on page 1229 for details of floating Y and Z axes. 1196 MY1B Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at Stroke End) MY1B (Basic type) 25 to 40 Auto Switch Proper Mounting Position (mm) D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV Auto switch model D-A9 D-A9V A A Bore size A 25 32 40 79 83 112.5 116.5 133.5

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Size: 10 to 200 B A Magnet Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch Lm Reed switch Solid state switch D-M9 D-M9V, D-F9W, D-F9WV, D-F9BAL D-A9, D-A9V Rotation Size Operating angle m Operating angle m Operating angle m Hysteresis angle A Hysteresis angle Hysteresis angle A B B B A 10 10 10 10 10 10 10 90 80 65 50 45