Basic type / Direct mount type Series CY3B/CY3R Reduced outgassing o u Resin materials eliminated Laser marking is employed for the model designation. d t g e a c 2 s u s d Reduction of outgassing due to surface treatment i o u d t e n g e a c R g 1 s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.
Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 59 F 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 29.5 5H9 +0.030 0 depth 5 6 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 (11.5) 38 E Refer to page 299 for mounting.
GR-S-010 (10 g), GR-S-020 (20 g) Technical data 1071 Series MY1W Dimensions: 16, 20 L (LL) 4 x MM depth M 4 x B counterbore depth C LD through-hole bottom side J depth K PA YW PB QW LW Q+ Stroke PG M5 x 0.8 M5 x 0.8 (Hexagon socket head plug) (Port) W CH LH RR SS NE H RR SS NH HH QQ NC M5 x 0.8 M5 x 0.8 2 x 2 x M5 x 0.8 PP TT UU (Port) This port is not available for use.
(Example) For M3: L1 = 6 Applicable shaft types: S, Y L2 + (3 x P) L1 + ( 3 x P) Q1 = M Y axis S axis (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 L2= 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6 Q2 = M M4, M5, M6 100 100 M5, M6, M8, M10 M5, M6, M8 M5, M6, M8 Symbol: A33 Machine
CVJ3L T Bore size Stroke 48 [49] RZQ M5 x 0.8 28 [34.5] M5 x 0.8 Manual override MI W S Width across flats B1 CEP1 CE1 CE2 Rod End Nut H1 B1 Bore size (mm) 10 16 16 [17] ML2B S + Stroke H + Stroke Z + 2 x Stroke 7 3.2 8 4 C J G5-S [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) CV LA H F D LY NN C LX Y B LC LT MM X A LB LH LZ NA NB S Z Z S Z
Z S RHC T MK(2) CVM3 L 32 100 T 1 L Z Without auto switch RS Q G L 32 100 T 1 L Z H7BW CDVM3 RS H A With auto switch RZQ Built-in magnet Number of auto switches Piping MI W S 2 pcs. 1 pc. n pcs.
Grease pack part no.: GR-S-010 (10 g) Single acting, spring extend 12 16 20 25 32 40 50 CQ2B12-T-PS CQ2B16-T-PS CQ2B20-T-PS CQ2B25-T-PS CQ2B32-T-PS CQ2B40-T-PS CQ2B50-T-PS Set of left nos. !4, !5, !6. Seal kit includes !4, !5, !6. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately.
CQ2B32-S-PS 32 CQ2B40-S-PS 40 CQ2B50-S-PS 50 Spring extend type (T type) piston and piston rod are combined. (Stainless steel) Seal kits consist of items !4, !5 and !6 contained in one kit, and can be ordered using the order number for each respective tube bore size.
S 20 20 stations P, R port thread type + + + + + + + A, B port size R R P P port 1/8 R port 1/8 A B M5 Nil Rc M5 x 0.8 B A A, B port M5 x 0.8, C4 A, B port M5 x 0.8, C4 C4 F G One-touch fitting for 4 N3 N NPT One-touch fitting for 5/32" T NPTF Common SUP/Individual EXH type Note) For more than 10 stations, supply air to both sides of P port.
(Example) For M3: L1 = 6 Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5, M6
How to Order LEFS 32 R T7 B 200 B S 5 S2 q w e r t y !
System (16 output points) SUNX Corp.: S-LINK System (8 output points) Fuji Electric Co.: T-LINK Mini System DeviceNet, CompoBus/D (OMRON Corp.)
, 125, 150 175, 200, 250, 300, 350, 400 53 37 10 8 8 36 11.5 9 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.4 9.5 5.5 Rc1/8 NPT1/8 G1/8 25 53.5 37.5 10 9 7 42 11.5 10 93 M5 21 21 30 M6 x 1.0 15 M6 x 1.0 5.4 9.5 5.5 Rc1/8 NPT1/8 G1/8 MGT Bore size [mm] PA PB PW Q R S T U VA VB WA WB X XA XB YY YL Z 30 st or less Over 30 st 100 st or less Over 100 st 200 st or less Over 200 st 300 st or less Over
Q max. : Ejector/ maximum flow rate Ni/min. t :Safety rate Horizontal lift : Y: 4 Of more Vertical lift : X 8 OJ more &Calculation 02 Piping s~stem /maximum flow rate 02 = S x 11.1 S: Effective orifice area of piping (mm2) W~ ~ x l ,033 X S X ~t 760 Horizontal lift Vertical lift 8Calculation of response time Avoid It unless ) (,other wise needed T1 = Necessary second to reach final vacuum
G S B + Stroke A + Stroke E For bore sizes 12 and 16, M5 x 0.8 is only available.
Clausings factor 8 Exhaust Time (Low/Medium Vacuum) K The time (t) required to exhaust a chamber at low vacuum with volume V (L), from pressure P1 to P2, using a pump with pumping speed S (L/sec) is t=2.3(V/S)log(P1/P2). In high vacuum, this is subject to the ultimate pressure limit imposed by outgassing and leakage as characterized above.
System (16 outputs) S-Link System (8 outputs) J2 SUNX Corporation T Link Mini System K Fuji Electric Co., Ltd.
RS Q G RS H A Model REBH15 REBH25 REBHT25 REBHT32 Thread size M6 x 1.0 M5 x 0.8 M8 x 1.25 Bolt dimensions RZQ Dimension t l-9 l-8 l-12 Nm Tightening torque 4.4 2.65 13.2 MI W S CEP1 CE1 Square nut CE2 ML2B C J G5-S l t CV MVGQ CC RB J D-X 20Data 10-2-75 75 Series REBH Model Selection 1 Operating Conditions Pv: Maximum operating pressure for vertical operation (MPa) Wv: Allowable load weight
RS Q G RS H A Model REBH15 REBH25 REBHT25 REBHT32 Thread size M6 x 1.0 M5 x 0.8 M8 x 1.25 Bolt dimensions RZQ Dimension t l-9 l-8 l-12 Nm Tightening torque 4.4 2.65 13.2 MI W S CEP1 CE1 Square nut CE2 ML2B C J G5-S l t CV MVGQ CC RB J D-X 20Data 10-2-75 75 Series REBH Model Selection 1 Operating Conditions Pv: Maximum operating pressure for vertical operation (MPa) Wv: Allowable load weight