Vacuum

Determine the mean suction flow: Q r = v x 6 o T1 9 9 0 . s : s : : P o o . g u o.z T 2 = 3 1 o 1 mean suction flow required from ejector (N/min), 0.1 0.2 0.3 0.5 0.7 1 2 3 | 5 7 10 20 30 50 70 100 O T1 i(sec) o1 adsorption response time to 63% to P, (sec), T1 adsorption response time to 95% of P" (sec), T2 1 l lncnnic System Specif ication (continued) 2.

I

-25 NPN output NPN open collector 30V, 80mA, residual voltage: 1V or less ZSE401 T1-26 Vacuum Analog output 1~5V (+ 5%F.S.), load impedance : 1k ZSE401 T1-65 PNP output PNP open collector 80mA ISE4L01 T1-25 Positive Pressure NPN output NPN open collector 30V, 80mA, residual voltage: 1V or less ISE4L01 T1-26 100kPa Analog output 1~5V (+ 5%F.S.), load impedance: 1k ISE4L01 T1-65 (14.5PSI) Type

ZSE2/ISE2

: NPTF 1/8 01: R 1/8 T1: NPTF 1/8 IF Data 16-6-13

Vacuum

Determine the mean suction flow: Q r = v x 6 o T1 9 9 0 . s : s : : P o o . g u o.z T 2 = 3 1 o 1 mean suction flow required from ejector (N/min), 0.1 0.2 0.3 0.5 0.7 1 2 3 | 5 7 10 20 30 50 70 100 O T1 i(sec) o1 adsorption response time to 63% to P, (sec), T1 adsorption response time to 95% of P" (sec), T2 1 l lncnnica System Specif ication (continued) 2.

Compact

T1 = V/a1 = 1000/2500 = 0.4 [s], T1 T2 T3 T4 11LEJS T3 = V/a2 = 1000/2500 = 0.4 [s] L: Stroke [mm](Operating condition) V: Speed [mm/s](Operating condition) a1: Acceleration [mm/s2](Operating condition) a2: Deceleration [mm/s2](Operating condition) T = T1 + T2 + T3 + T4 [s] L 0.5V(T1 + T3) V 25AT2 = T1: Acceleration time and T3: Deceleration time can be obtained by the following equation

Fluoropolymer Piping Equipment

Symbol Symbol Applicable tubing size (inch) 2 3 4 5 6 Fitting type Symbol T1 T2 T3 T4 Class No.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Time [s] Method 2: Calculation T1 T2 T3 T4 T5 T6 Cycle time T can be found from the following equation. L : Stroke [mm] V : Speed [mm/s] a1: Acceleration [mm/s2] a2: Deceleration [mm/s2] T = T1 + T2 + T3 + T4 [s] Calculation example) T1 to T4 can be calculated as follows. T1 and T3 can be obtained by the following equation.

Electric Actuators

-02 Performance/Specifications General specifications LC5-1-T1-02 Part no.

Table of Contents

Metric Size L4 Weight (g) AS A2 A1 M L3 L2 L1 d T1 D1 D2 H2 H1 Max.

SX

Connector block assembly (For 9 to 17 stations (T1) terminal block) t-6 SX5000-64-8A SX3000-64-8A M3 x 30 (Matt nickel plated) SX3000-22-2 (M2 x 24) SX5000-57-6 Round head combination screw y Gasket DIN rail SX3000-57-4 VZ1000-11-1u i Refer to page 1-6-77. Note) The numbers t1 to 4 are for 24 VDC. For 12 VDC, suffix -12V to the parts no.

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Calculation example) T1 to T4 can be calculated as follows. L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

Environment

L Speed: V [mm/s] Cycle time T can be found from the following equation. a1 a2 T = T1 + T2 + T3 + T4 [s] T1: Acceleration time and T3: Deceleration time can be obtained by the following equation. Time [s] T1 = V/a1 [s] T3 = V/a2 [s] T1 T2 T3 T4 T2: Constant speed time can be found from the following equation.

JXCx-OMT0034CN

STATION No (X10) 161 (x10) STATION No (X1) (x1) B RATE IF CC-Link F D C 10Mbps B 5Mbps A 2.5Mbps 230.4kbps 9 625kbps 8 156kbps 7 5 4 10Mbps 3 5Mbps 2 2.5Mbps 115.2kbps 1 625kbps 0 156kbps B RATE 1(LEC-T1)IF 115.2kbps 2 15 - 4.2 (CN2SW) CC-Link (CN2SW)CC-Link (CN2SW) () PC/TB (CN2)(LEC-T1-)(LEC-W2)(LEC) (CN2SW)CC-Link (LEC) 16 - 4.3 (LEC) (LEC)(LEC-T1-) (LEC-W2)(LEC) (LEC)(LEC)(

JXCx-OMT0032CN

)IF115.2kbps 2 4.2(CN2SW) TM (CN2SW) Deviceet TM(CN2SW) Deviceet () PC/TB(CN2)(LEC-T1-)(LEC-W2)(LEC) TM(LEC) (CN2SW)Deviceet 15 - 4.3(LEC) (LEC)(LEC-T1-) (LEC-W2)(LEC) (LEC)(LEC)(LEC-T1-) 4.3.1 ID 2(LEC)ID (LEC)IDID112 ID (LEC-W2) Normal Parameter Controller ID () Download (IDID ) 4.3.2 IF(LEC)(LEC-T1) IF115.2kbps (LEC-W2) Normal HELP-Password 16 - Para protectComm speed -1 Para protect

JXCx-OMT0028CN

-3G)(LEC-W2)(CN2SW)OFF (LEC-T1-3G)(LEC-W2) TB/PC (CN2) LED CN2 SW CN2STAT BUS STAT OFF (1) GW CN2 3m LEC-T1-3G (2) LEC-W2 USB CD GW 120.3 120.3 mm mm 200 200 mm/s mm/s USB 100 500 100 500 1 1 200 1000 200 1000 2 2 A-miniB type 50 200 50 200 3 3 CN2 CN2TB/PC 27 - 6.CN4 6.1 No.

VQ5000

IP65 compatible T1 S kit (With individual terminal blocks) kit (Serial transmission) Use as a guide for selection. Please confirm the actual conditions with SMC Sizing Program.

SY

(Max. 20 stations) Applies to 45T/T1 only. 24VDC only for type S.

HRL

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 70 x 4.186 x 103 x 4.0 60 = = qm x C x (T2 T1) 860 Q = = 19535 [J/s] 19535 [W] = 19.5 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 19.5 [kW] x 1.2 = 23.4 [kW] 1 x 70 x 60 x 1.0 x 103 x 4.0 860 = Thermo-chiller T1: Outlet temperature Q: Heat generation amount 1680 [cal/h] 860 Users equipment = T = T2 T1

Thermo-chiller

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 35 x 4.186 x 103 x 3.0 60 = = qm x C x (T2 T1) 860 Q = = 7325 [J/s] 7325 [W] = 7.3 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] 1 x 35 x 60 x 1.0 x 103 x 3.0 860 = Q: Heat generation T1: Outlet Thermo-chiller temperature amount Customer equipment T = T2 T1 7325 [W] = 7.3 [kW]