Vacuum System Peripherals:

Series M3, M5, R 1/8 A hose nipple that provides large holding force for tubing.

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL CV P PA PB PW Q 25, 50, 75, 100 71 58 1.5 1.5 11 8 8.5 9 M5 x 0.8 12 13 15 M5 x 0.8 4.3 5.6 5.6 M5 x 0.8 Rc 1/8 Rc 1/8 40 10 16 18 26 64 83 93 8 9.5 9.5 19 8 10 12 M4 M5 M5 4.5 5.5 5.5 8 10 10 15 18 21 5 6 6 15 18 21 30 36 42 22 24 30 16 20 25 78 62 10.5 M5 x 0.8 M5 x 0.8

CRQ2

(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Size 10 15 20 30 40 Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 (mm) Q1 Size 20 30 40 M3, M4 M3, M4,

Prevents Micro-Bubbles

Single type Suck back P P P VN A B A B Unit Single type Unit LVC Manifold (5 stations max.) LVA LVH A R P 3 port N.C. PA LVD N.C.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(H) M3X0.5 n ports trotes 8 3 P 10-32 Nom (M5)4 ports a c e l i o r l i r::i:i:l:::r.:.:r:r:::r:::r::r:r:::ri:i:r:rrr:,:i:t:irl:i:r:r:l r'rt: -,., ,.. L .

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(H) M3X0.5 n ports trotes 8 3 P 10-32 Nom (M5)4 ports a c e l i o r l i r::i:i:l:::r.:.:r:r:::r:::r::r:r:::ri:i:r:rrr:,:i:t:irl:i:r:r:l r'rt: -,., ,.. L .

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(H) M3X0.5 n ports trotes 8 3 P 10-32 Nom (M5)4 ports a c e l i o r l i r::i:i:l:::r.:.:r:r:::r:::r::r:r:::ri:i:r:rrr:,:i:t:irl:i:r:r:l r'rt: -,., ,.. L .

CG5-S

(mm) Connection threads Model KGY04-M5 -01 -02 KGY06-M5 -01 -02 -03 KGY08-01 -02 -03 KGY10-01 -02 -03 -04 KGY12-02 -03 -04 KGY16-03 -04 M5 x 0.8 4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 KGV04-M5 M5 x 0.8 4 -01 R 1/8 M5 x 0.8 KGV06-M5 M5 x 0.8 6 6 -01 R 1/8 <M5 type> <M5 type> -02 R 1/4 KGV08-01 R 1/8 8 8 -02 R 1/4 -03 R 3/8 KGV10

MG

T VB VA U X H PW 2-P(Rc, NPT, G) XAH7 depth 6 GA XAH7 depth 6 2-P (Rc, NPT, G) PB Q PA + Stroke GB J K S (Plug) FB FA C + Stroke B + Stroke E A + Stroke G For bore size 16, M5 x 0.8 is only available.

Stopper Cylinder

B + stroke R R O1 thread [mm] Bore size A B D E F G H J K L M N O P Q S T V X Y Z W Rc NPT G Rc NPT G 16 68 41.5 10 29 6 3 26.5 18 1.5 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 8 20 18 3.5 37 0 0 0 20 78 45 12 36 8 4 33 22 2 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 10 24 22 4 47 1.5 1.5 0 32 87 48 20 45 7.5 8 39 4.5 32 3 34 5.5 9 depth 7 1/8 1/8 1/8 20 18 36 20 8 14 40 105.5 52.5

CJ5-S

9.5 46 6 9 74 12 RB 16 15 18.3 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8 M12 x 1.0 12.5 9.5 47 6 9 75 18.3 J D-X 20Data 10-14-7 8 Series CJ5-S Dimensions R V Rod side flange style (F): CJ5FS CA Rod cover side Piping port 2-M5 x 0.8 Piping port M5 x 0.8 GB GA NN MM Cover surface BA 0 0.3 CB D FY FB 2-FC With head cover port in axial location (R) Mounting hole NB A FX FZ NA F FT BB

CJ5-S

RZQ R V Basic style (B): CG5BAS : With air cushion MI W S WA WB GA GB 2-P W 10 H1 Width across flats B1 CEP1 M BM CE1 Max.WH (E1) D CE2 B2 BZ MM AL A Plug bolt (4 pcs. included) ML2B K KA 8-J (F1) C 0.1 H S + Stroke ZZ + Stroke C J G5-S NA CV Stroke range A Bore size (mm) AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA P S MVGQ 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12

XL

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

CL

MLU E D P ML1C CLJ2D16D19 16 8 Silencer -X 12 2 20Head cover port in axial direction (R) 25.5 Data M5 x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking Lock nut Manual unlocking cam M5 x 0.8 unlocking port Unlocked when pressurized 5H9 +0.030 0 71 46 6 Clevis pin (5d9 ) 0.030 0.060 M5 x 0.8 Rod side cylinder port 31 M14 x 1.0 28 23 5 M5 x 0.8 Head side cylinder

High Vacuum Angle Valve, XL Series

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

CL

(mm) A A1 E1 L1 MM U1 NX NZ L R1 R Part No.

CL

MLU E D P ML1C CLJ2D16D19 16 8 Silencer -X 12 2 20Head cover port in axial direction (R) 25.5 Data M5 x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking Lock nut Manual unlocking cam M5 x 0.8 unlocking port Unlocked when pressurized 5H9 +0.030 0 71 46 6 Clevis pin (5d9 ) 0.030 0.060 M5 x 0.8 Rod side cylinder port 31 M14 x 1.0 28 23 5 M5 x 0.8 Head side cylinder

JIS Standard Hydraulic Cylinder

Material: Cast iron Bore size (mm) Rod series 2 x P keeper plate mounting screw J P H A B C D d K L L1 E Part no.

Air Slide Table

J I Pilot port 2 x M5 x 0.8 7 5H9 ( ) depth 2 +0.030 0 43 7.3 (Maximum screw-in depth) 5.5 38.6 +0.030 0 5H9 ( ) depth 2 3.3 (Minimum screw-in depth) B 30 42 60 3 72 36 B N x M5 x 0.812 F N 2 1 x F 29 Cross-sectional view B-B 2 x M5 x 0.8 thread depth 7 27 16 36 48 M 0.5 7 ZZ Z J I Bottom view of MXQ20A-50Z Pilot port 2 x M5 x 0.8 (Plug: Width across flats 7) G (NN 1) x H 5H9 ( ) depth

Compact 5-Port Solenoid Valve

For EX600/EX250 pp. 63, 77, 119 1 3 5 S6 S JJ5SY 10 G P, E port entry, SUP/EXH block assembly P, E port entry External pilot U side (2 to 10 stations) G D side (2 to 10 stations) H Both sides (2 to 24 stations) J How to Order Valves JSY T 0 0 5 1 R 3 5 R JSY 0 0 5 Coil type (See below.)