MQQ

J DBore size (mm) Foot (1) Double clevis (with pin) (2) T-bracket Flange Single clevis 6 CJ-T010B CJK-L016B CJK-F016B -X 10 16 CJ-T016B CLJ-L016B CLJ-F016B 2020 CM-L020B CM-F020B CM-D020B CM-C020B 25 CM-L032B CM-F032B CM-D032B CM-C032B Data Note 1) 2 foot brackets and 1 mounting nut are attached. Note 2) Clevis pin and snap ring are included in package.

Table of Contents

Selector Divider Vacuum pad (1) Cylinder exhaust valve Tightness of Valve (Leak rate) Application example Fluid Air Liquid Non-leak (3) Vacuum Steam Seal material Energizing pressure NBR, FPM EPR 1 cm 3/min or less 0.1 cm 3/min or less(1) 10 6 Pa m3/s or less Energizing exhaust 5 cm 3/min or less (1) 50 cm 3/min or less(2) 150 cm 3/min or less(1) PTFE Differs depending on the operating

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5501 VQ5500 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts list Description Material Note No. 1

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Specifications None With SUP blocking plate With EXH blocking plate With SUP/EXH blocking plate Port plug (A port) Port plug (B port) Symbol Nil P R Type of actuation Symbol 1 2 3 Note) 2 position double 2 position double (latching) 3 position closed center 3 position exhaust center PR 4 Note) A B 5 Note) 3 position pressure center D side U side Stations Note) The 3 position type uses two

Cylinder with Lock Series CNS

Lock Specifications Locking Spring locking (exhaust locking) 0.25MPa {2.5kgf/cm} or more Unlocking pressure 0.20MPa {2.0kgf/cm} or less Locking pressure 0.25 to 0.7MPa {2.5 to 7.1kgf/cm} Maximum operating pressure Locking direction Both directions Maximum Stroke Table/Numbers inside ( ) are for steel tubing.

Cylinder with Lock Series CLS

(Example) CDLSL140-100 3 wire (NPN equiv.)

LFE-OMZ0012

Remarks Weight Lead wire and M12 connector LFE-1-A3 Lead wire length: 3 m Approx. 175 g LFE-1-D Tapping screw 3 x 10, 4 pcs. Approx. 45 g Bracket LFE-2-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs.

Cylinder with Lock Series MNB

Ball retainer Brake shoe Brake spring Brake shoe holder Taper ring Air pressure exhaust Air pressure supply Lock switch lever Brake piston Locked condition Unlocked condition 3 Cylinder with Lock Double Acting: Single Rod Series MNB Construction #3 $9 !3!4@3 #5 t @7 $5!5@4 !8@0!7 !9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !

NCQ8

/8 3 3-1/4 3-1/2 3-3/4 4 4-1/2 5 5-1/2 6 1/4-20UNC -2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/8 3-1/4 3-1/2 3-3/4 4 4-1/4 4-3/4 5-1/4 5-3/4 6-1/4 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-3/4 3 3-1/4 3-1/2 4 4-1/2 5 5-1/2 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-3/4 3 3-1/4 3-1/2 4 4-1/2 5 5-1/2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/8 5-7/8 2-1/8 2-1/4 2-3/8 2

Table of Contents

(Refer to page 13-3-37.)

0.4

(Not applicable to Gateway unit) VQ7 Connector type manifold Connector wiring diagram (Mixed wiring) 6 A 4 A 3 A 1 A 5 B 2 B Output The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing manifold configuration. 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 5 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 5 6 7 8 9 10 All kits use multi-pin

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

Bore size (mm) Foot Note 1) Double clevis (with pin) Note 2) T-bracket Note 3) Flange Single clevis 6 CJK-L016B CJ-T010B CJK-F016B 10 16 CLJ-L016B CJ-T016B CLJ-F016B 20 CM-L020B CM-F020B CM-D020B CM-C020B 25 CM-L032B CM-F032B CM-D032B CM-C032B Note 1) Two foot brackets and one mounting nut are included. Note 2) Clevis pin and snap ring are included in package.

5 Port Solenoid Valve, Series VQC

Values for double types are when the switch is ON. 1 5 3 N.C. N.C. 4-position dual 3-port valve (B) 4 2 1 5 3 N.O. N.O. 4-position dual 3-port valve (C) 4 2 1 5 3 N.C.

VQ5000

(Stations 3 and 4) VQ5300-5 1 set Valve part no. (Station 5) 1 2 3 4 5 6 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 3 position double check Manual override Prefix the asterisk to the part nos. of the solenoid valve, etc.

1

Bore size (mm) Description 20 25 32 40 CM-L020B-XB12 CM-L040B-XB12 Foot (1) CM-L032B-XB12 CM-F020B-XB12 CM-F040B-XB12 Flange CM-F032B-XB12 SN-020BSUS SN-040BSUS Mounting nut SN-032BSUS NT-02SUS NT-04SUS Rod end nut NT-03SUS Single knuckle joint I-020B-XB12 I-040B-XB12 I-032B-XB12 Double knuckle (2) joint Y-020B-XB12 Y-040B-XB12 Y-032B-XB12 Pin for double (3) knuckle joint CDP-3-XC27 CDP-1

IDX-OM-W020

i-2-3 . i-3 i-2-4 . i-3 i-2-5 . i-3 i-2-6 . i-4 i-2-7 . i-5 i-2-8 . i-6 i-2-9 . i-6 i-3 . i-7 i-4 / . i-8 1 1-1 . 1-1 2-1 . 2-1 2-2 . 2-2 2-2-1 . 2-2 2-2-2 . 2-3 2-2-3 . 2-3 2-2-4 . 2-3 2-2-5 . 2-4 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 5 . 5-1 IDFB Series 1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-3

Serial Transmission System Series EX250 Series EX500

Input block type (Fill out for I/O unit only) Ports 2, 4 size (metric) Nil Without input block M12: 2 inputs M12: 4 inputs M8: 4 inputs (3-pin) Ports 2, 4 Symbol C8 C10 C12 02 03 B CM 1 2 3 Ports 1, 3, 5 8 One-touch fitting 10 One-touch fitting 12 One-touch fitting 1/4 3/8 Bottom ported Rc 1/4 Mixed Input block (Fill out for I/O unit only) 1: 1/2 3, 5: 3/4 Nil Without SI unit/input block

HRL

Even if the water quality standards are met, complete prevention of corrosion is not guaranteed. 3. When deionized water is used, the electric conductivity should be 1 S/cm or higher (Electric resistivity: 1 MWcm or lower). 3. This product is installed with a breaker with the following operating characteristics.

LFE-OMY0008

HYS WIN ACCUMU PLS 2. 2. 2. 2. 1_P/1_N(29 ) 3. 3. 3. 3. Add/dEC P1AH/n2AH P1dH/n1dH (31 ) P1L/n1L P1H/n1H/H1 (30 ) P_1/n_1/H_1 (30 ) 4. 4. 4. 4. SoG/SoR/REd/GRN(33 ) 5. 5. 5. 5. [F 1] OUT1 28 No.LFE*-OMY0008 1. 1. 1. 1. [F 1] [oUt1] 30 () 2. 2. 2. 2. (ON-OFF ) 29 No.LFE*-OMY0008 3. 3. 3. 3. a. ([n_1]) (33 ) b.

IDX-OM-W093

. *2) JIS B8370 URLhttp://www.smcworld.com/ IDX-OM-W093 1 . 1-1 1.1 . 1-1 1.1.1 . 1-1 1.2 . 1-2 1.2.1 . 1-2 1.2.2 . 1-2 1.2.3 . 1-2 1.2.4 . 1-3 1.2.5 . 1-4 1.2.6 . 1-5 1.3 . 1-6 1.4 / . 1-7 2 . 2-1 2.1 . 2-1 3 . 3-1 3.1 . 3-1 3.2 . 3-2 3.2.1 . 3-2 3.2.2 . 3-2 3.2.3 . 3-3 3.2.4 . 3-4 3.2.5 . 3-5 3.3 . 3-7 4 / . 4-1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5