Modular/F.R.L. Units Series AC

30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E 14 18 G 57 73 H 16 17 J 41 50 T M4 X 0.7 M5 X 0.8 K 40 54 S 44 60 AF30 AF40 4 Series AF20~40 Filter

Air Slide Table Series MXQ

(L) MXQ20 (L) MXQ25 (L) M2.5 x 8 M3 x 10 M4 x 12 M5 x 16 M6 x 20 M8 x 20 M2.5 x 6 M3 x 8 M4 x 12 M5 x 16 M6 x 16 M8 x 18 0.5 0.9 2.1 4.4 4.4 7.0 0.5 0.9 2.1 4.4 7.0 18.0 0.5 0.9 2.1 4.4 7.0 18.0 M2.5 x 6 M3 x 8 M4 x 10 M5 x 12 M5 x 14 M6 x 18 Individual -X 131 Series MXQ Specific Product Precautions 4 Be sure to read before handling.

MXS

Model *1) * A B C D E E1 F G H K L M N J P Q MGF MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BT 8 38 23 12.5 14 40.8 5 8 12 1.4 16.6 7 15.5 14.6 M8 X 1 M3 X 12 M3 X 16 MXS-BT12 45 31 18 14 40.8 6 8 12 1.4 20.5 10 15 18.5 M8 X 1 M4 X 8 M4 X 15 CY1 MXS-BT16 55 37 23.5 16 46.7 7 10 14 1.4 23 12 18.5 21 M10 X 1 M5 X 10 M5 X 18 MXS-BT20 70 47 29 23 67.3 11 12 19 12 27 13 25.5 25 M14 X 1.5 M5 X 12 M6 X 25

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

-83503) C8 [3(R) EXH port] C8: 8 One-touch fitting R R 63.5 61 DIN rail clamp screw 40.7 25 B B B B B B B B X X 9.3 P P 7.7 18.7 13 A A A A A A A A P = 10.5 31.5 18.1 C8 [1(P) SUP port] C8: 8 One-touch fitting C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2 L n Dimensions Formula L1 = 10.5n + 45.5, L2 = 10.5n + 63

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

-83503) C8 [3(R) EXH port] C8: 8 One-touch fitting R R 63.5 61 DIN rail clamp screw 40.7 25 B B B B B B B B X X 9.3 P P 7.7 18.7 13 A A A A A A A A P = 10.5 31.5 18.1 C8 [1(P) SUP port] C8: 8 One-touch fitting C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2 L n Dimensions Formula L1 = 10.5n + 45.5, L2 = 10.5n + 63

Air Cylinder

CA2 Bore size MM NA P S TA TC** ZZ WA W WH 20 M8 x 1.25 24 M5 x 0.8 77 11 M5 x 0.8 147 16 25 1.5 25 M10 x 1.25 29 M5 x 0.8 77 11 M6 x 0.75 157 16 25 1.5 32 M10 x 1.25 35.5 Rc1/8 79 11 M8 x 1.0 159 16 25 1.5 40 M14 x 1.5 44 Rc1/8 87 12 M10 x 1.25 187 17 20 1.5 50 M18 x 1.5 55 Rc1/4 102 13 M12 x 1.25 218 18 20 3 63 M18 x 1.5 69 Rc1/4 102 13 M14 x 1.5 218 18 20 3 80 M22 x 1.5 86 Rc3/8 122

5

(mm) Bore size (mm) Stroke range (mm) A AL B1 C D E F H H1 I J K KA MM NA 20 18 15.5 13 14 8 12 2 35 5 26 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 25 22 19.5 17 16.5 10 14 2 40 6 31 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 32 22 19.5 17 20 12 18 2 40 6 38 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 40 30 27 19 26 16 25 2 50 8 47 M6 x 1 depth 12 6 14 M14 x 1.5 44 Up to 1500 50 35 32 27 32 20 30 2 58 11

Basic type / Direct mount type Series CY3B/CY3R

J 2 x M5 x 0.8 Hollow shaft for piping Auto switch mountable 4 x MM Depth M Depth JK 4 x LD 4 x Counterbore dia.

Air Cylinder Series CM2

0.5 M5 x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 Specifications 10(Relief type) 11(Vacuum type) Rod end thread Female thread Male thread Bore size (mm) +1.0 0 mm Stroke tolerance Port size Vacuum port, Relief port 32 40 50 63 32 40 50 63 M5 x 0.8 M5 x 0.8 Fluid Proof pressure Maximum operating pressure Minimum operating pressure Air 1.5 MPa 1.0 MPa 11(Vacuum type

MXS Series Air Slide Table

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

SQ1000/2000

plate assembly u F kit L kit T kit S kit P (J) kit q !

MY1

M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 M14 x 2 M16 x 2 K 10 12 9.5 16 15 28 32 LH 22.5 23 27 35 38 29 32.5 L 80 100 102 132 162 200 230 LD 3.6 4.8 5.6 6.8 8.6 11 13.5 MW 66 80 96 HG 13.5 17 22 27 34.5 45 59 MM M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 Model MY1M16 MY1M20 MY1M25 MY1M32 MY1M40 MY1M50 MY1M63 U section detail dimensions P M5 x 0.8 M5 x 0.8 Rc 1/8 Rc

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l M5 x 30l x 35l M5 x 35l x 40l M6 x 45l x 55l M3 x 25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l M5 x 30l x 35l M5 x 35l x 40l M6 x 45l x 55l 6.5 6.5 5 5 7.5 7.5 9.5 9.5 9 9 7.5 7.5 12.5 12.5 7-6-45 46 Series CQ2 Construction Spring extend Spring return Port size For M5 x 0.8 With boss in head side Rod end male thread Built-in

High Vacuum Angle Valve

1010 (FKM) 1.3 x 1011 (FKM) A w, e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Air Slide Table

I J 5.5 11 5.7 11.2 2 x M5 x 0.8 thread depth 8 5H9 depth 5 +0.030 0 N x M5 x 0.8 thread depth 6 5H9 depth 5 +0.030 0 5.7 11 6 1 1 28 24.5 58 29 24 49 14.5 24.5 3.5 F 6.5 4 x M5 x 0.8 thread depth 7 14 -1 x F 2 N 21 3 x M6 x 1 thread depth 10 M 10 KA 21 10 5.5 Bottom view of MXQR16-50 NA x M5 x 0.8 thread depth 6.5 45 35 13 K 21 33.7 0.3 10 5.5 5.5 37 Z ZZ G (NN-1) x H H 22.4 7.6 22.4 7.6

LX

Proximity switch (optional) depth 5 10 7.5 15 pin plug 5H9 +0.030 0 E-M5 x 0.8 thread depth10 Home position switch (optional) 6 Refer to page 100 for connection cables. LJ1 LG1 LC1 LX LC6D/LC6C Switches 76 46 38 2-M2.5 x 0.45 thread depth 4 5H9 +0.030 0 10 3 depth5 J 27 J x K 25 8 Motor unit Refer to "Applicable Motor List" below for dimensions.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CRB2 L1= CRBU2 L1= Q1=M Q1=M Q1=M L1= Q1=M L1= CRB1 W1= Q1 MSU L1 Q1 Q1 Q1 L1 L1 J axis X axis L1 K axis T axis CRJ L3= L1= (mm) (mm) X= Size Size 30 50 63 80 100 30 50 63 80 100 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 CRA1 2.5 4 5 2.5 4 5 (mm) 4 5 6.8 6.8 8.5 10.3 8 4 5 6.8 6.8

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: S, W, Y d1 = Q1 = M L2 + (3 x P) L1 = L2 = (mm) Size 30 50 63 80 100 Q2 = M Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc1/8 Rc 1/4 2.5 4 5 4 5 6.8 (mm) (mm) d1 Size 30 50 63 80 100 100 Q2 M3, M4 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 6.8 8.5 10.3 8 6.8 8.5 10.3 8 11 2.5 4 to 7 4.5 to 18 6.8 to 11 6.8 to 13

Modular Design with Uniform Body Style

K H J H J H J H J AW20K-D 1/8, 1/4 1/8 40 87.6 71.8 26 M28 x 1 40 26 5 m28 27 m27.8 37.5 37.5 62.5 37.5 63.5 AW30K-D 1/4, 3/8 1/8 53 115.3 86.5 31.5 30 M38 x 1.5 55 31.5 3.5 m28 32.5 m27.8 43 37.5 68 37.5 69 AW40K-D 1/4, 3/8, 1/2 1/8 70 147.1 91.5 40.5 38.4 M42 x 1.5 80 40.5 m28 41.5 m27.8 52 42.5 78 42.5 78 AW40K-06-D 3/4 1/8 75 149.1 93 40.5 38.4 M42 x 1.5 80 40.5 m28 41.5 m27.8 52 42.5

LX

Top mount type Guide l Model Bolt Max. tightening torque Nm Body thickness (l mm) Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) LXS M5 x 0.8 4.4 28 LXS M5 x 0.8 4.4 10 Use bolts at least 0.5mm shorter than the maximum screw-in depth, so they do not touch the body. Caution 3.