Flow Control Equipment

ASV How to Order AK 01 06 S AS 1 1F G 2 2 ASS Body size 1 2 3 4 Options M5 S None Sealant 1 8, 1 4 8 3 Applicable tube O.D.

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he Weat 01 s prvduCI duB lO !he use 01 !

Table of Contents

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

SFOD-OMT0005CN

<> (01-144) D RESET SVON <> <>(M24V) (01-145) RESET SVON D <> <> <> RESET SVON (01-146) D <> -65- <> <>(C24V) RESET SVON (01-147) D <> <> <> (01-148) RESET SVON D <> <> (01-149) D RESET SVON <> () Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVONON) (01-193) E <>ON(SVON ON) <> Output current limit is exceeded set value (

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Mechanical Valves Series NVM, NVFM, NVZNI

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

IIIIIII

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

Table of Contents

T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

HRX-OM-X071

AL.01 to AL.32 D.OUT1 ALARM CODE No.15 screen Contact output signal 1 maintenance MT.01 MT.01 to MT.05 D.OUT1 MANT CODE No.16 screen Contact output signal 2 function RMT 1 D.OUT2 SEL No.17 screen Contact output signal 2 operation A A/B D.OUT2 TYPE No.18 screen Contact output signal 2 alarm AL.01 AL.01 to AL.32 D.OUT2 ALARM CODE No.19 screen Contact output signal 2 maintenance MT.01

CLA

lor 9~re lock- tAB ~ 01 9xhaust lockU>l: blank plug .H:h bre&li'lerj with Rod Boot p p p BN Z+ t+Stroke ZZ .. t f S f(Q/(e Stroke ra ~ (mmt ,-.ow "",.f I Bore size (mm) A DB BN BP BO DC 00 oE F GA GB GC GO GL GR J K LZ MM Without boot With boot 40 500 25-500 27 30 60 96 '/. y. 44 16 32 10 85 15 26 54 10 10 M8Xl.25 6 71 M14X1 .S 50 600 25-600 32 35 70 108 'I, 'I< 52 20 40 10

LEC-OM02704CN

S S S () 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N L S N O F F L S N O F F 6 39 6 6.4.4 (PC31PC34) PD20 PD20 0 1

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

-A18 ZPT40HNJ50-01-A18 ZPT40HNJ75-01-A18 ZPT50HNJ25-01-A18 ZPT50HNJ50-01-A18 ZPT50HNJ75-01-A18 ZPT63HNJ25-01-A18 ZPT63HNJ50-01-A18 ZPT63HNJ75-01-A18 ZPT80HNJ25-01-A18 Model Mass ZPT80HNJ50-01-A18 ZPT80HNJ75-01-A18 ZPT100HNJ25-01-A22 ZPT100HNJ50-01-A22 ZPT100HNJ75-01-A22 ZPT100HNJ100-01-A22 ZPT125HNJ25-01-A22 ZPT125HNJ50-01-A22 ZPT125HNJ75-01-A22 ZPT125HNJ100-01-A22 Pad dia.

F

P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R KCE KCU H O W T O O R D E R U N I O N E T O U C H F I T T I N G S KC S E A L A N T S C O N F I G U R AT I O N H Straight L Elbow T Tee J Straight plug U Y Connector E Bulkhead S With sealant (all male threads except M5) C O N N E C T I O N T H R E A D M5 M5 01 1/8 02 1/4 03 3/8 04 1/2 00 Same dia. tube 99 Stem fitting P R O D U

HRX-OM-X084

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-9 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-X084 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

HRX-OM-W002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

VS 8-2/VS 8-4

R S R [Option] How to Order Manifold 03 SD6Q VV8 01 N 1 1 N 5 W1 Size 01 02 Size 26 mm Size 18 mm CE compliant Nil Q CE compliant Stations 1 1 station Option Nil None 16 16 stations Special wiring specifications (Except double wiring) K Cylinder port size Direct exhaust with built-in silencer S Symbol 01 02 03 01B 02B Port size Side ported 1/8" Side ported 1/4" Side ported 3/8" Bottom ported

Modular Type Filter Regulator Series AW

AW20P-270AS AR20P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N Note) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N Note) Set nut Round 1.0MPa Note 2) Note 3) Pressure gauge Square embedded type Round 0.2MPa Note 3) Square embedded type N.O. N.C.

Series SV

-01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions, make determinations after using the SMC

Rubber seal 5 Port Solenoid Valve Series SYJ7000

SYJ7140-02 AN110-01 48 Series SYJ7000 How to Order Light/surge voltage suppressor Electrical entry for G, H, L, M, W Electrical entry for D Type of actuation Nil S Z R U Nil S Z Without light/surge voltage suppressor With surge voltage suppresor With light/surge voltage suppressor With surge voltage suppressor (Non-polar type) Without light/surge voltage suppressor With surge voltage suppressor

Compact and Lightweight

H2 L3 L2 L1 All Ports: Screw-in Model H1 H2 H3 L1 L2 L3 L4 Connection thread 1 Connection thread 2 Connection thread 3 ZH05DA-01-01-01 12 12 12 67 42.5 27 26 Rc1/8 Rc1/8 Rc1/8 ZH07DA-01-01-01 70.2 ZH10DA-01-01-01 76.4 ZH13DA-01-02-02 17 17 90.8 51 29.5 36.3 Rc1/4 Rc1/4 ZH15DA-02-03-03 17 19 19 108.2 63.3 34.3 37.1 Rc1/4 Rc3/8 Rc3/8 ZH18DA-03-03-03 19 131.1 73.6 41.1 39.1 Rc3/8 ZH20DA-03-04