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Unit switching Real-time switch output ( ) ZSE ISE For Air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON PSE YES CFM x 102, CFM x 101 ft3 x 101 OFF P-1 P-2 High flow rate Z I SE3 CFM = ft3/min P Window comparator mode H: Hysteresis High Flow Rate Type (For Air) PS H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON Z I SE1 2 NO OFF P-1 P-

SY

ARBY3000 Series SY3000 Series SY5000 00 2 P ARBY5000 Regulated port Regulated port Pressure gauge connecting port Pressure gauge connecting port P port A port (P port control type A port regulated) B port (P port control type B port regulated) P port A port (P port control type A port regulated) B port (P port control type B port regulated) P A1 B1 P A1 B1 Pressure gauge (G15-10-01) Plug

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

For the allowable voltage fluctuation for S, Z and T types (with power saving circuit), please observe the following range because they have voltage drop due to internal circuit. 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) 3 position pressure center 3 position pressure center S and Z types 24 VDC: -7% to +10% 12 VDC: -4% to +10% T type 24 VDC: -8% to +10% 12 VDC: -6% to +10% (B) 2 (A) 4 (B) 2 (A) 4 Bracket

High Vacuum Angle Valve

D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// H0 H4 H5 High temperature type 5 to 150C Solid state auto switch Note) Size 25 is not applicable for H4.

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Single type Suck back P P P VN A B A B Unit Single type Unit LVC Manifold (5 stations max.) LVA LVH A R P 3 port N.C. PA LVD N.C.

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Operating pressure P (MPa) P 0.7 MPa MTS 4.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

4 port base mounted 10-SYJ3000 Common SUP/Common EXH Common SUP/ Individual EXH R P A P. 299 B Type 32 4 port base mounted 10-SYJ3000 P R A P. 299 B Type 40 5 port base mounted 10-SYJ5000 P. 327 10-SYJ7000 P. 357 Type 41 10-SYJ3000 5 port base mounted P. 299 10-SYJ5000 P. 327 10-SYJ7000 P A P. 357 B Type 42 5 port base mounted 10-SYJ5000 P. 327 10-SYJ7000 B B R P A P. 357 Type 43 5 port

MY1

Wall mounting z P. 26 P. 58 y x y Wa: Connection plate t = 10 (880g) x z MY1C40-500 3. Ceiling mounting 4.

Electric Actuators

Driver for Non-standard Motor Regenerative Absorption Unit Series LC7R Teaching Box Dedicated AC Servomotor Controller Series LC1 P. 205 P. 200 P. 185 P. 196 Features 5 Electric Actuator Line-up of Products Short Stroke Electric Actuator Series LX Series LX Stepper motor High Rigidity Slide Table Type Series LXS Low Profile Slide Table Series LXF Guide Rod Type Series LXP P. 250 P. 210 P

Air Cylinder

Rod Trunnion (U) CM2U Bore size P Stroke 20 20 25 P P (Head side pressure port) (Head side pressure port) P P Width across flats B2 Width across flats B1 (Rod side pressure port) (Rod side pressure port) 32 to 40 NN Width across flats KA 0.025 0.061 P (Head side pressure port) H1 I TD G G NA TY D Q TT N K A AL TX TZ MM QY NA P H Z N (Rod side pressure port) S + Stroke ZZ + Stroke (mm) Bore

MY1

Wall mounting z y P. 8-11-36 P. 8-11-6 MY1HT50-600 x y x z Wd: Workpiece (500 g) x 3. Ceiling mounting 4.

Smooth Cylinder/Low Speed Cylinder

: Change this to a smooth cylinder (CS2). 1 1 DCQSY CQ2Y CM2Y CG1Y CA2Y CQSX CQ2X CM2X CJ2X CUX CS2Y -X P. 1168 P. 1176 P. 1189 P. 1203 P. 1214 P. 1228 P. 1261 P. 1268 P. 1280 P. 1246 P. 1256 1165 Series CY/CX Smooth Cylinder/Low Speed Cylinder Added compact type foot brackets. Compact foot bracket has the same width as the cylinder. Overall width reduced by up to 43% (for 12).

5

141 P. 155 P. 172 P. 198 P. 212 P. 183 P. 225 P. 233 P. 251 P. 265 P. 285 P. 294 P. 309 -X 137 Smooth/Low Speed Cylinders CQlY/CQlX Series Added compact foot brackets.

Compact 5-Port Solenoid Valve

Box p. 105 Terminal Block Box p. 106 Lead Wire p. 107 EX600 p. 108 EX245 p. 110 EX250 p. 112 EX260 p. 113 EX120 p. 114 Manifold Exploded View [Common Parts] p. 115 Type 10: How to Increase Connector Type Manifolds p. 115 For the JJ5SY1-10, JJ5SY3-10, JJ5SY5-10/ Manifold Parts Nos.

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Dedicated Controller/LC1 P.73 Controller setup software P.80 Dedicated teaching box P.82 Options P.85 Dedicated Regenerative Absorption Unit/LC7R P.86 Non-standard Motor Compatible Drivers P.89 73 2 Series LC1 Controller Single Axis Type Built-in AC Servo Driver Series LTF: Standard Motor Compatible How to Order 2V LC1 F 1 H 1 L 3 Number of axes Mounting bracket 1 3 5 1 axis M3

Aluminum High Vacuum Angle Valve

D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// H0 H4 H5 High temperature type 5 to 150C Solid state auto switch Note) Size 25 is not applicable for H4.

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Series MHSH3 MHSH3-32D to 80D 6-TA, thread depth TB 3-UA thread depth 6 UB P .C.D.R P (Finger operating port) 3-SA, counterbore dia.

CM2

+ Stroke H + Stroke Z + Stroke 20 to 32 ZZ + 2 x Stroke Boss-cut style Spring return ZZ + Stroke Spring extend ZZ + 2 x Stroke Built-in One-touch fittings One-touch fitting port size P Spring return One-touch fitting port size P Spring extend H1 H G FZ FY FX FT FD MM AL B1 F Z A B2 C2 H2 I B D E K N NA NN P Bore size (mm) 0 0.033 0 0.033 20 41 8 75 60 4 7 13 37 18 34 8 5 15.5 13 26 30 5

CJ2

to p.1.3-12 for details of the mounting nut.

Battery-less

/Belt Drive LEFB Series Battery-less Absolute (Step Motor 24 VDC) p. 12 Model Selection p. 13 How to Order p. 43 Specifications p. 45 Weight p. 45 Construction p. 46 Dimensions p. 47 Rod Type LEY Series Battery-less Absolute (Step Motor 24 VDC) p. 54 Model Selection p. 55 How to Order p. 61 Specifications p. 63 Weight p. 64 Construction p. 65 Dimensions p. 67 Guide Rod Type