1

5) 20 (15) Note 5) 20 + 15 (n 2) (n = 4, 6) Note 4) CY CX D-F7l D-J79 5 5 15 + 15 (n 2) (n = 4, 6) Note 4) Rail mounting D-F7lV D-J79C 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) CK1 D-F7lW/J79W D-F7BA/F79F/F7NT 10 15 15 + 20 (n 2) (n = 4, 6) Note 4) C(L)K D-F7lWV D-F7BAV 10 15 10 + 15 (n 2) (n = 4, 6) Note 4) C(L)KU D-A7l/A80 D-A7lH/A80H D-A73C/A80C 5 10 15 + 10 (n 2) (n = 4,

V

S TA N D A R D T Y P E F O R E X T E R N A L P I L O T T Y P E A S S TA N D A R D S P O O L 0 Metal 1 Rubber Courtesy of Steven Engineering, Inc. !

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

NCX2 seies

Note: This diagram is for D-A7 or D-Ag type. ( ):with D-F7 or D-J7 type. o Series NCX2 o** Wrth Auto swibh H date rnount type: tlcopx@zs-ffi wi[| Aub svritch, HousirE mour type: rcoexz8zs-ffi 6' s ffi sl(_. I ffi f l * l l+l {_l l@tt L-I a Noler Thls diagfam is for D A7 or D,A8 type ( ) with D-F7 or D-J7lype.

Air Cylinder NCX2 Series Slide Unit

Note: This diagram is for D-A7 or D-Ag type. ( ):with D-F7 or D-J7 type. o Series NCX2 o** Wrth Auto swibh H date rnount type: tlcopx@zs-ffi wi[| Aub svritch, HousirE mour type: rcoexz8zs-ffi 6' s ffi sl(_. I ffi f l * l l+l {_l l@tt L-I a Noler Thls diagfam is for D A7 or D,A8 type ( ) with D-F7 or D-J7lype.

Digital Flow Switch (Integrated display type)

CO2 0.2 to 5 L/min 0.5 to 12.5 L/min 1 to 25 L/min 2 to 50 L/min Dry air, N2, Ar 0.2 to 10.5 L/min 1 0.5 to 26.3 L/min 1 to 52.5 L/min 2 to 105 L/min 2 Display flow range Instantaneous CO2 0.2 to 5.2 L/min 0.5 to 13.1 L/min 1 to 26.2 L/min 2 to 52 L/min flow Dry air, N2, Ar 0 to 10.5 L/min 1 0 to 26.3 L/min 0 to 52.5 L/min 0 to 105 L/min 2 Set flow range CO2 0 to 5.2 L/min 0 to 13.1 L/min

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

0.02 End plate (PBT) (UL94-V0) End plate (PBT) (UL94-V0) 0.01 0.005 50 100 200 500 1000 2000 5000 10 20 Sound absorbing material (PVF) Sound absorbing material (PVF) Air flow (l/min (ANR)) Noise Level (Initial conditions) Case (PBT) (UL94-V0) Case (PBT) (UL94-V0) Hexagonal flats D Hexagonal flats D AN202 to 402 Condition: 0.5 MPa at inlet pressure of solenoid valve Measurement distance:

S Couplers

Tube deformation ratio at the minimum bending radius = L D 2d 1 x 100 Mandrel Here, : Deformation ratio (%) d : Tube O.D.

SMC Electronic Switch Series Variations

L R L R L R L R L R L R Glass q w e Stainless steel Stainless steel Cross recessed round head screw Brass Stainless steel r t Stub 3.8-2 ISA Specifications Fluid Dry air (Filtered through a 5m filter) Operating pressure range 0.05 to 0.2MPa Recommended pressure range 0.1 to 0.2MPa Detection zone 10 to 300 m Repeatability including temperature characteristics 10m (for 0 to 60C on the basis

Pressure Switch/Reed Switch Type

D-KS

ZL3-OM00601

Other shapes do not comply with ISO1603 or ISO1179. 8) Light/surge voltage suppressor 7) Electrical entry Z Light/surge voltage suppressor L Lead wire length 0.3(m) L shaped plug connector LO Without connectors M Lead wire length 0.3(m) M plug connector MO Without connectors 9) Manual override Nil Non-locking push type D Push-turn locking slotted type E Push-turn locking (manual type) 10)

ZL3-OM00801

N06 NPT3/4 5/16(inch) N04 2xNPT1/2 6) 5 DC24V *1G JIS B0202 ISO1603 ISO1179 8) Z 7 L L 0.3(m) 11) A NPN LO B PNP M M 0.3(m) MO 12) 9) M SI (kPa) D P (:psi) E 10) 14 GN (G) B G *7ZL212 27mm ZL212 (2 /1 , 4 ) E (2 ) F (2 ) V (1 ) 13 G 2m) W (2m) 5 No.ZL3-OM00801-A 2. 2.1 (1/P) (2/V) ZL3 ZL6 (3/E) // / (G) (2/V) 2.2 ZL6 1 ZL6 (ZL6-SC1-A) 2), 6 No.ZL3-OM00801-A 3. 3.1

Digital Flow Switch (Remote type sensor unit)

to 25 L/min 2 to 50 L/min Accuracy 3%F.S. max.

D

VCHC AS1201F, AS1211F AS2201F-01, AS2211F-01 AS2201F-02, AS2211F-02 ASR ASQ Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of needle rotations AS4201F, AS4211F AS3201F, AS3211F Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Flow rate (L/

ZSE20(F)_ISE20

Note Bracket A ZS-46-A1 Tapping screw: Nominal size 3 x 8 L (2 pcs.) Bracket B ZS-46-A2 Tapping screw: Nominal size 3 x 8 L (2 pcs.)

Precision Regulator

min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 11.5 L/min (ANR) or less Rc 1/4, 3/8, 1/2 Rc 1/8 (2 locations) Rc 1/4, 3/8, 1/2 Port size Pressure gauge port Rc 1/4 Rc 1/4 Rc 1/8 SRP Ambient and fluid temperature Weight (kg) 5 to 60C (No freezing) 0.64 0.71 0.35 0.30 0.14 SRF Note 1) With the condition of no flow on the output side.

Precision Regulator Series IR1000/2000/3000

min (ANR) or less 4.4 l/min (ANR) or less 4.4 l/min (ANR) or less 4.4 l/min (ANR) or less 11.5 l/min (ANR) or less (At supply pressure of 1.0 MPa) SRF Rc 1/4, 3/8, 1/2 Rc 1/4 Rc 1/4, 3/8, 1/2 Port size Rc 1/4 Rc 1/8 Rc 1/8 (2 locations) Pressure gauge port ARX20 Ambient and fluid temperature 5 to 60C (No freezing) 0.71 0.35 0.64 Mass (kg) 0.30 0.14 VCHR Note 1) With the condition of no flow