Pressure Range: L (0~100kPa), Port Size: 01 (Single Unit Mounting R(PT) 1/8), Output Specification: 18 (NPN Open Collector 1 Output, w/Analog Output, 3 Rotation setting), Wiring Specification: L (Grommet Lead Wire 3m)

Pressure Range: L (0~100kPa), Port Size: 01 (Single Unit Mounting R(PT) 1/8), Output Specification: 16 (NPN Open Collector 2 Outputs, w/o Analog Output, 3 Rotation setting), Wiring Specification: C (Connector Style Lead Wire Length 0.6m)

Pressure Range: L (0~100kPa), Port Size: 01 (Single Unit Mounting R(PT) 1/8), Output Specification: 19 (NPN Open Collector 1 Output, w/Analog Output, 200° Setting), Wiring Specification: L (Grommet Lead Wire 3m)

Supply Unit: W (Flow Adjustment Valve + Stop Valve), Rated Flow Range: 20 (2~16L/min), Thread: Rc, Port Size: 04 (1/2)

Flow Switch Type: 5 (Remote Sensor Unit), Rated Flow Range: 20 (2~16L/min), Return Unit: None, Thread: N (NPT), Port Size: 04 (1/2), Flow Switch Output: 1T (Remote Sensor Unit; Out 1: Analog 1 to 5 V; Out 2: Flow Rate: None, Temp. Analog 1 to 5 V; Temperature Sensor: Yes)

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment S ZZ SS 38 16 14 2-6.9 through 8 30 1 M10 x 1.5 x 8L 2-11 counter bore depth 6.3 36 Z (Hexagon socket head cap bolt) 1 750.2 750.2 76 44 96 98 6.3 5 16 18 M8 x 1.25 x 23L and M8 x 1.25 2-M6 x 1 (Through-hole) 2-M5 x 0.8 thread depth 8 (Hexagon bolt)(Hexagon nut) M8 x 1.25 x 16L

High Vacuum Angle Valve

Example) XLAV-16L-2M9NA-1G-XAN1A *1 Produced by Mitsubishi Cable Industries, Ltd. * With solenoid valve: Option specifications/Combinations This model has indicator, auto switch, and K (DN) flange options, but hightemperature/heater options are not available. * Solenoid valves XLAV-16, 25, 40, 50: SYJ319, XLAV-63, 80: SYJ519 Example) SYJ319-1GS, etc.

High Vacuum Angle Valve

Example) XLAV-16L-2M9NA-1G-XAN1A *1 Produced by Mitsubishi Cable Industries, Ltd. * With solenoid valve: Option specifications/Combinations This model has indicator, auto switch, and K (DN) flange options, but hightemperature/heater options are not available. * Solenoid valves XLAV-16, 25, 40, 50: SYJ319, XLAV-63, 80: SYJ519 Example) SYJ319-1GS, etc.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

range (mm) D-X Shock Absorber Specifications Piston Speed 63 16 25 40 Bore size (mm) RB 2015 RB 2725 RB 0806 RB 1007 RB 1412 20Model 80 to 500 mm/s Without stroke adjusting unit (MY3A) 2.4 10.1 0.84 29.8 46.6 Max. energy absorption (J) 80 to 1000 mm/s 80 to 1000 mm/s Without stroke adjusting unit (MY3B) Data 6 7 12 15 25 Stroke absorption (mm) Stroke adjusting unit (L and H unit/MY3B) (16L

Supply Unit: P (Stop Valve), Rated Flow Range: 20 (2~16L/min), Thread: Rc, Port Size: 03 (3/8)

Supply Unit: None, Rated Flow Range: 20 (2~16L/min), Thread: N (NPT), Port Size: 03 (3/8)

Supply Unit: P (Stop Valve), Rated Flow Range: 20 (2~16L/min), Thread: F (G), Port Size: 04 (1/2)

Supply Unit: W (Flow Adjustment Valve + Stop Valve), Rated Flow Range: 20 (2~16L/min), Thread: N (NPT), Port Size: 04 (1/2)

Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 20 (2~16L/min), Return Unit: P (Stop Valve), Thread: Rc, Port Size: 03 (3/8), Flow Switch Output: CT (Integrated Display; Out 1: NPN; Out 2: (Analog 1 to 5 V) ⇔ Analog 1 to 5 V ; Temperature Sensor: Yes), Lead Wire: N (without Lead Wire), Flow Switch Unit: M (Integrated Display, IO-Link Campatible; Instantaneous Flow: L/min; Accumulated

Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 20 (2~16L/min), Return Unit: W (Flow Adjustment Valve + Stop Valve), Thread: Rc, Port Size: 03 (3/8), Flow Switch Output: L2 (Integrated Display IO-Link Compatible; Out 1: IO-Link/Switch Output (N/P); Out 2: Switch Output (N/P) ; Temperature Sensor: None), Lead Wire: N (without Lead Wire), Flow Switch Unit: M (Integrated Display,

Flow Switch Type: 5 (Remote Sensor Unit), Rated Flow Range: 20 (2~16L/min), Return Unit: None, Thread: Rc, Port Size: 04 (1/2), Flow Switch Output: 2T (Remote Sensor Unit; Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None, Temp. Analog 4 to 20 mA; Temperature Sensor: Yes)

Flow Switch Type: 5 (Remote Sensor Unit), Rated Flow Range: 20 (2~16L/min), Return Unit: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Flow Switch Output: 2T (Remote Sensor Unit; Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None, Temp. Analog 4 to 20 mA; Temperature Sensor: Yes)

Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 20 (2~16L/min), Return Unit: W (Flow Adjustment Valve + Stop Valve), Thread: N (NPT), Port Size: 03 (3/8), Flow Switch Output: CT (Integrated Display; Out 1: NPN; Out 2: (Analog 1 to 5 V) ⇔ Analog 1 to 5 V ; Temperature Sensor: Yes), Lead Wire: N (without Lead Wire), Flow Switch Unit: G (Remote Sensor Unit; Instantaneous Flow:

Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 20 (2~16L/min), Return Unit: P (Stop Valve), Thread: N (NPT), Port Size: 04 (1/2), Flow Switch Output: E (Integrated Display; Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V, Temp.

Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 20 (2~16L/min), Return Unit: P (Stop Valve), Thread: N (NPT), Port Size: 03 (3/8), Flow Switch Output: E (Integrated Display; Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V, Temp.