ＳＭＯＯＴＨ ＣＹＬＩＮＤＥＲ

Net weight Part No. 5g GR-L-005 10g GR-L-010 150g GR-L-150 C a u t i o n 1 When replacing mounting brackets, use socket wrench. Using other tools would cause deformation of nuts and inferior workability. Refer to the following table for sockets used.

9.8

D-DN

S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm.

S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm.

ZL3-OM00601

(mg/m3) 0.1 d 0.5 0.5 d 1.0 1.0 d 5.0 point() 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 Not specified 90,000 1,000 3 -20 3 1 4 Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified 100,000 5 +7 6 +10 3.3.2 Air pressure 1) Operation with a pressure exceeding the maximum operating pressure leads to breakage of the product.

ZL3-OM00801

N06 NPT3/4 5/16(inch) N04 2xNPT1/2 6) 5 DC24V *1G JIS B0202 ISO1603 ISO1179 8) Z 7 L L 0.3(m) 11) A NPN LO B PNP M M 0.3(m) MO 12) 9) M SI (kPa) D P (:psi) E 10) 14 GN (G) B G *7ZL212 27mm ZL212 (2 /1 , 4 ) E (2 ) F (2 ) V (1 ) 13 G 2m) W (2m) 5 No.ZL3-OM00801-A 2. 2.1 (1/P) (2/V) ZL3 ZL6 (3/E) // / (G) (2/V) 2.2 ZL6 1 ZL6 (ZL6-SC1-A) 2), 6 No.ZL3-OM00801-A 3. 3.1

Size: 2 (20), Body Material: A (Aluminum), Seal Material: F (FKM), Port Size: 301 (Orifice Diameter: ø3.2mm; Port Size: 1/8), Thread Type: N (NPT), Rated Voltage: 3 [120 (110) VAC], Electrical Entry: DZ (DIN Terminal w/Light, w/Surge Voltage Suppressor), Coil Orientation: U (Downward), Blow Port Position: F (Front)

Size: 2 (20), Body Material: A (Aluminum), Seal Material: F (FKM), Port Size: 302 (Orifice Diameter: ø3.2mm; Port Size: 1/4), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: WN (M12 Connector/without Connector Cable; with Surge Voltage Suppressor), Coil Orientation: U (Downward), Blow Port Position: F (Front)

Size: 20, Body Material: Aluminum, Seal Material: FKM, Port Size: Orifice Diameter: ø3.2mm; Port Size: 1/8, Thread Type: NPT, Rated Voltage: 3 [120 (110) VAC], Electrical Entry: DIN Terminal w/Light, w/Surge Voltage Suppressor, Coil Orientation: Downward, Blow Port Position: Front, Oil-free Option: -

Size: 20, Body Material: Aluminum, Seal Material: FKM, Port Size: Orifice Diameter: ø3.2mm; Port Size: 1/4, Thread Type: NPT, Rated Voltage: 24 VDC, Electrical Entry: M12 Connector/without Connector Cable; with Surge Voltage Suppressor, Coil Orientation: Downward, Blow Port Position: Front, Oil-free Option: -

CG1-OM0227

D-H7BALD-H7NF D-G59WD-G5PWD-K59W D-G59FD-G5NT D-C73CD-C80C D-B54D-B64D-B59W 3. 4. () () (M4 1~1.2Nm (M3 0.6~1Nm 11 <> D-M9NM9PM9BM9NM9PVM9BV D-M9NWM9PWM9BWM9NWM9PWVM9BWV D-M9NAM9PAM9BAM9NAM9PAVM9BAV D-A90A93A96A90VA93VA96V 5. <> 6080 D-M9A(V) M3M3 0.60.7Nm (M2.5) (M2.5)0.050.1Nm 56mm 1)(M2.5) 2)M3 BMA3 A 12 4 1) (BMA2-A)(BJ5-1/) () 2) (BMA2-AS/)(BJ4-1/) D-M9A(V) () BBA3:D-B5,

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

, D-F9WV D-F9P B, D-F9W D-A9V D-F9N D-F9V Number of auto switches 2 pcs. 15 Note) 20 Note) 10 10 5 10 Note) 15 Note) 20 Note) 5 5 1 pc.

CM2x-OM0230Q

PTFE X446 GR-F-005(5g) 1) 19 - 2) () 5. 5. 20 - 6. 1.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 8

Size: 2 (20), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 301 (Orifice Diameter: ø3.2mm; Port Size: 1/8), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: G (Grommet), Coil Orientation: Upward, Blow Port Position: F (Front)

Size: 20, Body Material: Aluminum, Seal Material: NBR, Port Size: Orifice Diameter: ø3.2mm; Port Size: 1/8, Thread Type: NPT, Rated Voltage: 24 VDC, Electrical Entry: Grommet, Coil Orientation: Upward, Blow Port Position: Front, Oil-free Option: -

Series ZSE10(F)/ISE10 Digital Pressure Switch ®

Option ZS-39-5G ZS-39-B ZS-39-D ZS-39-R ZS-39-01 ZS-39-N1 ZS-39-N2 Lead wire with connector (with connector cover) (5 cores, 2 m) Panel mount adapter Panel mount adapter + Front protective cover DIN rail adapter Front protective cover R1/8 piping adapter NPT1/8 piping adapter Made to Order 1

Size: 2 (20), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 302 (Orifice Diameter: ø3.2mm; Port Size: 1/4), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN Terminal w/Light, w/Surge Voltage Suppressor), Coil Orientation: U (Downward), Blow Port Position: Coil Orientation Upward: Bottom; Coil Orientation Downward: Top, Oil-free Option: D (Oil-free

Option: D (Oil-free)