MHZ

Pressure 0.2 MPa Overhang H (mm) 60 0.7 MPa 0.6 MPa 0.6 MPa 0.3 MPa 0.3 MPa 0.7 MPa 40 0.4 MPa 0.4 MPa 0.5 MPa 0.5 MPa 20 0 20 40 60 80 Gripping point L (mm) 12-2-14 14 Model Selection Series MHZ Confirmation of External Force on Fingers: Series MHZ2 Step 3 MHZ MHF L MHL L MHR My MHK Mr Mp MHS Fv L MHC MHT MHY L: Distance to the point at which the load is applied (mm) Maximum allowable

MHZ

0.2 MPa 5 50 L 0 10 20 30 40 50 60 0 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) MHZ2-16D/MHZL2-16D MHZ2-40D 500 70 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.5MPa 0.6 MPa 0.5MPa 400 0.6 MPa 0.6 MPa Gripping force (N) 50 Gripping force (N) 0.5 MPa 0.5 MPa 300 40 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 30 0.3 MPa 0.3 MPa 200 0.2

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model H G L M N E B F LQ (E) 2-B 12 19 10 12 6 8 10 4 6 LQ2T22 LQ2T21 4 6 LVN L 18 34.5 19 12 19.9 SMC 1/4 LQ2T52 LQ2T51 LQ2T42 LQ2T41 LQ2T33 LQ2T32 LQ2T31 F (M) (M) TI/ TIL 43 5 24 22 9 18 26.2 52 42.5 (E) (E) G H PA L L 6 30 21 28 11 22 33.1 59.5 51 Class 2, 3 PAX 7 36 26 32 14 28 40 58.5 PB (M) N Inch sizes Applicable tubing O.D.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

x M2: Rolling D-X Static Moment 20Ceiling mounting Horizontal mounting Wall mounting Data M2 M1 M3 M2 M1 M2 y z X x Y X Z y X x Y m3 x g x m1 x g m2 x g Vertical mounting Mounting orientation Ceiling m2 Wall m3 Vertical m4 Horizontal m1 Note) Static load m M3 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 M1 m1 x g x Y m2 x g x Y m3 x g x Z M2 z y Y Z m3 x g x X m4 x g x Y M3 m4 x

KJ

Branch Y: KQ2U Model H (Width across flats) D M L A Weight (g) Applicable tubing O.D.

REA/REB

L L A L Guide central axis (1 axis type) Opposite port side Port side For the double axis type, this is the cylinders central axis.

REA/REB

L L A L Guide central axis (1 axis type) Opposite port side Port side For the double axis type, this is the cylinders central axis.

CJ2

Bore A1 L L1 MM Part No. B H B H d C C d 10 8 21 M4 X 0.7 16.2 Y-J010B SNJ-006B 16 11 21 M5 X 0.8 16.6 Y-J016B M6 X 1.0 4 8 9.2 6 NTJ-006A 2.4 M3 X 0.5 6.4 5.5 6 SNJ-010B M8 X 1.0 4 11 12.7 10 NTJ-010A 3.2 M4 X 0.7 8.1 7 10 Part No.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

type plug connector (L): VQZ2 2(R)L -N3T, N7T, M5T DIN connector (Y): VQZ2 2(R)Y -N3T, N7T, M5T Indicator light 87 MAX.10 300 (Lead wire length) 83 Applicable cord O.D.

CJ2

Dd9 d L m t CJ2 l Applicable bore (mm) Applicable snap ring Part no.

CG5-S

Yellow (Y) Yellow (Y) T1613 is on a reel.

MY2

Port variations Applicable cylinder MY2C16/25/40 MY2H16/25/40 MY2HT16/25/40 R R L L L L L L L L R R R R R R L R Slide table operating direction 40 Series MY2 Auto Switch Precautions 1 Be sure to read before handling. Design and Selection Warning 1. Confirm the specifications.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

150 + l 20 151 150 130 129 170 + l 149 + l 180 + l 159 + l 25 158 157 137 136 179 + l 158 + l 187 + l 163 + l 32 165 165 141 141 187 + l 163 + l 212 + l 184 + l 40 187(196) 164 159(168) 207(216) + l 179(188) + l 192 242 + l 210 + l 50 217(229) 190 185(197) 237(249) + l 205(217) + l 222 252 + l 215 + l 63 227(239) 195 190(202) 247(259) + l 210(222) + l 232 303.5 + l 245 + l 80 288.5(302.5)

MB

Bore size (mm) Part no. l m L d Dd9 H B C D Applicable cotter pin CJ1 3 x 18 l 4 x 25 l 4 x 35 l 4 x 40 l 0.040 0.076 0.050 0.093 0.065 0.117 0.065 0.117 Note 1) When using cotter pin, flat washer is used together.

Fluoropolymer Piping Equipment

(E) Class 6 Class 2 to 5 Metric sizes Inch sizes Connection threads Rc/NPT E H L M Min. port size W Y Connection threads Rc/NPT E H L M Min. port size W Y Model Applicable tubing O.D. Model Applicable tubing O.D.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Shock absorber Port variations R L R L Tighten the four unit fixing bolts equally to secure the unit body. R R R R L L L L R L R L L R Slide table operating direction 8-14-26

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Vacuum Unit

No. 11 12 13 14 15 16 17 18 19 20 Exploded View y VVQ1000 51A C8 L Dimension 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. 21 22 23 24 25 26 27 28 29 30 Port size L Dimension 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 C8 8 One-touch fitting N9 5/16" One-touch fitting No. 31 32 33 34 35 36 37 38 39 40 L Dimension 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 33 Exploded

HRS100/150

/L] 0.1 or less v Iron (Fe) [mg/L] 1.0 or less v v Residual chlorine (Cl) [mg/L] 0.3 or less v Reference item Copper (Cu) [mg/L] 0.3 or less v Free carbon (CO2) [mg/L] 4.0 or less v Sulfide ion (S2) [mg/L] Should not be detected. v * In the case of [Mcm], it will be 0.003 to 0.01.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

L F9NWL 5m...