LEC-OM07605CN -15 3.5.1 . 3-15 3.5.2 . 3-16 3.5.3 . 3-17 3.5.4 . 3-17 3.6 . 3-18 3.6.1 (SS1) . 3-18 3.6.2 . 3-19 3.6.3 . 3-20 3.6.4 EM2 . 3-20 3.7 . 3-21 3.7.1 . 3-21 3.7.2 . 3-22 3.8 . 3-23 3.8.1 . 3-23 3.8.2 . 3-24 3.8.3 . 3-26 1- 3.9 SSCNET . 3-27 3.10 . 3-29 3.10.1 . 3-29 3.10.2 . 3-30 3.11 . 3-34 4 41 4-18 4.1 . 42 4.1.1 . 42 4.1.2 . 43 4.1.3 . 45 4.2 . 45 4.3 . 47 4.3.1
ground Type 3 ground Type 3 ground Type 3 ground b) 3-wire type Wiring with signal ground line (SG) Master unit Slave unit 01 Slave unit 03 Slave unit 75 Type 3 ground Type 3 ground Type 3 ground Type 3 ground Twisted pair with shield Type 3 ground Type 3 ground Type 3 ground Type 3 ground 1-6-113 Type SF1 NKE Corporation Uni-wire System Type SJ1, SJ2 SUNX Corporation S-LINK System Type SG
Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06
ground Type 3 ground Type 3 ground Type 3 ground b) 3-wire type Wiring with signal ground line (SG) Master unit Slave unit 01 Slave unit 03 Slave unit 75 Type 3 ground Type 3 ground Type 3 ground Type 3 ground Twisted pair with shield Type 3 ground Type 3 ground Type 3 ground Type 3 ground 1-6-113 Type SF1 NKE Corporation Uni-wire System Type SJ1, SJ2 SUNX Corporation S-LINK System Type SG
Port size AS-D U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 AS-T ASP Needle Valve/Flow Rate Characteristics ASN AS2201FSl-U02, AS2211FSl-U02 AS2201FSl-U01, AS2211FSl-U01 300 600 AQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 500 ASV 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 03, 04 06, 07 200 400 AK 01, 23 300 VCHC 03, 04 100 200 ASR ASQ 01, 23
TMH M5 Port size ASD M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Applicable tubing O.D. Note) Type 01 02 03 04 Metric size Inch size Elbow Universal 2 3 1/8" 01 23 AS 3.2 03 05 07 09 11 13 04 06 08 10 12 4 5/32" AS-FE KE 6 3/16" Control U10/32 N01 N02 N03 N04 8 1/4" Meter-out Meter-in 0 1 10 5/16" Made to Order Refer to the below for details.
AS2002F-04-X12 Applicable tubing O.D. Made to Order Body size 100 200 205 300 400 M3, M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Grease-free (Sealant: Fluoro coated) + Restrictor (Without Check Valve) -X21 Metric size 02 23 04 06 08 10 12 Inch size 01 03 07 09 11 13 Lock nut option 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)
MQQ M Table (1) Recommended Speed Controller Bore size (mm) Model Elbow type RHC Straight type In-line type MK(2) AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS1001F-04-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS3001F-08-X214 AS3001F-08-X214 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 RS Q G AS2201F-01-06-X214 AS2301F-01-06-X214 2.
AS2001F-06-X214 AS2001F-06-X214 AS3001F-08-X214 AS3001F-08-X214 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 RS Q G AS2201F-01-06-X214 AS2301F-01-06-X214 2.
3 !2 y r @4 !4 !5 @9 #2 !8 @8 t u !0 e w #1 #3 !1 @0 i !7 @3 @1 @7 @2 @6 @5 #0 REAL10 Parts list Parts list Note No. Description No.
SZ 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Port size VF 3-position exhaust center 2-position double Nil Without sub-plate (For manifold) (A) 4 (B) 2 (A) 4 (B) 2 VP4 Metal 04 1/2 4 VQ 1/2 Porting specifications 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 Nil Side ported B Bottom ported VQ 4/5 3-position pressure center 2-position double (A) 4 (B) 2 (A) 4 (B) 2 Rubber VQC 1/2 5 Manual override
Type 2 3 Elbow Universal Applicable tubing O.D. Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.
) 3 (EB) 18 or less 29 or less 32 or less 82 or less 3 position 15 or less 33 or less 4 position dual 3 port valve 4 position dual 3 port valve: N.C.
Also when switches are shipped separately, BBA1, BBA3 are included. 3 Set screw M4 x 0.7 x 8L 2 D-A9 D-M9 BA-01, BA-02, BA-32, BA-04 BA-05, BA-06, BA-08, BA-10 BA2-020, BA2-025 BA2-032, BA2-040 BA5-050, BHN2-025, BSG1-032 BH2-040, BH2-050 BH2-080, BH2-100 BAF-32, BAF-04, BAF-05 BAF-06, BAF-08, BAF-10 Note 3) When using D-M9A(V), order stainless mounting screw kit BBA1 instead of the iron
M Element Replacement Procedure Body Model A B C D E F G H I J K L M N Size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 12.8 4 6 53 54 8.5 14.4 15.5 50 15 17.5 24 12.5 26 22.5 48 Metric size Inch size 15.2 6 8 9.5 16.6 17.5 61 16 19.5 27 13.5 28 65 24.5 52 Collar part arrow 57 8 10 69.5 70 18.5 11 18 21.5 65 17 21 29.5 14.5 30 27 Transparent cover 3 16 1 4 " 1 4 " 3 8 " 1
(A)4 2(B) (A)4 2(B) 4(A) 2(B) (EA)5 1 3(EB) (EA)5 1 3(EB) (P) (P) 3-position pressure center 5(EA) 3(EB) 1(P) (A)4 2(B) N.O. valve x 2 pcs. 2(B) 4(A) (EA)5 1 3(EB) (P) 3(EB) 5(EA) 1(P) N.C. valve, N.O. valve x 1 pc. of each 2(B) 4(A) 3(EB) 5(EA) 1(P) Component Parts No.
m, SPEEDCON compatible PCA-1557772 M8 (3 pin), Straight 3 m -101No.EX-OMO0027-A Revision history A: Contents revised in several places.
G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet
1][2]) [1][2] [0][0] 8 [0][1] [4][0] [6][0] [6][1] [8][0] [8][1] [C][O] 14 11 14 (4) ([3][3]) [3][3] [1][0] 4 [1][1] 1 [1][2] 2 [1][3] 3 [1][4] 4 [1][5] 5 [2][0] 8 [2][1] 1 [2][2] 2 [2][3] 3 [2][4] 4 [2][5] 5 (5) ([0][2][3][5]) [0][2] [0][0] 4 14 12 14 [3][5] 00 16 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 1 0F ABS 10 11 80 12 81 82 83 84 85 86 87 88 89 8A 8B
3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 Kit no.