Sine Cylinder Series REC

thread length FL AL NA K A U F N N ZZ + Stroke Z + Stroke S + Stroke L H RR (mm) A AL F FL G H H1 I K D B1 CX L KA CD E MM N Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 20 18 15.5 13 8 13 10 9 10.5 10 20 41 5 33.5 5 30 6 25 M10 x 1.25 26 22 19.5 13 10 17 10 9 10.5 10 20 45 6 37.5 5.5 30 8 32 M10 x 1.25 26 22 19.5 13 12 17 10 9 10.5 11 22 45 6 46.5 5.5 30 10 40 M14 x 1.5 32

Sine Cylinder Series REC

thread length FL AL NA K A U F N N ZZ + Stroke Z + Stroke S + Stroke L H RR (mm) A AL F FL G H H1 I K D B1 CX L KA CD E MM N Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 20 18 15.5 13 8 13 10 9 10.5 10 20 41 5 33.5 5 30 6 25 M10 x 1.25 26 22 19.5 13 10 17 10 9 10.5 10 20 45 6 37.5 5.5 30 8 32 M10 x 1.25 26 22 19.5 13 12 17 10 9 10.5 11 22 45 6 46.5 5.5 30 10 40 M14 x 1.5 32

Vacuum

Pad size s2-s8: Std.6mm; Optional see page 120 Pad size o l0-450: Spring force 't0, '13, 16, 20 1 0 , 1 6 , 2 5 , 4 06, 8, 10, 13, 16,20 2 , 4 , 6 , 8 , 1 0 , 1 3 , 1 6 , '5l3r" and 5/is' tube may be substluied for4mm and 8mm respeclively.

Modular Type Air Filters Series AF

C4SF-J C4SF-W C4SF-6 AD47-6 AD48-6 C4SF-6J C4SF-6W C4SF-2 AD47-2 AD48-2 C4SF-2J C4LF-8 AD47-8 AD48-8 C4LF-8J C1SF-6 AD17-6 C1SF-2 AD17-2 C2SF-C AD27-C C2SF-J C2SF-CJ C2SF-6 C2SF-6C AD27-6 AD27-6C C2SF-6J C2SF-6CJ C2SF-2 AD27-2 C2SF-2J C3SF-J C3SF-W C3SF-6 AD37-6 AD38-6 C3SF-6J C3SF-6W C3SF-2 AD37-2 AD38-2 C3SF-2J C3LF-8 AD37-8 AD38-8 C3LF-8J Polycarbonate Nylon Metal AC Metal

Pilot Operated

Solenoid valve (Port size) Orifice size Material Model VXD21 02 (1/4) 03 (3/8) 04 (1/2) 06 (3/4) VXD22 10 (1) 32 (32A) VXD23 40 (40A) 50 (50A) 3 (10 mm) 4 (15 mm) 5 (20 mm) 6 (25 mm) 7 (35 mm) 8 (40 mm) 9 (50 mm) Body Seal Brass (C37) Stainless steel Thread Port no. (Port size) NBR FKM EPDM Flange CAC407 Normally Open (N.O.)

Vacuum

Pad size s2-s8: Std.6mm; Optional see page 120 Pad size o l0-450: Spring force 't0, '13, 16, 20 1 0 , 1 6 , 2 5 , 4 06, 8, 10, 13, 16,20 2 , 4 , 6 , 8 , 1 0 , 1 3 , 1 6 , '5l3r" and 5/is' tube may be substluied for4mm and 8mm respeclively.

HRX-OM-T002

: 45 oC 12 12 10 10 Cooling capacity [kW] Cooling capacity [kW] 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 9-5 Cooling capacity(HRS090-A-20/40/46) 9.4.2 HRS090-W-20/40/46: Facility water temperature 32 oC : Facility water temperature 40 oC 12 14 12 10 10 Cooling capacity [kW] Cooling capacity

Series AS-FM/AS-M/ASD-FM

Max. 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 12.7 12.3 7 25 25.8 22.2 9.6 28.6 M5 x 0.8 8

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

-06 AS121F-M5-07 1/4" M5 x 0.8 M5 x 0.8 13.5 11.7 18.3 23.1 7 13.5 12 18.1 6 11.6 22.9 AS121F-U10/32-06 AS121F-U10/32-07 1/4" 10-32UNF 10-32UNF AS221F-01-23 AS221F-01-01 1/8" 20.4 3.2 9.3 20.4 16 27.5 27.5 16 9.3 12.7 12.7 AS221F-01-04 AS221F-01-03 5/32" 4 20.4 27.5 27.5 20.4 17 9.3 9.3 14.2 13.4 13.4 17 12 12 AS221F-01-06 AS221F-01-05 35.2 30.2 32.1 13.5 27.1 3/16" 6 23.1 16.5 30.2 35.2

Air Combination

(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC40B,C,D-(F,N)06(C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D AC50(A)-(F,N)06(F,N)10(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC50B-(F,N)06(F,N)10 (C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D AC60(A)-(F,N)10(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC60B-(F,N)10(C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D Contents

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

L (10) 8 Dimensions (24) (35) Applicable fittings size d 4 Model A L D 10-KQ2P-04 16 32 6 6 10-KQ2P-06 18 35 8 8 10-KQ2P-08 20.5 39 10 10 10-KQ2P-10 22 43 12 12 10-KQ2P-12 24 44.5 14 10-KQ2P-01 16 31.5 5 10-KQ2P-03 16 32 6 10-KQ2P-07 18 35 8.5 10-KQ2P-09 20.5 39 10 10-KQ2P-11 22 43 11.5 5.5 Rail mounting pitch 12.5 0 1 2 3 4 5 6 7 8 9 No.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Dimensions Applicable tubing O.D. d Inch Size Metric Size L3 (1) Model L3 Model Weight (g) Weight (g) M1 d M1 D1 D2 L2 L1 D2 D1 L2 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 6 7 8 9 12 18 21 24 26 31 3.2 4 6 4 6 6 8 6 7 8 12 13 26 31 AS1001FM-23 AS1001FM-04 AS1001FM-06 AS2001FM-04 AS2001FM-06 AS2051FM-06 AS2051FM-08 AS1001FM

Basic type / Direct mount type Series CY3B/CY3R

-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-08-X214 10-AS2001F-04-X214 10-AS1001F-04-X214 In-line type (throttle valve) 10-AS2001F-06-X214 10-AS1001F-06-X214 10-ASD330F-01-06 10-ASD230F-M5-04 Dual type (speed controller) CY3B CY3R 10-ASD330F-01-08 10-ASD230F-M5-06 AS2201FPQ

HRX-OM-Q026

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release Fan Breaker Trip alarm . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and

SQ1000/2000

When ordering with manifolds, add "-N" at the end of the manifold number. 1 2 3 4 5 6 7 8 ... n: Stations 53 Silencer cover Blanking plug (for One-touch fitting) L Dimensions 04 06 08 10 Applicable fitting size d 4 6 8 10 A Model A L D KQ2PKQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 16 18 20.5 22 32 35 39 43 6 8 10 12 This is inserted into the cylinder port and SUP and EXH ports that are not used.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

HAW2-04 IDF2D-1 AM150-03 AMD150-03 2.2 HAA7-06 HAW2-04 IDF3DAM150-03 AMD250-03 3.7 HAA7-06 HAW7-06 IDF4DAM250-03 AMD250-03 5.5 HAA7-06 HAW7-06 IDF6DAM250-04 AMD350-04 7.5 HAA7-06 HAW7-06 IDF8DAM350-04 AMD350-04 11 HAA15-10 HAW22-14 IDF11CAM350-06 AMD450-06 15 HAA15-10 HAW22-14 IDF15CAM450-10 AMD550-10 22 HAA22-14 HAW22-14 IDF22C1-3 AM550-10 AMD550-10 37 HAA37-14 HAW37-14 IDF37C1-3 AM650-

HEC-OM-S008

Host STX 37H Setting data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Thermo-con ACK CR Host SOH UT STX 37H Setting data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Thermo-con ACK UT CR HECR 4-6 Details of Communication Format 4.9 Offset setting (with writing FRAM) Set offset of each Thermo-con from host. In this command, offset data is memorized into FRAM.

REA/REB

driving force Fn (N) 50 100 100 40 30 CE1 20 30 40 50 20 30 40 50 20 CE2 10 Usable range 10 ML2B 10 Usable range Usable range 5 5 5 C J G5-S CV 1 1 0 2 3 4 5 6 1 1 0 2 3 4 5 6 1 7 8 9 10 11 12 13 7 8 9 10 11 1 0 2 3 4 5 6 7 8 9 101112131415 MVGQ Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CC

REA/REB

AS2001F-06-X214 AS2001F-06-X214 AS3001F-08-X214 AS3001F-08-X214 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 RS Q G AS2201F-01-06-X214 AS2301F-01-06-X214 2.

Series KP/KPQ/KPG

D Plug-in Reducer: KPQR, KPGR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A 39.4 20.1 3 KPQR04-06 KPGR04-06 6 4 10.4 18 4 4 M A L 41.9 20.2 4 KPQR04-08 KPGR04-08 8 42.5 20.8 4 KPQR06-08 KPGR06-08 6 12.8 19.5 10 10 45 21.2 5 KPQR06-10 KPGR06-10 Applicable fitting size d 10 47 23.2 5 KPQR08-10 KPGR08-10 8 15.2