125

Nil Without sub-plate* Manual override 02 1/4 03 3/8 04 1/2 42 Grommet/ (L/M) plug connector DIN terminal Nil Non-locking push type * With a gasket and 2 mounting bolts Grommet/ (L/M) plug connector Electrical entry B Locking slotted type Grommet L plug connector M plug connector DIN terminal G: Lead wire length 300 mm L: With lead wire (Length: 300 mm) M: With lead wire (Length: 300 mm)

AR20-B to AR60-B

to 0.2 MPa setting G36-4-01-L G46-4-01-L Square *4 embedded type Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] 0.02 to 0.2 MPa setting GC3-4AS [GC3P-010AS (Pressure gauge cover only)] NPN output, Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] Digital pressure switch *5 NPN output, Wiring top entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] PNP output

Vacuum System Peripherals:

length 0.6 m (Applicable to only DC) Air operated L ZCU Y LN Plug connector type LO AMJ M MN Misc.

Speed Controller with One-touch Fitting

, AS2211F-01-mPA 300 600 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 08, 09, 10, 11 500 06, 07, 08, 09, 10 Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 06, 07 400 200 01, 23 300 03, 04 200 100 01, 23 100 0 0 0 5 10 0 5 10 Number of needle rotations Number of needle rotations AS4201F-G04-m, AS4211F-G04-m AS4301F-G04-m, AS4311F-G04-m AS4201F-04-mPA, AS4211F-04-mPA AS3201F-G02/03-m

Shock Absorbers and Rate Controls

0filxZ(tll(Sl 2.0 12.05 *dio7 ioo +.01 5 / l . +.m l.J0 .630 +.0m/..0m 2.881.50 1.501.40t.06 N/A .t0 9.4 lbs. Otlh2.0iltx4(|UllSl 4.0 15.06 .t 5'l + 0n/. (m + n l l . ' +.m( l . : +.m( 1.50 .630 +.0ml..000 2.88 1.50 1.50 1.401.06N/A .90 r0.7 lk.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) K (High pressure) and Y (Low wattage) are not available. Electrical ently: L/ M plug connector only.

REA/REB

Model REAH25 REAHT25 REATH32 REAH15 REAH20 REAH10 Screw size M5 x 0.8 l-8 M8 x 1.25 M6 x 1.0 l-9 M4 x 0.7 l-7 Bolt dimensions l-12 Dimension t Max.

LEC-OM02704CN

i n 0 r / m i n L S P L S P O N O N O F F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N L S N O F F L S N O F F 6 39 6 6.4.4 (PC31PC34) PD20 PD20 0 1 2 3 0() 1() 2() 3()

Vacuum Unit

Length symbol Tension bolt assembly (2 pcs. per set) [L = 12.5 x M + 10.5] M: Length symbol 1 to 40 to 1 L = 23 40 L = 510.5 Exploded View e ZK2 TB1 A 05 to Applicable stations L 01 For 1 station manifold 1.25 P = 12.5 5.25 7.5 10 For 10 stations manifold 35 25 Port plug assembly Port plug assembly Exploded View t Exploded View r 5.5 (Purchasing order is available in units of 1 piece

Modular Type Regulator Series AR

5000 10 Flow rate L/min (ANR) Flow rate L/min (ANR) Orange mark AR30 Rc 3/8 AR60 Rc 1 0.6 0.6 0.5 0.5 2.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10 20 50 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 40 30 5 10 20 10 0 5 0 5 20 10 10 0 10 Number of needle rotations Number of needle rotations Number

Check Valve Series AK 1

Inch Size H (Hexagon width across flats) Connection thread NPT Effective area (mm2) Weight (g) A L M Applicable tubing O.D.

HRX-OM-W032

less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L]

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

PF2M7 10 C6 L M q w r t y u i e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min w Flow adjustment valve/Piping entry direction With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02, N1, N2, F1, F2 Straight Symbol Port size Rated flow

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Y 3 3 18 34 C C A A B D B D Dimensions (mm) Dimensions (mm) A B C D E F G H Y A B C D E F G H Y Model Model ZPT40HBJ25-01-A18 ZPT63HBJ25-01-A18 72 127.5 83 138.5 50-01-A18 50-01-A18 107 162.5 118 173.5 40 41 28 43 20.5 32 13 63 65 46 68 31.5 43 21.5 75-01-A18 75-01-A18 143 198.5 154 209.5 ZPT50HBJ25-01-A18 ZPT80HBJ25-01-A18 75.5 131 88.5 144 50-01-A18 50-01-A18 110.5 166 123.5 179 50 52 36

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ L plug connector (L): VQZ22(R)-L-C4/C6/M5 DIN terminal (Y): VQZ22(R)-Y-C4/C6/M5 VZ VS Indicator light 84 300 VFN (Lead wire length) 30.5 <35.5> 87 Max. 10 Applicable cable O.D. 3.5 to 7 Pg.7 Cover diameter 1.5 Cross section 0.23 mm2 Indicator light < >: AC 61.5 M plug connector (M): VQZ22(R)-M-C4/C6/M5 54 36 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 300 89 78 Indicator

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

(P) 3 (R) L plug connector (L) VQZ200 N.C. 3 Port M plug connector (M) 0.45 0.6 (Option) 100V AC 200V AC 110V AC 220V AC (A) 2 VQ M plug connector (M) VQZ 1 (P) 3 (R) N.O.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

type plug connector (L): VQZ3 2(R)L -N7T, N9T, N11T, 02T DIN connector (Y): VQZ3 2(R)Y -N7T, N9T, N11T, 02T 88.5 300 (Lead wire length) Indicator light 92.5 MAX.10 Pg.7 Applicable cord O.D. 3.5 to 7 Indicator light 31.5 61 53.5 Cover diameter 1.5 Cross sectional area 0.23mm2 35.5 M type plug connector (M): VQZ3 2(R)M -N7T, N9T, N11T, 02T 94.5 37 300 (Lead wire length) Cover diameter 1.5 Cross

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AK ASS ASR Flow Rate and Effective Area ASF Model AS121FM AS131FM AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 3.2, 4, 6 6, 8 3.2, 4 8, 10 4 6 Metric size Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size Air flow (l/min(ANR)) 7 12 38 Controlled flow JIS Symbol 0.1 Effective area (mm2) 0.2 0.6 Flow rate (l/min(ANR)) 230 180 460 260 390

5 Port Solenoid Valve SY Series

Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer AS2051F-06 AN120-M5 AS3001F-06 AN110-01 SY3120-C6 SY3140-01 T0604 x 1 m T0806 x 1 m AS3001F-06 T0604 x 1 m T0806 x 1 m AS3001F-08 AS3001F-06 SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m T0604 x 1 m T0604 x 1 m T1209 x 1 m T1075