Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

HRX-OM-X084

Description Qty Applicable model Anti-quake bracket A Anti-quake bracket B 2 2 4 4 HRR010-A/W-10/20-Y HRR012/018-A/W-10/20-Y HRR-TK001 Nut (M8) HRR024/030-A/W-20-Y Bolt (M8) HRR050-A/W-20-Y Mounting of anti-quake bracket 1. Remove the cap from M8 stud bolt. (4pcs) 2. Mount the anti-quake bracket A. (Recommended torque : 12.5Nm) 3. Mount the anti-quake bracket B.

125

(R) e r Port 3 (R) Port 2 (A) Port 1 (P) Port 23(P2) (Pilot air port) y i Port 2(A) u r y Port 1(P) t q VEX3320 (Air operated) VEX3420 (Air operated) w e q r y y t w r e u t t 12(P1), 23(P2) Port Port 3(R) y y (Pilot air port) r i Port 2(A) u r Port 1(P) t q Port 1(P) Port 2(A) Port 3(R) Component Parts No.

Table of Contents

Nil T Nil W Motor specification G R Y Matsushita Electric Industrial Co., Ltd.

Sine Cylinder Series REC

3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

Sine Cylinder Series REC

3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

IR1000/2000/3000

IRV1000 IRV2000 IRV3000 P538010-6 P538020-3 P538030-5 q w e r t y u i o !0 !1 !2 !3 !4 !5 HNBR, etc.

ARM10/11

t y w F.R.L.

ARM10/11

t y w F.R.L.

HRX-OM-X071

HRR050-A-20/40.9-10 HRR Series HRX-OM-X071 Contents 9.3.2 HRR050-W-20/40. 9-10 9.4 Cooling capacity . 9-11 9.4.1 HRR050-A-20. 9-11 9.4.2 HRR050-W-20. 9-11 9.4.3 HRR050-A-40. 9-12 9.4.4 HRR050-W-40. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow

Booster Regulator/Air Tank

VBAT5A-Y-3N VBAT10A-Y-3N VBAT20A-Y-3N VBAT5S-Y-4N VBAT10S-Y-4N VBAT20S-Y-4N VBAT5A-Y-3 VBAT10A-Y-3 VBAT20A-Y-3 VBAT5S-Y-4 VBAT10S-Y-4 VBAT20S-Y-4 Quantity Model No.

LEC-OM02704CN

LEC-MR-J3BAT 19X(10)Y(11)Z(12) 200410SERIAL 4X 13 13 13 13.4 UVW 600VEP(2PNCT) 8 UL/C-UL(CSA)UL60 30m (1) U L 1 U L 2 V V L 3 ( ) W W L 11 L 1 2 B1 B 2 N C C P (2) CN1 CC-Link ((3)) BU BV BW OHS1 OHS 2 .

Soft Start-up Valve

37.5 Bracket (Option) T N M P X Built-in silencer (Option) 3(R) Q S L K R AV5000-A Flow adjustment needle at low speed air supply D D 2 x W 4 x W Y V Y U H H U Dimensions [mm] Standard specifications Port size A B C D E F G H J 1(P) 2(A) 3(R) Model AV2000-m02-1 to 6D/Y(Z)m-A 1/4 1/4 1/4 66 97 47 24.5 40 96 33 Width across flats 22 58 AV3000-m03-1 to 6D/Y(Z)m-A 3/8 3/8 3/8 76 97 50 29.5 40

0.4

e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2)

SZ3000

0 5 (EA) 1 (P) 3 (EB) 4(A) JIS symbol 3 position closed center (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i 3 position exhaust center (A) 4 (B) 2 3 position closed center/exhaust center/pressure center 5 (EA) 1 (P) 3 (EB) w e q r t y u o !0 3 position pressure center (A) 4 (B) 2 4(A) 5 (EA) 1 (P) 3 (EB) 2(B) 5(EA) 1(P) 3(EB) i Parts list Material Description No.

Speed Controller with One-touch Fitting

2 ASD q t AS y !3 r t AS-FE u w i KE i o AS-FG y !0 u AS-FP w e AS-FM Meter-in type Meter-out type !4 !1 Meter-in type Meter-out type AS-D Seal method: Sealant For R, NPT thread Seal method: Sealant For R, NPT thread AS-T e !1 ASP !0 o q r ASN !2 t AQ q w ASV r y AK u t VCHC i i ASR ASQ !

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

3 Port Solenoid Valve Metal Seal Series VZ200 1

No. t y Stainless steel Aluminum die-casted Material Note No. q Description Gasket Return spring Platinum silver Spool/Sleeve Body w e r O-ring u NBR Seal i NBR O-ring o NBR O-ring NBR O-ring !0 NBR Piston Polyacetal Platinum silver Aluminum die-casted Sub-plate 01 02 NBR Mini Y seal !1 Sub-plate Assembly Part No.: VZ400-S!2 Mounting bolt and gasket are not attached.

Soft Start-up Valve AV2000/3000/4000/5000 1

bore 1/8 R 4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000