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www.stevenengineering.com I FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT REQUEST CATALOG REFERENCE E201, E505 & N372 3.3 FLOW CONTROL EQUIPMENT FLOW CONTROL VALVES Weight H D1 L1 M Applicable T *A D2 L2 L3 L4 L5 D3 Model Elbow Type Tube OD d mm Uni Thread (Metric) g Max Min Max Min D I M E N S I O N S ( M M) AS S E R I E S W I T H O N E T O U C H F I T T I N G S U N I V E R S A L T Y P E

(mm) Model N L1 L2 Port B Min. bore Weight (g) L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KRM11-06-10-10 KRM11-06-10-6 76 10 6 6 10 29 47 19.5 31.5 21.5 31 13 13.5 17 21 7.5 10 102 6 85 10 116 41 39 55 73 KRM11-08-12-10 KRM11-08-12-6 8 12 11.5 22.5 35.5 24 34.5 15.5 14.7 18.5 22 9 57 86 Dimensions: KRM12 2-connection thread 2-4.5 mounting hole N-applicable tubing O.D.

www.stevenengineering.com I 2.99 ANCILLARY VALVES SERIES ASP D I M E N S I O N S ( M M) S E R I E S ASP D I M E N S I O N S (I N C H) S E R I E S ASP L4 Max Min Weight g Model d T1 T2 H1 H2 D1 D2 D3 L1 L2 L3 L5 *A1 *A2 M 39.6 34.6 32 ASP330F-01-06S 6 R(PT)1/8 M5x0.8 12 8 11.6 14.2 11.8 14 38.4 22.9 39.5 35.2 10.5 13.7 38.9 33.9 35 ASP330F-01-08S 8 R(PT)1/8 M5x0.8 12 8 15.2 14.2 11.8 15.8

SY SYJ (L5) Plug assembly (L4) VK 2-4.5Mounting hole 1 2 3 VVQ100-12A(L3) 88 (8.5) L2 VZ 48.7 L1 VT VT (45) (35) 33 25 (5.5) VP 23.5 12.3 VG R11 Manual override 21.5 (Min. bending inner radius) (29.3) VP 104 VQ VQZ Stations 1 2 3 4 5 n Dside Uside VZ 2-M5 X 0.8(E port) VS 2-M5 X 0.8(P port) 42.9 A A 20 (8.5) 1.5 5 n-M5 X 0.8 (A port) 5 (7.5) 15 P=10 38 Equation: L1=10n+32 L2=10n+43

J 0.851 l5 tn 21.7 2.8 1.310 20 3t4 27.2 2.8 1.680 25 34.O 3.2 2.430 3? I v 4 3.5 3.380 40 I ltz 48.6 3.5 3.890 50 2 60.3 3.65 5.100 65 2 | n 76.1 3.65 6.510 75 3 88.9 4.05 8.470 100 114.3 45 12.100 Table 4.21 Pipe Size Specitication Stainless steel pipes Thse are primarily used when very large diameters in long straight main lines are required.

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: P (PNP Output), Unit Specification: M (Fixed SI Unit), Stations: 2, Cable Option: L (Right Angle), Bracket Option: B (Bracket), Control Unit: L5 (w/Control Unit, Supply Port: Left Side, With regulator, Round type pressure gauge; 0.4 MPa)

L1 L2 L3 L4 L5 L6 L7 (1) L8 D Model Bore size ASV AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 5 17 54.5 16 15.5 50 30 10 4.5 AK 1 4 1 4 2 x M4 x 0.7 11.5 17 56 51.5 40 5 23 20 30 4.5 Effective thread depth 6 Reference dimensions 8 3 45.5 5.25 20.6 61 13.2 68 56 25 26 5.5 VCHC Note 1) L7: Reference dimensions Dimensions: AS5000 ASR ASQ 2 x 1/4 to 1/2 2-1/4 to 1/2 74.9 (Max. 82.9)

53 5 50 19. 295 <7 5 7S.5 6'l5 7.5 3.8 . . 1 012 12 22 13 15 12 22 38 ~ 64 3 1.7 N4( fS:)145 5 1.8 38 20 68 25 64 3 1.8 38.5 64.S 3.5 1.2 ~ i 1 65 7 2.5 ZPY10D 10 12 15 25 . Deep type Imml Neili ) 165 7 2.5 16 18 1 2.5 22.5 Deep type . . ' Model lA, . . fiB C 0 I Model H :M6Xl H:M8xl flA fiB C 0 E .F I G F I G .. y . Imml :M5xo.

Lead wire length) Insulation: Red (+) Insulation: Black () 0.3 mm2 4.1 41.7 39 (78.8) Cable type (TT) 52-SY7240 (R) -TT02 03 Max.10 L 191.2 (Lead wire length) Lead wire marking No.1 (+), No.2 () 5.9 0.75 mm2 (95.6) 18 ATEX Compliant Base Mounted Type Series 52-SY7000 Dimensions 3-position closed centre/exhaust centre/pressure centre L plug connector (L) 21 22.5 13.5 3 02 03 52-SY7440 (R) -L5

Description AQ2000 AQ3000 AQ5000 AQ1500 AQ1510 Valve 30093 NBR 30073 30053 30063 30083 r O-ring 9 x 7 x 1 JIS B 2401P-7 NBR CA40-1601 CA50-1602 30066 t Dimensions AQ1500/1510 AQ2000/3000/5000 3-port size (Mounting hole) 3-port size L1 L2 L3 L4 L5 L6 L7 L8 L9 D L1 L2 L3 L4 Model Port size AQ2000 Model Port size 1 8 1 4 M5 x 0.8 AQ1500 23 20 14 3 12.5 12 15 5.5 6.5 3.1 45 40 10 45 , 3 8 1 4

L1 L2 L3 L4 L5 L6 L7 (1) L8 D Model Bore size VCHC AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 5 17 54.5 16 15.5 50 30 10 4.5 ASS 1 4 1 4 2 x M4 x 0.7 11.5 17 56 51.5 40 5 23 20 30 4.5 Effective thread depth 6 Reference dimensions 8 3 45.5 5.25 20.6 61 13.2 68 56 25 26 5.5 ASR ASQ Note 1) L7: Reference dimensions Dimensions: AS5000 2 x 1/4 to 1/2 2-1/4 to 1/2 74.9 (Max. 82.9) 2

Please contact us for the latest version.sales@ocaire.com, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, L5, 32MM BORE LE CLEAN-ROOM, .00000 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Note 3) Max. speed [mm/s]Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Lead [mm]Impact/Vibration

Please contact us for the latest version.sales@ocaire.com, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, L5, 32MM BORE LE CLEAN-ROOM, .00000 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Note 3) Max. speed [mm/s]Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Lead [mm]Impact/Vibration

is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN rail type, ACTUATOR, ELECTRIC, CL RM, ACTUATOR, ELECTRIC ACTUATOR, L5

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: C (Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm), Output Specifications: P (PNP Output), Unit Specification: M (Fixed SI Unit), Stations: 6, Cable Option: Straight, Bracket Option: B (Bracket), Control Unit: L5 (w/Control Unit, Supply Port:

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: C (Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm), Output Specifications: P (PNP Output), Unit Specification: w/Unit Conversion Function, Stations: 1, Cable Option: Straight, Bracket Option: B (Bracket), Control Unit: L5 (w/Control Unit, Supply

Rated Distance Range: G (0.02 to 0.15mm), Piping Specifications: C (Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm), Output Specifications: P (PNP Output), Unit Specification: M (Fixed SI Unit), Stations: 3, Cable Option: Straight, Bracket Option: B (Bracket), Control Unit: L5 (w/Control Unit, Supply Port:

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: C (Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm), Output Specifications: N (NPN Output), Unit Specification: M (Fixed SI Unit), Stations: 2, Cable Option: L (Right Angle), Bracket Option: B (Bracket), Control Unit: L5 (w/Control Unit, Supply

Rated Distance Range: G (0.02 to 0.15mm), Piping Specifications: C (Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm), Output Specifications: N (NPN Output), Unit Specification: w/Unit Conversion Function, Stations: 2, Cable Option: N (None), Bracket Option: B (Bracket), Control Unit: L5 (w/Control Unit, Supply

Rated Distance Range: G (0.02 to 0.15mm), Piping Specifications: C (Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm), Output Specifications: N (NPN Output), Unit Specification: w/Unit Conversion Function, Stations: 4, Cable Option: N (None), Bracket Option: B (Bracket), Control Unit: L5 (w/Control Unit, Supply