ZP

14 17 8 Buffer assembly part no.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

L Calculation example) T1 to T4 can be calculated as follows. Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], Time [s] T3 = V/a2 = 300/3000 = 0.1 [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1 T2 T3 T4 T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

Vacuum Pad

14 17 8 Buffer assembly part no.

42

Valve + Release valve spacer (VVQ4000-24A1 5 D) q AXT632-17-10 (M3 x 62) 3 For manifold w AXT632-17-19 (M3 x 26) 2 Valve Spacer Valve + SUP stop valve spacer (VVQ4000-37A1 5 ) q AXT632-17-10 (M3 x 62) 3 1 w AXT632-17-19 (M3 x 26) 2 Not necessary when mounting the sub-plate.

CATALOG

1/8 KQL10-01S 17 18.5 17 26.5 27 32 21 21.6/14.9 25 10 1/4 KQL10-02S 17 18.5 17 26.5 30 33 21 35.2/25.0 26 10 3/8 KQL10-03S 17 18.5 17 26.5 32 34.5 21 35.2/25.0 36 10 1/2 KQL10-04S 22 18.5 17 26.5 36 37 21 35.2/25.0 63 12 1/4 KQL12-02S 17 20.9 17 28.5 31 35.5 22 50.2/39.7 28 12 3/8 KQL12-03S 17 20.9 17 28.5 33 37 22 50.2/39.7 38 12 1/2 KQL12-04S 22 20.9 17 28.5 37 39.5 22 50.2/39.7 65 16

Table of Contents

Average suction flow rate V x 60 T1 V x 60 T1 Q = Q = + QL T2 = 3 x T1 T2 = 3 x T1 Q : Average suction flow rate /min (ANR) V : Piping capacity () T1 : Arrival time to stable Pv 63% after adsorption (sec.) T2 : Arrival time to stable Pv 95% after adsorption (sec.) QL : Leakage at work adsorption /min (ANR) 2.

High Vacuum Angle Valve

For details, refer to Common Option [2] Mounting position of the heater on page 17.

Thermo-chiller/Rack Mount Type

[A] 2.5/3.0 For Option T1 4.3/4.7 Rated power consumption (50/60 Hz)17 [kW (kVA)] 0.48/0.60 (0.51/0.61) For Option T1 0.73/0.80 (0.85/0.94) Communication function Contact input/output, Serial RS-485/RS-232C Noise level (50/60 Hz)9 [dB(A)] 59/59 Dimensions*10 [mm] W 483 x D 550 x H 221 Accessories18 Power supply connector, Operation manual, Particle filter element*19 Weight11 [kg] 29 1 No

Title not found

Typ. 7/8 1 5/64 5 8 Hex 3/8 1 3/32 1 7/16 5/8 7/8 11/16 40 1/8 T2 1/2 1/8 T2 1/8 T4 1/8 T6 1/8 T3 1/8 T1 1/8 T5 1/8 T8 1/8 T4-90 1 1/16 Note: Reducing Tees available with other barb combinations #1 7/8 17 32 7 16 7 16 Hex Typ. 27 32 #3 1 3/32 3/4 3/8 Typ. 7/8 9 16 7 16 #2 #4 27/32 3/4 41 1/8 T2 x 3 1/8 RT3 x 1 1/8 T3 x 3 1/8 T1 x 3 1/8 T4 x 3 1/8 RT4 x 2 7/16 7/16 17/32 9/16 19/32

Stability of suction position,

ZP3EA-PT2-B8 [Weight: 14 g] ZP3EA-PT2-B10 [Weight: 12.6 g] A 17 Width across flats 14 A 17 Width across flats 14 8 17 8 17 B B 1 1 23.5 31.6 Applicable pad part no. ZP3E-32UM ZP3E-40UM ZP3E-32BM ZP3E-40BM Dimensions Dimensions Part no. A B ZP3EA-PT1-B8 M8 x 1.25 9.5 ZP3EA-PT1-B10 M10 x 1.5 13 Part no. A B ZP3EA-PT2-B8 M8 x 1.25 9.5 ZP3EA-PT2-B10 M10 x 1.5 13 Applicable pad part no.

Fluoropolymer Piping Equipment

LQ1T21-ST1-R39 6 Body size 3 6 5 20 20 9 18 17 17 17 36.5 41.1 36.5 23 23 23 3.6 LQ1T21-ST2-R41 Body size 3 6 6 20 41.1 36.5 LQ1T32-ST1-R37 8 Body size 3 8 5 20 20 9 18 17 17 17 36.5 41.1 36.5 23 23 23 5.5 LQ1T32-ST2-R40 Body size 3 8 8 20 41.1 36.5 LQ1T41-ST1-R1 12 Body size 3 12 24 24 21 17 21 34 41.5 34 28 23 28 5.8 LQ1T41-ST1-R37 12 Body size 5 12 24 24 21 26 21 39.5 52.5

HRX-OM-X071

,T2Inverter pump 6.3.1 Option T1, T2Inverter pump With option T1 or T2, the pump output set value can be changed.

Integrated Controller

Calculation example) T1 to T4 can be calculated as follows. L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/10 = 0.03 [s], T3 = V/a2 = 300/10 = 0.03 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

1

flats 17 10 Polyacetal or hard steel roller T.T.

VQ5000

Note 2) Splash proof specification is not available for F and T1.

Table of Contents

3/16" 11.4 50 6.2 21.6 48.9 43.4 16.5 12.8 6 14 10 3.5 17 15.5 13 3.5 AS2001F-07-3 AS2051F-08-3 59.8 8.1 27 54.8 49.4 18 1/4" 13.2 52.2 7.1 22.5 49.8 44.3 17 8 15.2 AS2051F-05-3 AS3001F-06-3 59 7.4 31.3 60.1 54.7 17 3/16" 11.4 52.2 6.2 25.2 53 47.6 16.5 6 12.8 AS2051F-07-3 AS3001F-08-3 64.4 8.2 32.1 60.9 55.5 18 15.5 1/4" 13.2 54.4 7.1 26 53.8 48.4 17 15.2 8 3.5 17 13 21 18.5 16 3.5 AS2051F

SX

Connector block assembly (For 9 to 17 stations (T1) terminal block) t-6 SX5000-64-8A SX3000-64-8A M3 x 30 (Matt nickel plated) SX3000-22-2 (M2 x 24) SX5000-57-6 Round head combination screw y Gasket DIN rail SX3000-57-4 VZ1000-11-1u i Refer to page 1-6-77. Note) The numbers t1 to 4 are for 24 VDC. For 12 VDC, suffix -12V to the parts no.

SY

SS5Y34, #1 (#1 + #5 + #6 + #7 + #17) SS5Y3-45FU-B .

Electric Actuators

-02 Performance/Specifications General specifications LC5-1-T1-02 Part no.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

JOG and constant rate movement, return to origin, test drive and testing of forced output can be performed. 569 B LEC Series Teaching Box/LEC-T1 RoHS How to Order LEC T1 3 J G Enable switch (Option) Enable switch Teaching box Nil None S Equipped with enable switch Cable length [m] 3 3 Interlock switch for jog and test function Stop switch Initial language Stop switch J Japanese E English