SMC Corporation of America
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100 (50) PFM711--D/F 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 Flow adjustment needle revolution Flow characteristics (reference value) -57No.PF-OMJ0006-J Pressure loss (at 350 [kPa]) -58No.PF-OMJ0006-J Dimensions PFM7-(N)01/(N)02/F01 -59No.PF-OMJ0006-J PFM7-(N)01L/(N)02L/F01L -60No.PF-OMJ0006-J PFM7S-(N)01/(N)02/F01 -61No.PF-OMJ0006-J PFM7S-(N)01L/(N)02L/F01L -62No.PF-OMJ0006-J PFM7-F02

Cable Specifications Piping Specifications and Weights Conductor area 0.15 mm2 (AWG26) Model 02 N02 F02 C01 A2 B2 Port size R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 Insulator O.D. 1.0 mm Color Brown, Blue, Black, White, Gray (5-core) Sheath Finished O.D. 3.5 Materials of parts in contact with fluid Pressure sensor: Stainless steel 630, Fitting: Stainless steel 304 Weight Body (Rear ported) 51

-550(5) SUS630()SUS304() () / -7No.PS-OMU0008CN-D * 1015 10 1 2466 LCD * -8No.PS-OMU0008CN-D ISE20C X M 2 3 ISE20C -0.100~1.000 MPa Y ZSE20C 0.0~-101.0 kPa K ZSE20CF -100.0~100.0 kPa T ISE20CH -0.100~2.000 MPa 24 X NPN2 A1 A Y PNP2 A3 C R NPN2+1 B T PNP2+1 E S NPN2+1 D + V PNP2+1 1: F + 4 2 M SI3 1 P psi2 2 3 kPaMpa (2m ) W 2 R1/4 C01 Rc1/8 N02 NPT1/4 A2 URJ1/4 L F02

Cable Specifications Piping Specifications and Weights Conductor area 0.15 mm2 (AWG26) Model 02 N02 F02 C01 A2 B2 Port size R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 Insulator O.D. 1.0 mm Color Brown, Blue, Black, White, Gray (5-core) Sheath Finished O.D. 3.5 Materials of parts in contact with fluid Pressure sensor: Stainless steel 630, Fitting: Stainless steel 304 Weight Body (Rear ported) 51

Bore size (mm) 63 50 40 32 25 Mounting bracket MU-L06 MU-F06 MU-L05 MU-F05 MU-L04 MU-F04 MU-L03 MU-F03 MU-L02 MU-F02 (1) Foot Flange Note 1) When ordering foot bracket, order 2 pieces per cylinder. Note 2) Body mounting bolts are attached with the foot style and flange style. Auto Switch Mounting Bracket Part No. Note Mounting bracket part no.

(2 ) -1010 V -55 V -2020 mA 7FFF 7FFF 32767 10.5 5.25 21 79E8 79E8 31208 10 5 20 3CF4 3CF4 15604 5 2.5 10 0 0 0 0 0 0 BCF4 C30C -15604 -5 -2.5 -10 F9E8 8618 -31208 -10 -5 -20 F 8000 -32767 -10.5 -5.25 -21 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB -23No.EX-OMN0037CN-A -24No.EX-OMN0037CN-A EX600-AY

EX600-AX/EX600-AY/EX600-AM Fieldbus system Operation Manual The following instructions must be followed during maintenance: Turn off the power supply. Stop the air supply, exhaust the residual pressure and verify that the air is released before performing maintenance. Otherwise an injury can result. After maintenance is complete, perform appropriate functional inspections.

How to use Warning E nvironment When using hazardous fluid, take measures to keep people aw ay from the pump. T he occurrence of external leakage could result in serious injury. E xternal leakage of transported fluid F luid might leak externally due to life of diaphragm, and this could result in human injury or equipment damage. T ake measures against leakage.

(varying w ith applications) 0 .0 2 2 liter(discharge amount per one cycle)5 0 million cyclesreferential life cycle Referential life date Operating frequency of Warning E nvironment When using hazardous fluid, take measures to keep people aw ay from the pump. T he occurrence of external leakage could result in serious injury. C onnecting port C orrect tightening torque(N) x 6 0 min.

Precautions Warning E nvironment When using hazardous fluid, take measures to keep people aw ay from the pump. T he occurrence of external leakage of transported liquid could result in serious injury. E xternal leakage of transported liquid F luid might leak externally due to life of diaphragm, and this could result in human injury or equipment damage. T ake measures against leakage.

Use air having better quality than No.B mentioned in catalogues of A ir Warning E nvironment When using hazardous fluid, take measures to keep people aw ay from the pump. T he occurrence of external leakage could result in serious injury. not steel pipe to avoid load applied to the ports. E xcessive load applied to the inner seal could cause liquid leakage. F lush the piping thoroughly.

Nov y Ay By Cy Dy Ey Fy . This manual provides the following symbols in addition to Danger, *Heating capacity increase approx. 10W when high pressure pump option selected Dec Z AZ BZ CZ DZ EZ FZ . This unit does not use parts that meet the SCCR specifications.

Nov y yy Zy Ay By Cy Dy . Danger In extreme conditions, there is a possibility of serious injury or loss of life. When the circulating fluid temperature is low, do not operate it at a low 500 500 flow rate. It may freeze circulating fluid in the product when used at low temperature and low flow rate.

Zy Ay By . 2012 2013 2014 . 2021 2022 2023 . Year Jun T QT RT ST . ZT AT BT . Dec Z Qz RZ SZ . ZZ AZ BZ . Apr R QR RR SR . ZR AR BR . Jul U QU RU SU . ZU AU BU . Month Q R S . Z A B . Oct X QX RX SX . ZX AX BX . T With stand for vertical installation 8 1 15 9 D-sub 15 pin (Socket type) Fixed screw: M2.6 Description No.

3CF4 15604 5 2.5 10 0 0 0 0 0 0 BCF4 C30C -15604 -5 -2.5 -10 F9E8 8618 -31208 -10 -5 -20 F 8000 -32767 -10.5 -5.25 -21 Data format Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Sign MSB AD value LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Sign MSB AD value LSB -23No.EX-OMN0038-C Dimensions -24No.EX-OMN0038-C Analog output unit Model Indication and How to Order EX600-AY

points) 1 0 EX600-DX#C1 (16 points) 2 0 Digital input unit DX EX600-DX#D (16 points) 2 0 EX600-DX#E (16 points) 2 0 EX600-DX#F (16 points) 2 0 EX600-DY#B (8 points) 0 1 EX600-DY#E (16 points) 0 2 Digital output unit DY EX600-DY#F (16 points) 0 2 EX600-DM#E (8/8 points) 1 1 Digital I/O unit DM EX600-DM#F (8/8 points) 1 1 Analogue input unit AX EX600-AXA2 (2 points) 4 0 Analogue output unit AY

points) (with broken line sensor) 1 0 Digital input unit DX EX600-DX#D (16 points) 2 0 EX600-DX#E (16 points) 2 0 EX600-DX#F (16 points) 2 0 EX600-DY#B (8 points) 0 1 EX600-DY#E (16 points) 0 2 Digital output unit DY EX600-DY#F (16 points) 0 2 EX600-DM#E (8/8 points) 1 1 Digital I/O unit DM EX600-DM#F (8/8 points) 1 1 Analogue input unit AX EX600-AXA2 (2 points) 4 0 Analogue output unit AY

I ndi cat i on m ay not f unct i on properl y i f w at er drop i s cont ai ned i n com pressed ai r. ( N ew ) El em ent ( U sed) head bol t W ARN I N G O U T Repl ace t he el em ent w hen one of f ol l ow i ngs occurs. Red spot s appear on t he el em ent surf ace. O perat ed f or 2 years, or pressure drop reaches 0. 1 M Pa.

D eodori zat i on m ay det eri orat e i f w at er drop i s cont ai ned i n com pressed ai r. N o back f l ow Pl ace w here ai r f l ow s backw ards I N El em ent O ri ng G asket ( N ew ) ( N ew ) O ver rat ed f l ow Year 2008 2009 2010 2021 M ont h J an Feb M ar D ec SYM BO L M N o Z SYM BO L o P Q Z I nst al l vert i cal l y. Fl ush i nsi de of pi pi ngs w i t h ai r.

Zy Ay By . The maximum operating pressure is 1.0MPa. Keep the pressure as low use an open tank. Dec Z Tz UZ VZ . ZZ AZ BZ . as possible to prevent water hammer. 5.7 Filling the product Ensure that the INLET and OUTLET for circulating fluid and facility water are connected correctly.