V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

Digital Flow Switch (Integrated display type)

to 20 mA) output type PFM7--DMax. 28 V, 80 mA Internal voltage drop: 1 V or less C: Analogue output: 1 to 5 V Output impedance: 1 k D: Analogue output: 4 to 20 mA Max. load impedance: 600 Min. load impedance: 50 NPN (1 output) + External input type PFM7--GMax. 28 V, 80 mA Internal voltage drop: 1 V or less External input: No voltage input (reed switch or solid state), 30 ms or more -18No.PF-OMJ0006

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M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

ALF400 to 900, ALT-5/-9

4 s d n e h t o B 6 A V 6 s d n e h t o B Dimensions/Auto feed tank 0 1 A V 0 1 s d n e h t o B 6 1 A V 6 1 s d n e h t o B 4 B V 4 e d i s e n O 6 B V 6 e d i s e n O 8 B V 8 e d i s e n O s n o i t a c i f i c e p S h c t i w S t a o l F n o i t p i r c s e D 2 ~ 1 0 1 4 S I y t i c a p a C W 5 1 : C D , A V 5 1 : C A e g a t l o V V 0 5 2 C D , V 0 0 1 C A e r u s s e r P f o o r P ) a

PSxx-OMH0002CN

OUT1(NPN) DC12 24 V OUT2(NPN) DC(-) -43 43 43 43 NPN 1 + PNP 1 Max.30 V(NPN)80 mA 1 V NPN PNP DC(+) OUT1(NPN) DC12 24 V OUT2(PNP) DC(-) DC(+) OUT1(PNP) -65 65 65 65 PNP 1 Max.80 mA DC12 24 V N.C.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

1 V 5 V 300 kPa 200 Current output 4.16 mA 4 mA 20 mA 750 kPa Flow [L/min] Output 150 Rated flow [L/min] Min.

VM

A commercially available actuator for the V microswitch can be installed. However, be aware that there are different microswitches, such as the P.T./O.T. or F.O.F. types. T.T. 2.5 mm is available for basic style only.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 25 ?3C)Lights up when output is turned ON.

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN 1 output, NPN 2 outputs, PNP 1 output, PNP 2 outputs80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above)Variable (0 or above)1 to 5 V ?2.5% F.S.?

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 25 ?3C)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 25 ?3C)Lights up when output is turned ON.

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN 1 output, NPN 2 outputs, PNP 1 output, PNP 2 outputs80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above)Variable (0 or above)1 to 5 V ?2.5% F.S.?

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 25 ?3C)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 25 ?3C)Lights up when output is turned ON.

Digital Flow Switch (Remote type sensor unit)

Circuit (Class 2) of maximum 30 Vrms (42.4 V peak) or less, with UL1310 Class 2 power supply unit or UL1585 Class 2 transformer. The product is a UL approved product only if it has a mark on the body. Use the specified voltage. Otherwise failure or malfunction can result. Insufficient supply voltage may not drive a load due to a voltage drop inside the product.

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Rated Pressure Range: -0.1 to 1 MPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: K (Operation Manual, Calibration Certificate)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: None, Operation Manual: K (Operation

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: None, Operation Manual: Y (w/o Operation

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: D (Panel Mount Adapter + Front Protection